• The Transactions of the Korean Institute of Electrical Engineers P
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• v.55 no.1
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• pp.26-30
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• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• Fire Science and Engineering
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• v.15 no.3
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• pp.44-48
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• 2001

In this study, we analyzed the $CH_4$and $C_4$$H_{10}$ sensitivity measurement and voltage variation using catalytic type gas sensor characteristics in catalytic combustion type gas detecter sensors. Gas detector shall operate as intended when exposed for 24 hours to air having a relative humidity of 65 percent at a temperature of $20^{\circ}c$ and humidity of 85 percent at a temperature of $40^{\circ}c$. The gas detecter sensors are to be subjected to operation for 210 days in an area that has been determined to be equivalent to a typical residential atmosphere with an air velocity of 50 cm/sec. The source of energy for a gas detector sensors employing a supplementary basic circuit is energized from a seperate source of supply direct applied voltage 2.1V, 2.2V, 2.3V. As a result, it was confirmed that the relative humidity and temperature by regression each analysis, compared to the isobutane characteristic graph and methane characteristic graph by a relative humidity of 65% and 85% at a temperature($20^{\circ}c$, $40^{\circ}c$) show a similar linear pattern on the whore.

• Journal of Sensor Science and Technology
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• v.29 no.6
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• pp.407-411
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• 2020

In this study, we propose an array-type gas sensor with high selectivity and response using multiple oxide semiconductors. The sensor array was composed of SnO₂ and In₂O₃, and the detection characteristics were improved by using Pt, Au, and Pd catalysts. All samples were deposited directly on the Pt interdigitated electrode (IDE) through the e-beam evaporator glancing angle deposition (GAD) method. They grew in the form of well-aligned nanorods at off-axis angles. The prepared SnO₂ and In₂O₃ nanorod samples were exposed to CH₃COCH₃, C₇H₈, and NO₂ gases in a 300℃ dry condition. Au-decorated SnO₂, Au-decorated In₂O₃, and Pd-decorated In₂O₃ exhibited high selectivity for CH₃COCH₃, C₇H₈, and NO₂, respectively. They demonstrated a high detection limit of the sub ppb level computationally. In addition, measurements from each sensor were executed in the 40% relative humidity condition. Although there was a slight reduction in detection response, high selectivity and distinguishable detection characteristics were confirmed.

• Journal of the Korean Ceramic Society
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• v.53 no.2
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• pp.134-138
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• 2016

Porous $Co_3O_4$ spheres with bimodal pore distribution (size: 2-3 nm and ~ 30 nm) were prepared by ultrasonic spray pyrolysis of aqueous droplets containing Co-acetate and polyethylene glycol (PEG), while dense $Co_3O_4$ secondary particles with monomodal pore distribution (size: 2-3 nm) were prepared from the spray solution without PEG. The formation of mesopores (~ 30 nm) was attributed to the decomposition of PEG. The responses of a porous $Co_3O_4$ sensor to various indoor air pollutants such as 5 ppm $C_2H_5OH$, xylene, toluene, benzene, and HCHO at $200^{\circ}C$ were found to be significantly higher than those of a commercial sensor using $Co_3O_4$ and dense $Co_3O_4$ secondary particles. Enhanced gas response of porous $Co_3O_4$ sensor was attributed to high surface area and the effective diffusion of analyte gas through mesopores (~ 30 nm). Highly sensitive porous $Co_3O_4$ sensor can be used to monitor various indoor air pollutants.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.303-307
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• 2008

$NiO,\;Cu_2O,\;Mn_2O_3$ and $Cr_2O_3$ as p-type semiconductors were added in CoO with 15 wt.% ethylene glycol binder and measured the butane gas sensing characteristics. The highest sensitivity is obtained for the NiO-CoO sensors. CoO-20 at.% NiO sensor with 15 wt.% ethylene glycol binder sintered at $1100^{\circ}C$ for 24 h exhibits high sensitivity of 90 % to 5000 ppm butane gas at the sensor temperature of $250^{\circ}C$, compared to low sensitivities at the low operating temperature for commercial sensors. Response and recovery times are, respectively, within few seconds and 1min in the static flow system, indicating rapid adsorption and desorption of butane gas on sensor surface even at this low temperature.

• Smart Structures and Systems
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• v.15 no.6
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• pp.1543-1567
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• 2015

In this study, a wireless crack sensor is developed for monitoring cracks propagating in two dimensions. This sensor is developed by incorporating a laser-based optical navigation sensor board (ADNS-9500) into a smart wireless platform (Imote2). To measure crack propagation, the Imote2 sends a signal to the ADNS-9500 to collect a sequence of images reflected from the concrete surface. These acquired images can be processed in the ADNS-9500 directly (the navigation mode) or sent to Imote2 for processing (the frame capture mode). The computed crack displacement can then be transmitted wirelessly to a base station. The design and the construction of this sensor are reported herein followed by some calibration tests on one prototype sensor. Test results show that the sensor can provide sub-millimeter accuracy under sinusoidal and step movement. Also, the two modes of operation offer complementary performance as the navigation mode is more accurate in tracking large amplitude and fast crack movement while the frame capture mode is more accurate for small and slow crack movement. These results illustrate the feasibility of developing such a crack sensor as well as point out directions of further research before its actual implementation.

• Korean Journal of Materials Research
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• v.13 no.2
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• pp.115-119
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• 2003

The thick film type sensor having Pt/Na Super Ionic Conductor(NASICON) solid electrolyte/Pt/$Na_2$$SO_4$/Pt catalyst system for $SO_2$gas was fabricated by screen-print method. The phase of Na Super Ionic Conductor solid electrolyte sintered at different temperature of 1050, 1150,$ 1250^{\circ}C$ and for different time of 1.5, 2.5, 3.5 hr were investigated by XRD. The Electromotive Force variation of the sensor with $SO_2$concentrations and operating temperatures were investigated. The major phase of Na Super Ionic Conductor film sintered at 115$0^{\circ}C$ for 3.5 hr was sodium zirconium silicon phosphate($Na_3$Zr$_2$$Si_2$PO$_{12}$). The Nernst's slope of Na Super Ionic Conductor sensor for $SO_2$gas with the variation of concentration from 10 to 100 ppm was 167.14 ㎷/decade at the operating temperature of $500 ^{\circ}C$. The increase of oxygen partial pressure was not affected to the variation of Nernst's slope.e.

• Journal of the Korean institute of surface engineering
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• v.50 no.4
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• pp.296-300
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• 2017

NiO nanofibers with Au nanoparticles were synthesized by sol-gel and electrospinning techniques, in which the reduction process by ultraviolet exposure is included for the growth of Au nanoparticles in the electrospinning solution. FE-SEM(Field Emission Scanning Electron Microscopy), TEM(Transmission Electron Microscopy) revealed that the synthesized nanofibers had the diameter of approximately 200 nm. X-ray diffraction showed the successful formation of Au-decorated NiO nanofibers. Gas sensing tests of Au-decorated NiO nanofibers were performed using reducing gases of CO, and $C_6H_6$, $C_7H_8$, $C_2H_5OH$. Compared to as-synthesized NiO nanofibers, the response of Au-loaded NiO nanofibers to CO gas was found to be about 3.4 times increased. On the other hand, the response increases were only 1.1-1.3 times for $C_6H_6$, $C_7H_8$, and $C_2H_5OH$.

• Korean Journal of Materials Research
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• v.18 no.11
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• pp.628-633
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• 2008

ZnO nanopowders were synthesized by the sol-gel method using hydrazine reduction, and their gas responses to 6 gases (200 ppm of $C_2H_5OH$, $CH_3COCH_3$, $H_2$, $C_3H_8$, 100 ppm of CO, and 5 ppm of $NO_2$) were measured at $300\;{\sim}\;400^{\circ}C$. The prepared ZnO nanopowders showed high gas responses to $C_2H_5OH$ and $CH_3COCH_3$ at $400^{\circ}C$. The sensing materials prepared at the compositions of [$ZnCl_2$]:[$N_2H_4$]:[NaOH] = 1:1:1 and 1:2:2 showed particularly high gas responses ($S\;=\;R_a/R_g,\;R_a$ : resistance in air, $R_g$ : resistance in gas) to 200 ppm of $C_2H_5OH$($S\;=\;102.8{\sim}160.7$) and 200 ppm of $CH_3COCH_3$($S\;= 72.6{\sim}166.2$), while they showed low gas responses to $H_2$, $C_3H_8$, CO, and $NO_2$. The reason for high sensitivity to these 2 gases was discussed in relation to the reaction mechanism, oxidation state, surface area, and particle morphology of the sensing materials.

• Bulletin of the Korean Chemical Society
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• v.32 no.10
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• pp.3735-3737
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• 2011

We report a simple method for fabricating ZnO gas sensors via a sonochemical route and their $H_2$ gas sensing properties. Vertically aligned ZnO nanorod arrays as a sensing material were synthesized on a Pt-electrode patterned alumina substrate under ambient conditions. The advantage of the proposed method is a high speed of processing. The gas sensor based on ZnO nanorod arrays with large specific surface area showed a high response to $H_2$ and a detection limit of 70 ppm at $250^{\circ}C$. Also, their response and recovery time were relatively short and a complete regeneration was observed. A mechanism for sensing $H_2$ gas on the surface of ZnO nanorods is proposed.