Thermal stability and microstructure of CrZr-Al-N films synthesized by unbalanced magnetron sputtering with Cr-Zr-Al segment target (Cr-Zr-Al segment 타겟을 장착한 Unbalanced magnetron sputtering 활용하여 증착한 CrZr-Al-N 박막의 thermal stability와 microstructure에 관한 연구)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2012.05a
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- pp.173-173
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- 2012