• Korean Journal of Materials Research
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• v.14 no.2
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• pp.90-93
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• 2004

Silicon dioxide thin films were deposited on p-type Si (100) substrates by atomic layer deposition (ALD) method using alternating exposures of $SiH_2$$Cl_2$ and $O_3$ at $300^{\circ}C$. $O_3$ was generated by corona discharge inside the delivery line of $O_2$. The oxide film was deposited mainly from $O_3$ not from $O_2$, because the deposited film was not observed without corona discharge under the same process conditions. The growth rate of the deposited films increased linearly with increasing the exposures of $SiH_2$$Cl_2$ and $O_3$ simultaneously, and was saturated at approximately 0.35 nm/cycle with the reactant exposures over $3.6 ${\times}$ 10^{9}$ /L. At a fixed $SiH_2$$Cl_2$ exposure of $1.2 ${\times}$ 10^{9}$L, growth rate increased with $O_3$ exposure and was saturated at approximately 0.28 nm/cycle with $O_3$ exposures over$ 2.4 ${\times}$ 10^{9}$ L. The composition of the deposited film also varied with the exposure of $O_3$. The [O]/[Si] ratio gradually increased up to 2 with increasing the exposure of $O_3$. Finally, the characteristics of ALD films were compared with those of the silicon oxide films deposited by conventional chemical vapor deposition (CVD) methods. The silicon oxide film prepared by ALD at $300^{\circ}C$ showed better stoichiometry and wet etch rate than those of the silicon oxide films deposited by low-pressure CVD (LPCVD) and atmospheric-pressure CVD (APCVD) at the deposition temperatures ranging from 400 to $800^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.29 no.12
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• pp.919-925
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• 1992

Continuous synthesis process for monodispersed zirconia powders with ultrasonic wave mixing was developed. Reactant solutions were flowed through a T-tube with small diameter and then mixed in a microscale with ultrasonification. Reaction and aging were followed during the mixed solution of reactants is in plug flowing through a narrow long teflon tubing. Zr(n-OC4H9)4 in ethanol and H2O in ethanol were used as reactants. From this process monodispersed, spherical, non-agglomerated, singlet hydrated zirconia powders with 0.6 $\mu\textrm{m}$ average size were obtained. Geometrical standard deviation of the particle size distribution was less than 1.2 with ultrasonic mixing, and the geometrical standard deviation was not affected by the flow rate of the reactants.

• Journal of the Korean Institute of Gas
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• v.16 no.6
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• pp.17-22
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• 2012

In this study, characteristics of reforming process of Automotive LPG fuel using plasma reactor are investigated. Because plasma reformer technology has advantages of a fast start-up and wide fuel/oxidizer ratio of operation, and reactor size is smaller and more simple compared to typical combustor and catalytic reactor, plasma reforming is suitable to the on-board vehicle reformer. To evaluate the characteristics of the reforming process, parametric effect of $O_2$/C ratio, reactant flow rate and plasma power on the process were investigated. In the test of varying $O_2$/C ratio from partial oxidation stoichiometry to combustion stoichiometry, conversion of LPG was increased but selectivity of $H_2$ decreased. The optimum condition of $O_2$/C ratio for the highest $H_2$ yield was determined to be 0.8~0.9 for 20~50 lpm. The result can be a guide to map optimal condition of reforming process.

• Journal of the Korean Ceramic Society
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• v.54 no.2
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• pp.137-140
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• 2017

A $TiO_2$ nanofilm was deposited on ${\alpha}-Fe_2O_3$ nanopowders using the atomic layer deposition method. The $TiO_2$ film was prepared at $300^{\circ}C$ using $Ti(N(CH_3)_2)_4$ and $H_2O$ as the precursor and reactant gas, respectively. The thickness and composition of the $TiO_2$ surface were characterized by TEM and EDS measurements. The TEM results showed that the growth rate of the film was about $0.12{\AA}/cycle$. The EDS and SAED analyses showed the presence of titanium oxide on the surface of the ${\alpha}-Fe_2O_3$ nanopowders, confirming the deposition of the $TiO_2$ nanofilm. The Zeta potential and sedimentation test results showed that the dispersibility of the coated nanopowders was higher than that of the uncoated nanopowders. This is attributed to the electrostatic repulsion between the $TiO_2$-coated layers on the surface of the ${\alpha}-Fe_2O_3$ nanopowders. The results revealed that the $TiO_2$-coated layers modified the surface characteristics of the ${\alpha}-Fe_2O_3$ nanopowders and improved their dispersibility.

• Korean Journal of Materials Research
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• v.26 no.3
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• pp.149-153
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• 2016

Nanosized zeolites were prepared in an autoclave using tetraethoxysilane (TEOS), tetrapropylammonium hydroxide (TPAOH), and $H_2O$, at various hydrothermal synthesis temperatures. Using transmission electron microscopy and particle size analysis, the nanopowder particulate sizes were revealed to be 10-300 nm. X-ray diffraction analysis confirmed that the synthesized nanopowder was silicalite-1 zeolite. Using atomic layer deposition, the fabricated zeolite nanopowder particles were coated with nanoscale $TiO_2$ films. The $TiO_2$ films were prepared at $300^{\circ}C$ by using $Ti[N(CH_3)_2]_4$ and $H_2O$ as precursor and reactant gas, respectively. In the TEM analysis, the growth rate was ${\sim}0.7{\AA}/cycle$. Zeta potential and sedimentation test results indicated that, owing to the electrostatic repulsion between $TiO_2$-coated layers on the surface of the zeolite nanoparticles, the dispersibility of the coated nanoparticles was higher than that of the uncoated nanoparticles. In addition, the effect of the coated nanoparticles on the photodecomposition was studied for the irradiation time of 240 min; the concentration of methylene blue was found to decrease to 48%.

• Proceedings of the KIEE Conference
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• 1993.07b
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• pp.1271-1273
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• 1993

$SiO_2$ and SiON films are formed by Laser CVD for inter-level dielectrics in submicron VLSI. This technique is noticeable that film formation can be done at low temperatures, below $300^{\circ}C$ with less damage. An ArF Excimer Laser with wave length of 193nm is used to excite and dissociate reactant gases. After film formation growth rate, refractive index, I-V curve, and step coverage characteristics of the films were evaluated.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.382-382
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• 2009

염료감응형 태양전지의 구성체 중 전극으로 연구 되어 지고 있는 $TiO_2$는 기존에 대량 생산이 가능한 spin coating법, screen printing법, spray법의 연구가 이루어져 왔으나 고 효율 태양전지에 쓰이는 전극 시스템에 비해 고 분산성을 지닌 $TiO_2$페이스트를 제조 하는데 어려움이 있다. 그리고 플렉시블 디스플레이 소자의 응용을 위해서는 소자 공정 온도인 $250^{\circ}C$ 이하의 공정 온도가 요구 되어 지므로 고온공정인 CVD법은 이에 적합하지 않다. 이에 본 연구는 진공 증착 방법인 광원자층증착법을 이용하여 $150^{\circ}C$이하의 저온공정온도에서도 적용이 가능한 $TiO_2$ 박막을 185nm의 UV light를 조사하여 glass 기판위에 제조 하고 그에 따른 박막의 물성 분석을 하였다. Mo source로는 titanium tetraisopropoxide(TTIP)와 reactant gas 로는 $H_2O$를 사용하였으며 불활성 기체인 Ar 가스는 purge 가스로 각각 사용하였다. $100^{\circ}C{\sim}250^{\circ}C$ 공정온도를 변수로 $TiO_2$ 박막을 제조 하였으며 제조된 $TiO_2$ 박막의 물성 분석을 위해 FESEM, TEM을 이용하여 표면 및 두께를 분석하였다. 또한 $100^{\circ}C$ 400 cycles에서 약 12nm 막 두께를 관찰 할 수 있었으며 그 결과 박막의 성장률이 $0.3{\AA}$/cycle 임을 확인 할 수 있었다. 그리고 UV-VIS을 이용하여 박막의 좌외선에 대한 흡수도 및 투과도 분석을 하였다. 또한 XPS 성분 분석을 통하여 $100^{\circ}C$의 저온 공정에서 형성된 박막이 $TiO_2$임을 확인 하였다. 이러한 결과에서 185nm의 UV light에 의한 광원자층 증착법으로 $100^{\circ}C$의 저온에서도 $TiO_2$ 박막이 증착 되는 것을 확인 할 수 있었다.

• Journal of Hydrogen and New Energy
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• v.21 no.6
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• pp.479-486
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• 2010

In order to confirm the effect of $HI_x$ solution on Bunsen reaction in Sulfur-Iodine thermochemical hydrogen production process, the reaction was investigated using $HI_x$ solution as a reactant. The phase separation characteristics of reaction with $HI_x$ solution were compared with the reaction using $I_2$ and $H_2O$ as reactants. Firstly, saturation points of $I_2$ in $HI_x$ solution at various temperatures were investigated to determine reaction conditions. With increasing temperature, the amounts of unreacted $I_2$ and $H_2O$ in $HI_x$ solution were increased, while impurities (HI in $H_2SO_4$ phase and $H_2SO_4$ in $HI_x$ phase) in each phase were decreased. The volumes of $H_2SO_4$ phase obtained from Bunsen reaction with $HI_x$ solution was relatively less than those obtained from the reaction with $I_2$ and $H_2O$. The difficulty of phase separation in Bunsen reaction using $HI_x$ solution may be due to the insufficient amount of $H_2O$ existed in $HI_x$ phase after reaction. Therefore, we concluded that the supplement amount of $H_2O$ should be calculated on the basis of the moles of HI and $H_2SO_4$ and added to the reaction system for good phase separation.

• Journal of the Mineralogical Society of Korea
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• v.18 no.1
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• pp.11-17
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• 2005

Na-A zeolite were synthesized from melting slag of the incinerated ash by the alkaline activation processes. The experiments were performed in stainless steel vessels, with continuous stirring during the reaction periods. The silica-rich solution, a starting material, which was the waste of crystal growth factory, contains 5.7 wt% SiO₂ and 3.2 wt% Na₂O. And NaAlO₂ was made by the reaction of aluminium dross and NaOH solution and its molar ratios were Na₂O/Al₂O₃= 1.2 and H₂O/Na₂O=9. During the residence time of 7∼8 h at 80℃, the mixing of the silica-rich solution, NaAlO₂ and melting slag yields the production of homogeneous Na-A zeolite. The optimal reactant composition in molar ratio of Na₂O:Al₂O₃:SiO₂ was 1.3∼l.4 : 0.8∼0.9 : 2 and mixing ratio of solution and slag was 1/7∼10 (g/cc). Synthesized Na-A zeolite has cubic form uniformly and its size ranges about 1 ㎛. Ca/sup 2+/ ion exchange capacity of the Na-A was about 180∼210 meq/100g, corresponding approximately 80% to the commercial detergent builder.

• Korean Chemical Engineering Research
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• v.48 no.5
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• pp.583-588
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• 2010

Esterification of free fatty acid with methanol to biodiesel was investigated in a batch reactor using various solid acid catalysts, such as polymer cation-exchanged resins with sulfuric acid functional group(Amberlyst-15, Dowex 50Wx8), acidic ionic liquids (ILs)-modified silica gels respectively with $-SO_3H$ and $-SO_2Cl$ functional group ($SiO_2-[ASBI][HSO_4]$, $SiO_2-[ASCBI][HSO_4]$) and grafted silica gels respectively with $-SO_3H$ and $-SO_2Cl$ functional group ($SiO_2-R-SO_3H$, $SiO_2-R-SO_2Cl$). The effects of reaction time, temperature, reactant concentration(molar ratio of methanol to oleic acid), and catalyst amount were studied. Allylimidazolium-based ILs on modified silica gels were superior to other tested solid acid catalysts. Especially, the performance of $SiO_2-[ASBI][HSO_4]$ (immobilized by grafting of 3-allyl-1-(4-sulfobutyl)imidazolium hydrogen sulfate on silica gel) was better than that of a widely known Amberlyst-15 catalyst at the same reaction conditions. A high conversion yield of 96% was achieved in the esterification reaction of the simulated cooking oil at 353 K for 2 h. The high catalytic activity of $SiO_2-[ASBI][HSO_4]$ was attributed to the presence of strong Brønsted acid sites from the immobilized functional groups. The catalyst was recovered and the biodiesel product was separated by simple processes such as decantation and filtration.