• 제목/요약/키워드: $H_2S$ sensor

검색결과 464건 처리시간 0.03초

스퍼터링 법으로 증착한 CdS 박막의 광전도도 특성 평가

  • 허성기;장동미;최명신;안준구;성낙진;윤순길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.81-81
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    • 2008
  • Applications of CdS films in this study are to exhibit a high conductivity when they are exposed at light with visible wavelength and sequentially to show a low conductivity in dark state. For this purpose, CdS films should have a high photosensitivity, still maintaining a high conductivity at a visible light. In this study, CdS films were prepared at room temperature on glass substrates by rf magnetron sputtering. In order to increase the photo-conductivity in visible light, various defect levels should be located within the CdS band gap. In order to nucleate the defect sites within the CdS band gap, CdS films were deposited on glass substrates at room temperature using various $H_2$/(Ar+$H_2$) flow ratios by an rf magnetron sputtering. Through the investigation of the structural and photoconductive properties of CdS films by an addition of hydrogen, the relationship between photo- and dark-resistance in CdS films was investigated in detail. 200-nm-thick CdS films for photoconductive sensor applications were prepared at various $H_2$/(Ar+$H_2$) flow ratios on glass substrates at room temperature by rf magnetron sputtering. Sulfur concentration in CdS films crystallized at room temperature with (002) preferred orientation depends directly on the hydrogen atmosphere and the surface roughness of the films gradually increases with increasing hydrogen atmosphere. Films deposited at 8% of $H_2$/(Ar+$H_2$) exhibit an abrupt decrease of dark- and photo-resistance, showing a low photo-sensitivity ($R_{dark}/R_{photo}$). Onthe other hand, films deposited at a hydrogen atmosphere of 42% exhibit a photo-sensitivity of $5\times10^3$, maintaining a photo-resistance of an approximately $2\times10^4\Omega$/square. The dark- and photo-resistance values of CdS films were related with a composition, surface roughness, and defect sites within the band gap.

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졸-겔법으로 증착된 ZnO 나노막대를 이용한 고감도 이산화질소 가스 센서 제작 및 특성 연구 (The highly sensitive NO2 gas sensor using ZnO nanorods grown by the sol-gel method)

  • 박소정;곽준혁;박종혁;이홍열;문승언;박강호;김종대;김규태
    • 센서학회지
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    • 제17권2호
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    • pp.147-150
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    • 2008
  • Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.

박막 형 가스 센서에 있어서 가스 감지 속도에 대한 막 두께의 영향 (Effect of Film Thickness on Gas Sensing Behavior of Thin-Film-Type Gas Sensor)

  • 유도준;준 타마키;노리오 미우라;노보루 야마조에;박순자
    • 한국재료학회지
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    • 제6권7호
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    • pp.716-722
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    • 1996
  • 박막 형 가스 센서의 막 두께가 가스 감지 특성에 미치는 영향을 단순화된 모델로부터 수식으로 유도하여 해석하였고, 그것을 ${SnO}_{2}$와 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과에 적용하였다. 유도된 수식으로부터 박막 가스 센서의 가스 감지 특성은 가스의 박막 안으로의 확산성에 크게 의존하며, 그 가스 확산성은 박막의 두께, 가스의 센서 재료의 반응성, 작동 온도 등에 의해서 결정됨을 알 수 있었다. 또한 이 수식은 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과와 비교적 잘 일치하였고, CuO-${SnO}_{2}$ 박막과 ${SnO}_{2}$ 박막의 서로 판이한 ${H}_{2}S$ 감응 특성에 대한 설명에 적용되었다. 이로부터, 일반적인 산화물 반도체식 가스 센서의 가스 감지 특성이 가스 확산성에 의해서 어떻게 지배되는가를 구체적으로 제안하였다.

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액체누설 감지용 테이프형 필름센서 (Tape-Type Liquid Leakage Film Sensor)

  • 유동근;김경신;유홍근;한국희;김동준;김정현;한상호;조광섭
    • 한국진공학회지
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    • 제20권2호
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    • pp.146-154
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    • 2011
  • 접착테이프 형태의 액체누설 감지 필름 센서와 이를 이용하고 경보 장치를 포함한 감지 시스템을 개발하였다. 액체누설 감지 필름형 테이프 센서는 베이스 필름층, 전도성 라인층, 보호 필름층으로 구성되며, 테이프의 두께 $300{\sim}500{\mu}m$, 폭 3.55 cm, 그리고 단위 테이프의 길이는 200 m이다. 전도성 라인층의 필름에는 3개의 전도선과 1개의 저항선이 있다. 이들은 도전성 은나노 잉크를 전자인쇄방식으로 설치한다. 이들 저항선과 전도선 사이에 액체가 누설되어 전기적으로 상호 통전되면, 두 선사이의 저항변화를 전압의 변화로 계측하여 누설 위치를 감지한다. 물을 포함한 전도성 액체에 대한 누설 위치 감지에서 길이 200 m에서 오차 범위는 ${\pm}1m$ 이내이다.

초소형 BLDC모터 및 센서리스 구동모듈 개발 (Development of a micro BLDC Motor and Sensorless Drive)

  • 최준혁;정인성;김주한;허진;성하경;조순봉
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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    • pp.1444-1446
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    • 2005
  • Recently most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, a design and fabrication result of an ultra-small brushless DC motor is presented. This motor is designed to 3-phase coreless winding and operated with sensor-less type driver. Test results confirmed the feasibility of the proposed motor drive system design.

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영상센서를 위한 비정질 실리콘 박막트랜지스터의 제작 및 특성 (Fabrication and Characteristics of a-Si : H TFT for Image Sensor)

  • 김영진;박욱동;김기완;최규만
    • 센서학회지
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    • 제2권1호
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    • pp.95-99
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    • 1993
  • 영상 센서를 위한 비정질 실리콘 박막트랜지스터 (a-Si : HTFT)를 제작하고 그 동작 특성 을 조사하였다. 게이트 절연막으로는 비정질 실리콘 질화막(a-SiN : H)을 증착하였으며 소오스와 드레인 영역에서의 저항성 접합을 위해 $n^{+}$ 형 비정질 실리콘($n^{+}$-a-Si : H)을 증착하였다. 이 때 a-SiN : H막과 a-Si : H막의 두께는 각각 $2000{\AA}$, $n^{+}$-a-Si : H막의 두께는 $500{\AA}$이었다. 또한 a-Si : H TFT의 채널길이와 채널폭은 각각 $50{\mu}m$$1000{\mu}m$였다. 본 연구에서 제작한 a-Si : H TFT의 ON/OFF 전류비는 $10^{5}$, 문턱전압은 6.3 V 그리고 전계효과 이동도는 $0.15cm^{2}/V{\cdot}s$로 나타났다.

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Quasi-Solid-State Hybrid Electrolytes for Electrochemical Hydrogen Gas Sensor

  • Kim, Sang-Hyung;Han, Dong-Kwan;Hong, SeungBo;Jeong, Bo Ra;Park, Bok-Seong;Han, Sang-Do;Kim, Dong-Won
    • Journal of Electrochemical Science and Technology
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    • 제10권3호
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    • pp.294-301
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    • 2019
  • The quasi-solid-state hybrid electrolytes were synthesized by chemical cross-linking reaction of methacrylate-functionalized $SiO_2$ ($MA-SiO_2$) and tetra (ethylene glycol) diacrylate in aqueous electrolyte. A quasi-solid-state electrolyte synthesized by 6 wt.% $MA-SiO_2$ exhibited a high ionic conductivity of $177mS\;cm^{-1}$ at room temperature. The electrochemical $H_2$ sensor assembled with quasi-solid-state electrolyte showed relatively fast response and high sensitivity for hydrogen gas at ambient temperature, and exhibited better durability and stability than the liquid electrolyte-based sensor. The simple construction of the sensor and its sensing characteristics make the quasi-solid-state hydrogen sensor promising for practical application.

스마트팩토리 실현을 위한 다중센서기반 모바일로봇의 위치 및 자세제어에 관한 연구 (A Study on Orientation and Position Control of Mobile Robot Based on Multi-Sensors Fusion for Implimentation of Smart FA)

  • 동근한;김희진;배호영;김상현;백영태;한성현
    • 한국산업융합학회 논문집
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    • 제22권2호
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    • pp.209-218
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    • 2019
  • This study proposes a new approach to Control the Orientation and position based on obstacle avoidance technology by multi sensors fusion and autonomous travelling control of mobile robot system for implimentation of Smart FA. The important focus is to control mobile robot based on by the multiple sensor module for autonomous travelling and obstacle avoidance of proposed mobile robot system, and the multiple sensor module is consit with sonar sensors, psd sensors, color recognition sensors, and position recognition sensors. Especially, it is proposed two points for the real time implementation of autonomous travelling control of mobile robot in limited manufacturing environments. One is on the development of the travelling trajectory control algorithm which obtain accurate and fast in considering any constraints. such as uncertain nonlinear dynamic effects. The other is on the real time implementation of obstacle avoidance and autonomous travelling control of mobile robot based on multiple sensors. The reliability of this study has been illustrated by the computer simulation and experiments for autonomous travelling control and obstacle avoidance.