• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.92-96
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• 2004

Scales, accumulated on semiconductor equipment parts during device fabrication processes, often lower equipment lifetime and production yields. Thus, many equipments parts have be cleaned regularly. In this study, an attempt to establish an effective process for the removal of scales on the sidewall of collimators in the chamber of sputter is made. The EDX analysis revealed that the scales are composed of Ti and TiN with the colummar structure. It was found that the heat-treatment at 700 for 1 min. after the oxide removal in the HF solution, and then etching in the HNO3 : H2SO4 : H2O =4:2:4 solution for 5.5 hrs at 67 was the most effective process for the scale removal.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.94-94
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• 2000

증류수(Distilled Water)와 메탄올(CH3OH)의 혼합용액을 전기분해하여 Si 기판위에 다이아몬드상 카본을 증찰하였다. Si 기판은 HF(16%) 용액으로 산화막을 제거하고, 전이금속 Co, Ni 박막을 증착시킨 후 전기 분해 장치의 전극 (-)단자에 연결하였다. (+)단자에는 순도 99%의 탄소 전극을 사용하였다. 기존의 에탄올, 에틸렌 글리콜(H2O-HOCH2CH2OH), 메탄올등의 전해질에 1000V 이상의 고전압을 인가하는 방법대신 메탄올과 증류수, 그리고 암모니아수(NH4OH)의 비를 달리하는 혼합액을 전해질로 사용하였다. 그결과 낮은 전압 (800V 이하)과 낮은 온도(6$0^{\circ}C$ 미만)에서도 다이아몬드상 카본을 증착할 수 있었다. 증착한 시료와 용액은 XRD, SEM, FT-IR 등을 이용하여 분석하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.5
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• pp.458-461
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• 2004

In order to improve the adhesion properties of copper, MPS(3-mercaptopropyltrimethoxysilane) organic film were employed. The plasma pretreatment in pure He or $He/O_{2}$ mixed gas environment greatly increased adhesion force. Adhesion force was measured by scratch test with nano indenter. Microstructures and surface roughness were observed with scanning electron microscope(SEM). The characteristics of MPS layer for pretreatment were studied with flourier transform infrared spectroscope(FT-IR) and contact angle tester. The heighest adhesion was achieved in the specimen pretreated with mixed plasma and NPS coating, which was 56mN. Other specimen showed lower value by $20{\%}$ to $30{\%}$. The roughness of substrate was not affected by the bonding strength of copper plating.

• Corrosion Science and Technology
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• v.21 no.5
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• pp.340-347
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• 2022

In this research, mixed metal oxide (TiO₂, RuO₂) coating was applied to grade 1 titanium as a bipolar plate for polymer electrolyte membrane fuel cell (PEMFC). Electrochemical experiments were carried out in an aqueous solution of pH 3 (H₂SO₄ + 0.1 ppm HF, 80 ℃) determined by DoE. The air was bubbled to simulate a cathode environment. Potentiodynamic polarization test revealed that corrosion current densities of the titanium substrate and MMO-coated specimen were 0.180 µA/cm² and 4.381 µA/cm², respectively. There was no active peak. After potentiostatic experiment, current densities of the titanium substrate and the MMO-coated specimen were 0.19 µA/cm² and 1.05 µA/cm², respectively. As a result of observing the surface before and after the potentiostatic experiment, cracked dried clay structures were observed without corrosion damage. Both the titanium substrate and the MMO-coated specimen could not satisfy the interfacial contact resistance suggested by the DoE. Thus, further research is needed before they could be applied as bipolar plates.

• Nuclear Engineering and Technology
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• v.54 no.5
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• pp.1560-1569
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• 2022

Liquid fueled molten salt reactors (MSRs) have seen renewed interest because of their inherent safety features, higher thermal efficiency and potential for efficient thorium utilisation for power generation. Thorium fluoride is one of the salts used in liquid fueled MSRs employing Th-U cycle. In the present study, ThF₄ was prepared by hydro-fluorination of ThO₂ using anhydrous HF gas. Process parameters viz. bed depth, hydrofluorination time and hydrofluorination temperature, were optimized for the preparation of ThF₄ in a static bed reactor setup. The products were characterized with X-Ray diffraction and experimental conditions for complete conversion to ThF₄ were established which also corroborated with the yield values. Hydrofluorination of ThO₂ at 450 ℃ for half an hour at a bed depth of 6 mm gave the best result, with a yield of about 99.36% ThF₄. No unconverted oxide or any other impurity was observed. Rietveld refinement was performed on the XRD data of this ThF₄, and Chi2 value of 3.54 indicated good agreement between observed and calculated profiles.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.30.1-30.1
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• 2009

정보화가 급속히 진전됨에 따라 보다 많은 양의 정보를 전송, 처리, 저장하게 되면서 이를 위해 대용량, 고속, 비휘발성의 특징을 갖는 차세대 메모리의 개발이 절실히 요구되고있다. 이 중 저항 변화 메모리(ReRAM)는 일반적으로 TiO2, Al2O3, NiO2, HfO2, ZrO2 등의 전이금속산화물을 이용한 MIM 구조로서 적당한 전기 신호를 가하면 저항이 높아서 전도되지 않는 상태(Offstate)에서 저항이 낮아져 전도가 가능한 상태(On state)로 바뀌는 메모리 특성을가진다. ReRAM은 비휘발성 메모리이며 종래의 비휘발성 기억소자인 Flash memory 보다 access time 이105 배 이상 빠르고, 5V 이하의 낮은 전압에서도 동작이 가능하다. 또한 구조가 간단하여 공정 단순화가 가능하고 소자의 집적화도 쉽다는 점 등 많은 장점들이 있어서 Flash memory를 대체할 수 있는 유력한 후보로 여겨지고 있다. 본연구에서는 DC-magnetron Sputtering 방법으로 전이금속 박막을 증착하고, Dry furnace로 산화시켜 전이금속산화물 박막을 제작한 후 저항변화 특성을 연구하였다. 두 개의 전이금속산화물 박막을 dual-layer로 형성시켜 저항변화특성을 관찰하였으며 또한, 전이금속산화물 박막의 조성을 달리 하여 저항변화를 관찰 하였다. 전이금속산화물 박막의 전기적 특성을 알아보기 위해 Si(100) wafer 위에 Pt를 이용 MIM 형태로 capacitor 시편을 제작 하여, probe station으로 I-V 측정을 하였고 조성 및 표면 분석을 위해서는 AES와 AFM을, 미세구조를 분석을 위해서는 TEM과 SEM 을 사용하였다.

• 한국신재생에너지학회:학술대회논문집
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• 2011.11a
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• pp.100-100
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• 2011

Nanomaterial architecture with highly ordered, vertically oriented $TiO_2$ nanotube arrays shows a good promise for diverse technological applications. As inspired from the literature reports that Nickel modification can improve the photocatalytic activity of $TiO_2$, it was planned to coat Ni into the $TiO_2$ matrix. In this study, first $TiO_2$ nanotubes(TiNTs) were prepared by anodization (60V,3min) in HF-free aqueous electrolyte on ultrasonically cleaned polished titanium sheet substrates ($1{\times}7cm^2$). The typical thickness of the sintered TiNT ($500^{\circ}C$for10min) was ~1 micronas confirmed from the FESEM study. In the next part, as-anodized and sintered TiNT/Ti photoanodes were used to coat Ni by AC electrodeposition from aqueous 0.1M nickel sulphate solution. During AC electrodeposition, conditions such as 1V DC offset voltage, 9V amplitude (peak-to-peak) and 750 Hz frequency were fixed constant and the deposition time was varied as 0.5 min, 1 min, 2 min and 10 min. The photoelectrochemical performance of pristine and Ni modified TiNT/Ti photoanodes was measured in 1N NaOH electrolyte under 1 SUN illumination in the potential range of -1V and 1.2V versus Ag/AgCl reference electrode. The photocurrent performance of TiNT/Ti photoanode decreased upon Ni modification and the results were confirmed after repeated experiments. This suggests us that Ni modification inhibits the photoelectrochemical performance of $TiO_2$ nanotubes.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.6
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• pp.445-449
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• 2020

Non-volatile memory is approaching its fundamental limits with the Si₃N₄ storage layer, necessitating the use of alternative materials to achieve a higher programming/erasing speed, larger storage window, and better data retention at lower operating voltage. This limitation has restricted the development of the charge-trap memory, but can be addressed by using high-k dielectrics. The paper reviews the doping of nitrogen, titanium, and yttrium on high-k dielectrics as a storage layer by comparing MONOS devices with different storage layers. The results show that nitrogen doping increases the storage window of the Gd₂O₃ storage layer and improves its charge retention. Titanium doping can increase the charge capture rate of HfO₂ storage layer. Yttrium doping increases the storage window of the BaTiO₃ storage layer and improves its fatigue characteristics. Parameters such as the dielectric constant, leakage current, and speed of the memory device can be controlled by maintaining a suitable amount of external impurities in the device.

• Journal of the Korean Magnetics Society
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• v.15 no.2
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• pp.100-105
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• 2005

$Ni_{0.9}Zn_{0.1}Fe_2O_4$ nanoparticles have been prepared by a sol-gel method. The structural and magnetic properties have been investigated by DTA/TGA, XRD, SEM, and $M\ddot{o}ssbauer$ spectroscopy, VSM. $Ni_{0.9}Zn_{0.1}Fe_2O_4$ powder that was annealed at $300^{\circ}C$ has spinel structure and behaved superparamagnetically. The estimated size of superparammagnetic Ni-Zn ferrite nanoparticle is around 10 nm. The hyperfine fields at 13 K for the A and B patterns were found to be 533 and 507 kOe, respectively. The blocking temperature ($T_B$) of superparammagnetic $Ni_{0.9}Zn_{0.1}Fe_2O_4$ nanoparticle is about 250 K. The magnetic anisotropy constant and relaxation time constant of $Ni_{0.9}Zn_{0.1}Fe_2O_4$ nanoparticle were calculated to be $1.6\times10^6\;ergs/cm^3$ and ${\tau}_0=5.0{\times}10^{-13}$ s, respectively. Also, Temperature increased up to $43^{\circ}C$ within 10 minutes under AC magnetic field of 7 MHz. It is considered that $Ni_{0.9}Zn_{0.1}Fe_2O_4$ powder that was annealed at $300^{\circ}C$ is available for biomedicine application such as hyperthermia, drug delivery system and contrast agents in MRI.

• Proceedings of the Mineralogical Society of Korea Conference
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• 2003.05a
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• pp.67-67
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• 2003

The chemical compositions and textural relationships of the Nb-Zr oxide minerals including pyrochlore [ideally (Ca,Na)$_2$Nb$_2$O$\sub$6/(OH,F), with up to 24% UO$_2$ and 16% Ta$_2$O$\sub$5/] and baddeleyite [ideally ZrO$_2$, with up to 6% Nb$_2$O$\sub$5/] in the Sokli carbonatite complex, Kola Peninsula, Arctic are described. These two minerals in carbonatites are the major hosts for the HFSEs such as U, Th, Ta, Nb, Zr and Hf and thus are interest both economically and petrologically. The Sokli carbonatite complex (360-370 Ma) in Northern Finland, which forms a part of the Paleozoic Kola Alkaline Province (KAP), is mainly composed of multi-stages of carbonatite and phoscorite associations (P1-C1 P2-C2, P3-C3, D4 and D5) surrounded by altered ultramafic rocks (olivinite and pyroxenite) and cut by numerous small dikes of ultramafic lamprophyre. The Sokli complex contains the highest concentration in niobium and probably in tantalum, which are economically very important to modern steel technology, among the ultramafic-alkaline complexes of the KAP. Pyrochlore and baddeleyite mostly concentrate in the phoscorites. Pyrochlores in the Sokli complex are generally rounded octahedra and cubes in shape, red brown to grey yellow in color, and 0.2 to 5 mm in size. They are found in all calcite carbonatites, phoscorites and dolomite carbonatites, except P1-C1 rocks. These pyrochlores display remarkable zonations which depend on host rock compositions, and have significant compositional variations with evolution of the Sokli complex. The common variation scheme is that (1) early pyrochlore is highly enriched in U and Ta; (2) these elements decrease abruptly in the intermediate stage, while Th and Ce increase, and (3) late stage pyrochlore is low in U, Ta, Th, and Ce, and correspondingly high in Nb. Baddeleyites in the Sokli complex occur in the early P1-C1 and P2-C2 rocks and rarely in P3. They crystallized earlier than pyrochlores, and occasionally show post-magmatic corrosion and replacement. The FeO and TiO$_2$ contents of baddeleyites are much lower than those of the other terrestrial and lunar baddeleyites, whereas Nb$_2$O$\sub$5/ and Ta$_2$O$\sub$5/ contents are the highest among the reported compositions. Ta/Nb and Zr/Nb ratios of pyrochlores and baddeleyites decrease towards later stage facies, which is in accordance with the whole rock compositions. The variation of Ta/Nb and Zr/Nb ratios of pyrochlores and baddeleyites is considered to be a good indicator to trace an evolution of the carbonatite complexes.