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Fabrication and Sensing Properties of NASICON Thick Film SO2 Gas Sensor Using Screen-print Method

스크린 인쇄법을 이용한 NASICON 후막 SO2가스 센서의 제조 및 특성

  • Bae, J.C. (Dept. of Materials Science and Metallurgy, Kyungpook National University) ;
  • Lee, S.T. (Dept. of Materials Science and Metallurgy, Kyungpook National University) ;
  • Jun, H.K. (Dept. of Materials Science and Metallurgy, Kyungpook National University) ;
  • Bang, Y.I. (Dept. of Electronic and Electrical Eng., Kyungpook National University) ;
  • Lee, D.D. (Dept. of Electronic and Electrical Eng., Kyungpook National University) ;
  • Huh, J.S. (Dept. of Materials Science and Metallurgy, Kyungpook National University)
  • 배재철 (경북대학교 재료금속공학과) ;
  • 이상태 (경북대학교 재료금속공학과) ;
  • 전희권 (경북대학교 재료금속공학과) ;
  • 방영일 (경북대학교 전자공학과) ;
  • 이덕동 (경북대학교 전자공학과) ;
  • 허증수 (경북대학교 재료금속공학과)
  • Published : 2003.02.01

Abstract

The thick film type sensor having Pt/Na Super Ionic Conductor(NASICON) solid electrolyte/Pt/$Na_2$$SO_4$/Pt catalyst system for $SO_2$gas was fabricated by screen-print method. The phase of Na Super Ionic Conductor solid electrolyte sintered at different temperature of 1050, 1150,$ 1250^{\circ}C$ and for different time of 1.5, 2.5, 3.5 hr were investigated by XRD. The Electromotive Force variation of the sensor with $SO_2$concentrations and operating temperatures were investigated. The major phase of Na Super Ionic Conductor film sintered at 115$0^{\circ}C$ for 3.5 hr was sodium zirconium silicon phosphate($Na_3$Zr$_2$$Si_2$PO$_{12}$). The Nernst's slope of Na Super Ionic Conductor sensor for $SO_2$gas with the variation of concentration from 10 to 100 ppm was 167.14 ㎷/decade at the operating temperature of $500 ^{\circ}C$. The increase of oxygen partial pressure was not affected to the variation of Nernst's slope.e.

Keywords

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