• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.61.2-61.2
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• 2011

넓은 밴드갭을 가지고 있어 가시광에서 투명하며 높은 이동도를 가진 산화물 반도체는 기존의 Si 기반 TFT 소자를 대체할 차세대 디스플레이의 핵심 소재기술로 관심이 높아지고 있다. 그러나 대표적인 산화물 반도체인 In-Ga-Zn-O (IGZO)에 포함된 인듐의 수요 증가에 따른 가격 급등 문제로 이를 대체할 수 있는 새로운 산화물 반도체 재료에 대한 연구의 필요성이 대두되고 있다. 이에 비교적 저가의 물질로 구성된 Zn-Sn-O계 산화물 소재에 대한 연구가 진행된 바 있으나, 높은 수준의 캐리어 농도를 가지고 있어 TFT 채널용 반도체소재로 적용되기 위해서는 이를 $10^{17}\;cm^{-3}$ 이하로 조절할 수 있는 기술개발이 요구된다. 본 연구는 마그네트론 스퍼터링법을 이용하여 증착된 Ga-Zn-Sn-O (GZTO) 박막의 갈륨 첨가에 따른 특성변화를 조사하였다. GZO ($Ga_2O_3$ 5wt%)와 $SnO_2$ 타켓의 인가 파워를 고정한 상태에서 $Ga_2O_3$ 타켓의 인가 파워를 0~100W로 조절하여 박막 내 Ga 함량을 증가시켰다. 제조된 모든 GZTO 박막은 Ga함량에 관계없이 비정질 구조를 가지며 가시광 영역에서 약 78%의 우수한 투과율을 나타낸다. Ga 함량에 따라 박막의 구조적, 광학적 특성은 크게 변하지 않지만 전기적 특성은 뚜렷한 변화를 나타냈다. $Ga_2O_3$ 파워가 증가할수록 박막 내 캐리어 농도와 이동도의 감소로 비저항이 크게 증가하는데 특히 캐리어 농도는 $Ga_2O_3$ 파워가 0에서 100W로 증가할 때 $2{\times}10^{18}$에서 $8{\times}10^{14}\;cm^{-3}$으로 감소하였다. 이는 Ga-O의 화학적 결합 에너지가 다른 원소들(Zn 또는 In)에 비해 커서 박막 내 산소공공의 감소가 야기되었기 때문이다. 이러한 전기물성의 변화를 이해하기 위해 XPS 분석을 수행하였다. 제조된 GZTO 박막은 $Ga_2O_3$ 파워가 증가함에 따라 O 1s peak에서 산소공공과 관련된 530.8 eV peak의 intensity가 감소한다. 따라서 Ga을 첨가에 따른 캐리어 농도의 감소는 산소공공의 발생억제로 기인한 것으로 판단되며, 본 연구결과는 ZTO계 비정질 산화물 반도체의 활용가능성을 제시하였다.

• 한국전기화학회:학술대회논문집
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• 2002.07a
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• pp.271-276
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• 2002

고체산화물 연료전지의 구성요소인 전해질의 $(La_{1-x}Sr_x)(Ga_{1-y}Mg_y)O_{3-\delta}$계의 결정상 및 미세구조특성을 연구하였다. Mg의 첨가량이 증가할수록 Sr의 고용량도 증가하였으며 Sr의 함량이 많으면 2차상인 $LaSrGa_3O_7$상이 생성되었으며 Mg의 첨가량이 증가함에 따라서는 $LaSrGaO_4$상이 생성되었다. $LaSrGaO_4$상이 생성된 경우에는 낮은 전도도를 나타내었으며 $LaSrGa_3O_7$상의 경우에는 전기전도도에 큰 영향을 미치지 않았다. 또한 Sr과 Mg 첨가량의 증가는 grain 성장을 억제하였으며 $(La_{0.8}Sr_{0.2})(Ga_{0.8}Mg_{0.2})O_{3-\delta}$는 $1000^{\circ}C$에서 0.1S/cm 정도의 전기전도도를 나타내었다.

• Journal of the Korean Electrochemical Society
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• v.12 no.2
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• pp.189-195
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• 2009

$\beta-Ga_{2}O_{3}$ nanorods were synthesized by chemical vapor deposition method using nickel-oxide nanoparticle as a catalyst and gallium metal powder as a source material. The average diameter of nanorods was around 160 nm and the average length was $4{\mu}m$. Also, we confirmed that the synthesis of nanorods follows the vapor-solid growth mechanism. From the results of X-ray diffraction and HR-TEM observation, it can be found that the synthesized nanorods consisted of a typical core-shell structure with single-crystalline $\beta-Ga_{2}O_{3}$ core with a monoclinic crystal structure and an outer amorphous gallium oxide layer. Li/$\beta-Ga_{2}O_{3}$ nanorods cell delivered capacity of 867 mAh/g-$\beta-Ga_{2}O_{3}$ at first discharge. Although the Li/$\beta-Ga_{2}O_{3}$ nanorods cell showed low coulombic efficiency at first cycle, the cell exhibited stable cycle life property after fifth cycle.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.848-850
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• 2001

In this work, we investigated on the white-colored ribbon fiber synthesized from GaN powder. We convinced the formation of monoclinic phase $\beta$-Ga$_2$O$_3$from the X-ray diffraction pattern on ribbon fiber. The 10 K PL spectrum consisted with the strong emission band caused by self-activated optical center at 3.464 eV with the full-width at half maximum of 48 meV and the impurity related emission bands. Through this work, the optical properties and the electrical conductivity of $\beta$-Ga$_2$O$_3$, it will be useful for the fabrication of optoelctronic devices operating in visible spectrum region.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.242-247
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• 1998

In this study, we have synthesized $ZnGa_2O_4$:Mn,X powder doped with Mn, MnO, $MnF_2$ and $MnCl_2$, low voltage green emitting phosphor, in vacuum atmosphere. From PL spectra, the intensity of the emission peak, the brightness with coactivator show that $ZnGa_2O_4$:Mn,Cl > $ZnGa_2O_4$:Mn,F > $ZnGa_2O_4$:Mn,O > $ZnGa_2O_4$:Mn. These improvement of the brightness are caused by the increase of the concentration of $Mn^{2+}$ ion. In case of $ZnGa_2O_4$:Mn,Cl and ZnGa$_2$O$_4$:Mn,F, the brightness is enhanced much more, which is owed to the decrease of defect of host material. For $ZnGa_2O_4$:Mn,Cl phosphor fabricated with optimized condition, the decay time becomes short from 30 ms of the $ZnGa_2O_4$:Mn and $ZnGa_2O_4$:Mn,O to 6 ms and the brightness of CL at 1 kV, 1 mA is 60 cd/$m^2$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.29 no.4
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• pp.179-186
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• 2019

In this study, we investigated the structural properties of $Ga_2O_3$ thin films and the photo-electrical properties of metal-semiconductor-metal (MSM) photodetectors deposited by Ti/Au electrodes. $Ga_2O_3$ thin films were grown at different temperatures using metal organic chemical vapor deposition (MOCVD). The crystal phase of $Ga_2O_3$ changed from ${\varepsilon}$-phase to ${\beta}$-phase depending on the growth temperature. The crystal structure of ${\varepsilon}-Ga_2O_3$ was confirmed by X-ray diffraction (XRD) analysis and the formation mechanism of crystal structure was discussed by scanning electron microscopy (SEM) images. From the results of current-voltage (I-V) and time-dependent photoresponse characteristics under the illumination of external lights, we confirmed that the MSM photodetector fabricated by ${\varepsilon}-Ga_2O_3$ showed much better photocurrent characteristics in the 266 nm UV range than in the visible range.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.98-102
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• 2021

GaOOH is obtained via hydrothermal synthesis procedure. The formed GaOOH is turned into α-Ga₂O₃ at 500℃ annealing. As the annealing temperatures increase the α-Ga₂O₃ is in part turned into β-Ga₂O₃ and fully turned into β-Ga₂O₃ after 1100℃. XPS and PL results reveal that heterojunction interface between α-Ga₂O₃ and β-Ga₂O₃ become maxim at 500℃ annealing condition, which result in the highest photocatalytic activity. The presence of heterojunction interface slows down the recombination process by separating photogenerated electron-hole pairs and thereby enhance the overall photocatalytic activity.

• Journal of the Korean Ceramic Society
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• v.39 no.4
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• pp.352-358
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• 2002

The variations of the properties of Sr and Mg added $LaGaO_3$ system electrolyte with the amount of the additive and the sintering condition were studied. Main phase was (La$_{1-x}Sr_x)(Ga_{1-y}Mg_y)O_{3-\delta}$ phase for each compositions and the single phases $(La_{0.85}Sr_{0.15})(Ga_{0.85}Mg_{0.15})O_{3-\delta},(La_{0.85}Sr_{0.15})(Ga_{0.8}Mg_{0.2})O_{3-\delta}$ and $(La_{0.8}Sr_{0.2})(Ga_{0.8}Mg_{0.2})O{3-\delta}$ were obtained with the decrease in the sintering temperature and Mg addition. Thermal expansion coefficient of the $(La_{0.8}Sr_{0.2})(Ga_{0.8}Mg_{0.2})O_{3-\delta}$ decreased with the increase in the sintering temperature. Electric conductivity of electrolyte sintered at $1500^{circ}C$ for 1h was 0.14 S/cm at $800^{circ}C$ with 1 mA.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.2
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• pp.83-90
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• 2023

The β-Ga₂O₃ has the most thermodynamically stable phase, a wide band gap of 4.8~4.9 eV and a high dielectric breakdown voltage of 8MV/cm. Due to such excellent electrical characteristics, this material as a power device material has been attracted much attention. Furthermore, the β-Ga₂O₃ has easy liquid phase growth method unlike materials such as SiC and GaN. However, since the grown pure β-Ga₂O₃ single crystal requires the intentionally controlled doping due to a low conductivity to be applied to a power device, the research on doping in β-Ga₂O₃ single crystal is definitely important. In this study, various source powders of un-doped, Sn 0.05 mol%, Sn 0.1 mol%, Sn 1.5 mol%, Sn 2 mol%, Sn 3 mol%-doped Ga₂O₃ were prepared by adding different mole ratios of SnO₂ powder to Ga₂O₃ powder, and β-Ga₂O₃ single crystals were grown by using an edge-defined Film-fed Growth (EFG) method. The crystal direction, crystal quality, optical, and electrical properties of the grown β-Ga₂O₃ single crystal were analyzed according to the Sn dopant content, and the property variation of β-Ga₂O₃ single crystal according to the Sn doping were extensively investigated.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.25-29
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• 2021

This paper demonstrates the utility of the Ni-Pd and carbon-nanotube (Ni-Pd-CNT)-based nanoalloy to improve the α-Ga₂O₃ crystal quality using the halide-vapor-phase epitaxy (HVPE) method. As result, the overall thickness of the α-Ga₂O₃ epitaxial layer increased from a Ni electroless plating time of 40 s to 11 ㎛ after growth. In addition, the surface morphologies of the α-Ga₂O₃ epilayers remained flat and crack-free. The full-width half-maximum results of the X-ray diffraction analysis revealed that the ($10{\bar{1}}4$) diffraction patterns decreased with increasing nominal thickness.