• 제목/요약/키워드: $H^{+}$ pump

검색결과 776건 처리시간 0.027초

TFT-LCD 생산공정을 위한 실리콘 펌프 및 제어시스템에 관한 연구 (Study on the Silicon Pump and Control System for TFT-LCD Manufacturing Process)

  • 박형근
    • 한국산학기술학회논문지
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    • 제13권8호
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    • pp.3618-3622
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    • 2012
  • 본 연구에서는 LCD 생산라인에서 장기적으로 정체상태에 있는 모듈의 수율을 높이고, 현재 TFT-LCD 생산공정에 필수적인 고압의 실리콘주입 장비 및 정밀 제어시스템을 개발하였다. 본 개발을 통하여 향후 본격생산을 준비중인 차세대 디스플레이 생산라인뿐만 아니라 중국으로 이전중인 LCD 생산 설비의 라인 환경에서 장비의 효율을 최대한 발휘함으로써 신규 투자비용을 최소화하고 최대의 효과를 창출할 수 있도록 세부 동작 시퀀스를 제어하기 위한 H/W와 S/W 시스템을 생산라인에 실장하였다. 또한, Fast-evacuating을 위한 Vacuum pump 구조를 제안하고 Pump control 회로 설계 및 실험을 통해 제품화하였다.

Commissioning result of the KSTAR in-vessel cryo-pump

  • Chang, Y.B.;Lee, H.J.;Park, Y.M.;Lee, Y.J.;Kwag, S.W.;Song, N.H.;Park, D.S.;Joo, J.J.;Moon, K.M.;Kim, N.W.;Yang, H.L.;Oh, Y.K.
    • 한국초전도ㆍ저온공학회논문지
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    • 제15권4호
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    • pp.53-58
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    • 2013
  • KSTAR in-vessel cryo-pump has been installed in the vacuum vessel top and bottom side with up-down symmetry for the better plasma density control in the D-shape H-mode. The cryogenic helium lines of the in-vessel cryo-pump are located at the vertical positions from the vacuum vessel torus center 2,000 mm. The inductive electrical potential has been optimized to reduce risk of electrical breakdown during plasma disruption. In-vessel cryo-pump consists of three parts of coaxial circular shape components; cryo-panel, thermal shield and particle shield. The cryo-panel is cooled down to below 4.5 K. The cryo-panel and thermal shields were made by Inconel 625 tube for higher mechanical strength. The thermal shields and their cooling tubes were annealed in air environment to improve the thermal radiation emissivity on the surface. Surface of cryo-panel was electro-polished to minimize the thermal radiation heat load. The in-vessel cryo-pump was pre-assembled on a test bed in 180 degree segment base. The leak test was carried out after the thermal shock between room temperature to $LN_2$ one before installing them into vacuum vessel. Two segments were welded together in the vacuum vessel and final leak test was performed after the thermal shock. Commissioning of the in-vessel cryo-pump was carried out using a temporary liquid helium supply system.

공기열원 및 수열원을 이용한 열펌프 시스템의 성능특성에 관한 연구 (A study on the comparison of the performance of a heat pump system with air and water heat sources)

  • 고원빈;박윤철
    • Journal of Advanced Marine Engineering and Technology
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    • 제40권7호
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    • pp.563-568
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    • 2016
  • 본 연구는 연료전지 자동차용 공기조화기의 난방성능평가를 위하여 기존의 전반적인 히트펌프 시스템 중 공기열원 히트펌프 시스템의 증발기를 판형열교환기로 교체하여 시스템에 흐르는 냉매와 연료전지 스택 폐열을 직접 열교환이 가능한 수열원 이용이 가능한 난방시스템의 성능실험을 수행하였다. 실험결과에서 압축기의 회전수가 높을수록 소비동력이 증가하였다. 공기열원 이용방식의 경우 압축기 회전수가 1,200rpm이고 EEV개도가 25%인 경우 $COP_h$가 2.03으로 가장 높게 나타났고, 같은 압축기의 회전수에서 수열원 시스템은 EEV개도가 75% 및 스택 폐열의 온도가 $50^{\circ}C$인 경우 $COP_h$가 9.42로 가장 높게 나타났다.

2단 응축 히트펌프 온수시스템의 사이클 해석 및 성능분석 (Performance of Heat Pump Water Heater with Dual Condenser)

  • 유영선;김영중;강금춘;백이;윤진하;강연구;이형모
    • Journal of Biosystems Engineering
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    • 제31권5호
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    • pp.423-429
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    • 2006
  • The heat pump water heater developed in this research consisted of one evaporator, one compressor, 1st condenser, 2nd condenser, one expansion valve, one water tank, one recirculation circuit and etc. The performance of heat pump water heater was tested and analyzed. The quantities of output water changed linearly from 2380 to $660{\ell}/h$, and the output water temperature changed curvedly from 29.9 to $44.5^{\circ}C$ when the opening rate of recirculation valve changed from 0 to 100%. The COP of heat pump water heater increased from 3.0 to 3.8 when the quantities of output water changed from 660 to $2380{\ell}/h$. When the temperature distributions of water tank were measured during 50 minutes after turning on the heat pump, the temperature stratification by the level appeared apparently. When the inlet water temperature changed from 30 to$50^{\circ}C$, the output energy of heat pump hardly changed. The surface area of double pipe heat exchanger changed from 0.429 to $6.254m^2$ when the compressor capacity increased from 1.0 to 50.0 PS.

3실 열펌프의 운전조합에 대한 난방성능 실험연구 (Experimental Study on Heating Performance by Operation Combination of Heat Pump with 3 Indoor-Units)

  • 김주형;김기영;권영철;박승철
    • 한국산학기술학회논문지
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    • 제14권9호
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    • pp.4197-4203
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    • 2013
  • 본 실험연구는 인버터 압축기를 적용한 실내기 3실을 가진 멀티형 열펌프 시스템의 난방운전 시 열펌프의 난방성능을 연구하였다. 멀티형 열펌프의 운전특성은 항온항습 기능을 가진 공기엔탈피방식의 멀티형 칼로리미터를 이용하여 측정되었다. 난방표준 및 난방저온 온도조건에서 실내기 운전조합에 따른 실험을 수행하여 난방성능 변화를 관찰하였다. 실내기 3실을 가진 열펌프의 실내기 운전조합에 따른 난방표준 및 난방저온 운전에서 난방능력, 난방 COP, P-h선도로부터, 3실을 가진 열펌프의 운전특성과 냉매 사이클의 거동을 조사하였다. 열펌프의 운전부하와 성능은 실내기 조합에 의한 부분부하에 의존하므로 열펌프의 난방능력과 사이클의 거동은 다르게 관찰되었다. 표준온도 시험조건 대비 저온 시험조건의 난방능력과 난방 COP는 감소하였다. 또한 실내기 조합에 대한 냉매사이클은 P-h 선도를 사용하여 분석되었다.

사류펌프 내 삼차원 유동의 수치해석 (NUMERICAL ANALYSIS OF THREE-DIMENSIONAL FLOW IN A MIXED-FLOW PUMP)

  • 안형진;김진혁;김광용
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2009년 춘계학술대회논문집
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    • pp.223-226
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    • 2009
  • This paper presents three-dimensional flow analysis for a mixed-flow pump which consists of a rotor and a stator. Reynolds-averaged Navier-Stokes equations with shear stress transport turbulence model are discretized by finite volume approximations and solved by the commercial CFD code CFX 11.0. Structured grid system is constructed in the computational domain, which has O-type grids near the blade surfaces and H-type grids in other regions. Validation of the numerical results was performed with experimental data for head coefficients and hydraulic efficiencies at different flow coefficients. This paper shows that the pump characteristics can be predicted effectively by numerical analysis.

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2종 LiBr - H2O 흡수식 열펌프의 시뮬레이션 (Simulation of the Second Kind LiBr - H2O Absorption Heat Pump)

  • 허준영;최영돈
    • 설비공학논문집
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    • 제1권2호
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    • pp.146-161
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    • 1989
  • The second kind LiBr-$H_2O$ absorption heat pump system was simulated and the performances of it were predicted. The elements of heat pump system, evaporator, absorber and generator were analysed by solving the energy balance equations and concentration equations which describe the reactions between working fluids. The results show that the temperature gain of absorber is affected considerably by the operating conditions of heat pump system, on the other hand, COP is little affected by them.

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PIV에 의한 가정용 온수펌프의 유동장 계측 (Measurement of Flow Field in a Domestic Hot-Water Pump by PIV)

  • 이현;임유청;김재현;이영호
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 1999년도 유체기계 연구개발 발표회 논문집
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    • pp.264-271
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    • 1999
  • The present experimental study is aimed to investigate the flow characteristics of the high-speed flow field within hot-water pump by PIV(Particle Image Velocimetry). As multi-point simultaneous velocity acquisition, 2-D PIV system based upon the two-frame gray-level cross correlation method is adopted using PC frame-grabber and simple video system. Gated image intensifier CCD Camera to cope with illumination problem is arranged for accurate PIV measurement of high-speed complex flow. The velocity vector distribution, velocity profile, and kinetic energy are represented quantitatively at the full-scale region for the deeper understanding of the unsteady flow characteristics in a pump.

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전자빔 가공시스템용 진공환경의 성능평가 (Characteristic Evaluation of Vacuum Chamber for EBM System)

  • 강재훈;이찬홍;최종호;임윤빈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.934-937
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    • 2005
  • It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, proper chamber with high vacuum condition is necessarily required more than anything else to modify scanning electron microscope. In this study, special chamber unit using rotary pump and diffusion pump to obtain high vacuum degree was designed and manufactured and various evaluation tests fur recognize the vacuum characteristic were accomplished.

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온수 보일러용 열구동 펌프에 관한 연구 (A Study on the Thermal Pump of the Hot Water Boiler)

  • 염한길;김욱중;김창주
    • 연구논문집
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    • 통권30호
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    • pp.15-23
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    • 2000
  • In this study, develop the thermal pump using water evaporation and condensation. Vapor from heating room moves up to pumping room and press the water of pumping room. Consequently water is pumped out to water tank. Then hot vapor direct contact with cold water in condensing room after pumping process. At this time, pressure of condensing room is down to-5kPa and suck in water of tank. This pump executes self ping and good durability because of no mechanical moving parts. Thermal pump is pumped cyclic so that, this pump is not used single. Therefore thermal pump of hot water boiler used to multi-stage for stable pumping rate. As the result of performance test, the developed thermal pump proves pumping action of water evaporation/condensation. And total volume flow rate is 500liter during one hour. If three thermal pump is installed parallel, this pump can use to the hot water boiler in the 300,000kcal/h class.

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