• 제목/요약/키워드: $C_2S/C_3S$ layer

검색결과 1,017건 처리시간 0.031초

${NH}_{3}$ 분위기에서 급속열처리에 의한 TiN/${TiSi}_{2}$ 이중구조막의 특성에 대한 고찰 (A Study on the Properties of TiN/${TiSi}_{2}$ Bilayer by a Rapid Thermal Anneal in ${NH}_{3}$ Ambient)

  • 이철진;성영권
    • 대한전기학회논문지
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    • 제41권8호
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    • pp.869-874
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    • 1992
  • The physical and electrical properties of TiN/TiSiS12T bilayer were studied. The TiN/TiSiS12T bilayer was formed by rapid thermal anneal in NHS13T ambient after the Ti film was deposited on silicon substrate. The Ti film reacts with NHS13T gas to make a TiN layer at the surface and reacts with silicon to make a TiSiS12T layer at the interface respectively. It was found that the formation of TiN/TiSiS12T bilayer depends on RTA temperature. In this experiment, competitive reaction for TiN/TiSiS12T bilayer occured above $600^{\circ}C$. Ti-rich TiNS1xT layer and Ti-rich TiSiS1xT layer and Ti-rich TiSiS1xT layer were formed at $600^{\circ}C$. stable structure TiN layer TiSiS12T layer which has CS149T phase and CS154T phase were formed at $700^{\circ}C$. Both stable TiN layer and CS154T phase TiSiS12T layer were formed at 80$0^{\circ}C$. The thickness of TiN/TiSiS12T bilayer was increased as the thickness of deposited Ti film increased.

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3GPP2 C.S0024-A v.2.0 표준을 적용한 CDMA2000 1x EV-DO 보안 계층 설계 및 구현 (Design and Implementation of the CDMA2000 1x EV-DO Security Layer to which applies 3GPP2 C.S0024-A v.2.0 Standard)

  • 양종원;조진만;이태훈;서창호
    • 정보보호학회논문지
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    • 제18권1호
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    • pp.59-65
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    • 2008
  • CDMA2000 1x EV-DO 에서의 보안 계층은 현재 3GPP2를 통해 표준화 규격(C.S0024-A v2.0)을 완성해 나가고 있는 중이다. 이에 따라 CDMA2000 1x EV-DO 환경의 AT(Access Terminal)와 AN(Access Network) 간 전송되는 데이터에 대한 보안 기능을 적용하기 위하여 표준 문서에 명시된 보안 계층 구현에 필요한 보안 장치가 요구되고 있다. 본 논문은 3GPP2의 C.S0024-A v2.0 표준을 준용한 CDMA2000 1x EV-DO 보안계층 설계 및 구현을 통해 AT와 AN간의 안전하고 빠른 데이터 전송 및 다양한 플랫폼 환경에 적용 가능한 보안계층 시스템을 실제 적용했다.

AlN 완충층을 이용한 다결정 3C-SiC 박막의 결정성장 (Crystal growth of polyctystalline 3C-SiC thin films on AlN buffer layer)

  • 김강산;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.333-334
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    • 2007
  • This paper describes the characteristics of poly (polycrystalline) 3C-SiC grown on SiOz and AlN substrates, respectively. The crystalline quality of poly 3C-SiC was improved from resulting in decrease of FWHM (full width half maximum) of XRD by increasing the growth temperature. The minimum growth temperature of poly 3C-SiC was $1100^{\circ}C$. The surface chemical composition and the electron mobility of poly 3C-SiC grown on each substrate were investigated by XPS and Hall Effect, respectively. The chemical compositions of surface of poly 3C-SiC films grown on $SiO_2$ and AlN were not different. However, their electron mobilities were $7.65\;cm^2/V.s$ and $14.8\;cm^2/V.s$, respectively. Therefore, since the electron mobility of poly 3C-SiC films grown on AlN buffer layer was two times higher than that of 3C-SiC/$SiO_2$, a AlN film is a suitable material, as buffer layer, for the growth of poly 3C-SiC thin films with excellent properties for M/NEMS applications.

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SiC의 산화반응 기구 (Oxidation Mechanism of SiC)

  • 최태운;이홍림
    • 한국세라믹학회지
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    • 제18권2호
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    • pp.79-82
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    • 1981
  • SiC powder was heated in air over the temperature range of 1100-135$0^{\circ}C$. $\beta$-cristobalite was formed to cover the surfaces of SiC particles by the reaction: $SiC(s)+20_2(g)=SiO_2(s)+CO_2(g)$. It is assumed that the diffusion of oxygen ion through the formed surface layer of $\beta$-cristobalite controls the oxidation of the SiC particles. The diffusion coefficient of oxygen ion through the $\beta$-cristobalite layer was obtained as the following equation: $D=3.84{\times}10^{-17}$exp(-14.7/RT)

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Fe-Scale과의 반응에 의한 $Cr_3C_2$계 복합체의 산화손상 (Oxidation of $Cr_3C_2$ Composites with Fe-Scale)

  • 한동빈;홍기곤;박병학
    • 한국세라믹학회지
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    • 제31권7호
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    • pp.767-771
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    • 1994
  • In a salb-preheating furnace of steel-making industry, the oxidation/degradation behavior of Cr3C2 ceramic composited dkid button reaction with scale in Fe-oxide system occurs and was thermodynamically examined. The reaction of scale with Cr3C2 skid button produces Cr3C2(s) and C(s), and Co gas is then evolved from the reaction of C(s) with Fe-scale. Cr3C2(s) from oxidation of Cr3C2(s) reacted with Fe-oxide(s) becomes high-melting chromite. The chromite acts as protection layer against further oxidation and improves resistance of the reaction of Cr3C2 skid button with Fe-scale.

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SM45C 탄소강의 플라즈마 침류질화 처리 시 $H_2S$, $C_3H_8$ 가스 첨가에 따른 미세조직 및 마찰계수의 변화 (Micro Structure and the Coefficient of Friction with $H_2S$ and $C_3H_8$ Gas Addition During Plasma Sulf-nitriding of SM45C Carbon Steel)

  • 고영기;문경일;이원범;김성완;유용주
    • 열처리공학회지
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    • 제20권5호
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    • pp.237-242
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    • 2007
  • Friction coefficient of SM45C steel was surprisingly reduced with $H_2S$ and $C_3H_8$ gas during plasma sulf-nitriding. During the plasma sulf-nitriding, 100-700 sccm of $H_2S$ gas and 100 sccm of $C_3H_8$ gas were added and working pressure and temperature were 2 torr, $500-550^{\circ}C$, respectively. As $H_2S$ gas amount increased over 500 sccm, flake-like structures were developed on top of the nitriding layer and grain size of the nitriding layer were about 100 nm. The friction coefficient for the sample treated plasma sulf-nitriding under $N_2-H_2S$ gas was 0.4 - 0.5. The structure became more finer and amorphous-like along with $N_2-H_2S-C_3H_8$ gas and the nano-sized surface microstructures resulted in high hardness and significantly low friction coefficient of 0.2.

Excellent Crystallinity of Ba Ferrite Layers Deposited on Pt(111) Underlayers

  • Matsushita, Nobuhiro;Feng, Jie;Watanabe, Koh;Ichinose, Makoto;Nakagawa, Shigeki;Naoe, Masahiko
    • The Korean Journal of Ceramics
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    • 제6권3호
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    • pp.315-317
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    • 2000
  • A magnetoplumbite type of Ba ferrite(BaM) layers were deposited on Pt(111) and Pt(200) layers, and their c-axis orientation and magnetic characteristics were compared each other. The as-deposited BaM layer on Pt(111) one at the substrate temperature $T_s$ above $500^{\circ}C$ revealed remarkable c-axis orientation. The saturation magnetization 4$\piM_s$ and the perpendicular coercivity $H_{c⊥}$ of the films as-deposited at $T_s$ of $600^{\circ}C$ were 4.0kG and 2.5kOe, respectively. On the other hand, BaM ferrite layer deposited on Pt(200) layer at $T_s$ as relatively low as $500^{\circ}C$ also revealed weak c-axis orientation as well as (107) one and the films as-deposited at $T_s$ of $600^{\circ}C$ exhibited 4$\piMs_{and}$ $H_{c⊥}$ of 2.8kG and 2.5kOe, respectively. It was suggested that although chemical activity of Pt surface was effective for the formation of BaM crystallites, the lattice matching was also important for obtaining BaM layer with good c-axis orientation and large perpendicular anisotropy.sotropy.

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$BaHfO_3$ 완충층을 사용한 IBAD MgO 기판 위에 제조된 고임계전류밀도의 $GdBa_2Cu_3O_y$ 박막 (High-$J_c$ $GdBa_2Cu_3O_y$ films on $BaHfO_3$ buffered IBAD MgO template)

  • 고경필;이정우;고락길;문승현;오상수;유상임
    • 한국초전도ㆍ저온공학회논문지
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    • 제13권1호
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    • pp.6-11
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    • 2011
  • The $BaHfO_3$ (BHO) buffer layer on the IBAD MgO template was turned to be effective for a successful fabrication of $GdBa_2Cu_3O_{7-{\delta}}$ (GdBCO) films with high critical current density ($J_c$). Both the BHO buffer layers and GdBCO films were prepared by pulsed laser deposition (PLD). The effects of the PLD conditions, including substrate temperature ($T_s$), oxygen partial pressure ($PO_2$), and deposition time on the in-plane texture, surface roughness, and microstructures of the BHO buffer layers on the IBAD MgO template were systematically studied for processing optimization. The c-axis oriented growth of BHO layers was insensitive to the deposition temperature and the film thickness, while the in-plane texture and surface roughness of those were improved with increasing $T_s$ from 700 to $800^{\circ}C$. On the optimally processed BHO buffer layer, the highest $J_c$ value (77 K, self-field) of 3.68 $MA/cm^2$ could be obtained from GdBCO film deposited at $780^{\circ}C$, representing that BHO is a strong candidate for the buffer layer on the IBAD MgO template.

50% NH3-Air-N2가스분위기에서 Oxynitriding시 Compound Layer의 성장 특성에 미치는 공기첨가효과 (Effect of Air Additions on the Growth Characteristics of the Compound Layer during Oxynitriding in50%NH3+Air+N2 Atmosphere)

  • 김영희;이영숙
    • 열처리공학회지
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    • 제7권3호
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    • pp.206-218
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    • 1994
  • In 50%$NH_3+Air+N_2$ atmospheres, the effect of air additions on the growth characteristics of the compound layer during oxynitriding at $570^{\circ}C$ for 2hr in carbon and alloy steels has been investigated. The ammount of apparent residual ammonia during oxynitriding has shown to be increased with air additions(9~36 Vol. %) and X-ray diffraction analysis of case oxynitreded has shown that the compound layer consist of ${\varepsilon}-Fe_{2-3}$(N, C) phase and ${\gamma}^{\prime}-Fe_4$(N,C) phase. In the case of carbon steels, the thickness of oxide layer, compound layer and porous layer and the amount of ${\varepsilon}-Fe_{2-3}$(N,C) phase in the compound layer were increased with additions of air in 50%$NH_3+N_2$ atmospheres. At the same gas composition, the thickenss of oxide layer, compound layer and porous layer in alloy steels showed slightly thin layer thickness compared to those of carbon steels and the ${\gamma}^{\prime}-Fe_4$(N,C) phase in the compound layer of alloy steels was found barely. Therefore, the most obvious effect of air addition in the gas nitriding atmosphere has been found to in crease further kinetics of nitriding reaction.

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High Temperature Corrosion of Cr(III) Coatings in N2/0.1%H2S Gas

  • Lee, Dong Bok;Yuke, Shi
    • 한국표면공학회지
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    • 제52권3호
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    • pp.111-116
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    • 2019
  • Chromium was coated on a steel substrate by the Cr(III) electroplating method, and corroded at $500-900^{\circ}C$ for 5 h in $N_2/0.1%H_2S-mixed$ gas to study the high-temperature corrosion behavior of the Cr(III) coating in the highly corrosive $H_2S-environment$. The coating consisted of (C, O)-supersaturated, nodular chromium grains with microcracks. Corrosion was dominated by oxidation owing to thermodynamic stability of oxides compared to sulfides and nitrides. Corrosion initially led to formation of the thin $Cr_2O_3$ layer, below which (S, O)-dissolved, thin, porous region developed. As corrosion progressed, a $Fe_2Cr_2O_4$ layer formed below the $Cr_2O_3$ layer. The coating displayed relatively good corrosion resistance due to formation of the $Cr_2O_3$ scale and progressive sealing of microcracks.