• Journal of the Semiconductor & Display Technology
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• v.16 no.3
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• pp.41-46
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• 2017

This study aims to select suitable co-solvents and to obtain optimal process conditions in order to improve process efficiency and productivity through experimental results obtained under various experimental conditions for the etching and rinsing process using liquid carbon dioxide and supercritical carbon dioxide. Acetone was confirmed to be effective through basic experiments and used as the etching solution for MEMS-wafer etching in this study. In the case of using liquid carbon dioxide as the solvent and acetone as the etching solution, these two components were not mixed well and showed a phase separation. Liquid carbon dioxide in the lower layer interfered with contact between acetone and Mems-wafer during etching, and the results after rinsing and drying were not good. Based on the results obtained under various experimental conditions, the optimum process for treating MEMS-wafer using supercritical CO2 as the solvent, acetone as the etching solution, and methanol as the rinsing solution was set up, and MEMS-wafer without stiction can be obtained by continuous etching, rinsing and drying process. In addition, the amount of the etching solution (acetone) and the cleaning liquid (methanol) compared to the initial experimental values can be greatly reduced through optimization of process conditions.

• Preventive Nutrition and Food Science
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• v.16 no.3
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• pp.261-266
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• 2011

Supercritical $CO_2$ pretreatment before dehydration leads to a faster dehydration rate. The best supercritical $CO_2$ pretreatment conditions for the most effective dehydration were $45^{\circ}C$, 25 MPa and $55^{\circ}C$, 25 MPa. Increasing pressure of the supercritical $CO_2$ pretreatment system tended to accelerate the dehydration rate more than increasing temperature did. Samples pretreated at higher temperatures and pressures showed greater shrinking and pore distribution on scanning electron microscopy. Control samples maintained their cell walls, whereas samples pretreated at higher temperatures and pressures showed more cell disruption, and more pores were observed. Pore sizes of control and pretreated samples were about 100 and $70{\sim}80\;{\mu}m$, respectively. Samples pretreated at higher temperatures and pressures had smaller pores and a denser distribution.

• KSBB Journal
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• v.16 no.3
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• pp.233-236
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• 2001

Because of casehardenign effect of amorphous paclitaxel, residual solvents, methylene chloride and emthanol could not be reduced to the maximum value allowed, 600 ppm and 3,000 ppm, in accord with the guidelines issued by the International Conference on Harmonization (ICH, 1997), using rotary evaporation and successive drying in a vacuum oven. However, methylene chloride and methanol were reduced to 486 ppm and 403 ppm, respectively using supercritical $CO_2$ on purified paclitaxel. The optimum pressure and operating time were 80 bar and 30 min at fixed operating temperature ($40^{circ}C$). This approach serves as a novel application of supercritical fluid extraction to remove residual solvents from active pharmaceutical ingredients.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.2
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• pp.27-32
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• 2020

Robust and hydrophobic tetraethoxysilane (TEOS) based silica aerogel was synthesized by supercritical alcohol drying with surface modification using the phenyl based silica co-precursor (PTMS). The aerogels were synthesized by hydrolysis and polycondensation reaction in which TEOS and PTMS in methanol were reacted together in presence of oxalic acid and ammonium hydroxide as the catalysts. Supercritical alcohol dried PTMS/TEOS composite silica aerogel were examined for the hydrophobicity, chemical interaction, surface morphology, and textural characteristics. The hydrophobic silica-based aerogels were characterized by Fourier transform infrared spectroscopy to investigate the presence of functional groups and chemical bonds. The prepared silica demonstrates hydrophobicity (76°-149°), a high specific surface area (398 ㎡/g to 739 ㎡/g). The present investigation provides a simple approach to synthesize hydrophobic and thermally stable silica aerogels.

• Polymer(Korea)
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• v.35 no.1
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• pp.66-71
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• 2011

With the synthesis of hyper crosslinked polymer particle (HCPP), having microporous structure with hydroxyl functional group, synthesized via polymerization reaction consists of three stepssuspension polymerization, hyper crosslinking by Friedel-Craft catalysis and hydrolysis reaction, the effects of the ratio of each monomer, hyper crosslinking conditions and $CO_2$ supercritical drying on the variations of surface morphology, pore size & distribution and BET surface area of HCPP have been investigated. It was observed that the formation of surface crack or fracture of HCPP was intimately related with the degree of hyper crosslinking reaction between microphase separated domains. And the value of BET surface area of HCPP increased with the increase of reaction temperature, time and the amounts of solvent used in hyper crosslinking step. Moreover, $CO_2$ supercritical drying was proven to be a very effective method for removing stabilizer, unreacted monomers and oligomers from HCPP but needed to add methanol as a co-solvent for efficient removing of residual catalyst.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1998.09a
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• pp.117-121
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• 1998

The Rapid Expansion of supercritical fluid Solutions (RESS) process was applied to particles coating. Experiments were conducted in a fluidized bed with an internal nozzle in the center of the reaction tube. Microcapsules (mean particle size : 49$\mu\textrm{m}$) prepared by spray drying method were used as the core particles. Supercritical CO2 solutions of paraffin were expanded through the nozzle in to the bed that was fluidized by air. Surface morphology prepared particles was observed by SEM. For the inspection of particle size change, particle size distributions were measured before and after coating. The releasing behavior of Mg2+ ions inspected by AA.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.1
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• pp.55-59
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• 1999

The Rapid Expansion of Supercritical fluid Solutions (RESS) process was applied to particles coating. Microcapsules prepared by spray drying were used as the core particles, and two kinds of paraffin were used as the coating materials. Supercritical $CO_{2}$ solutions of paraffin were expanded through the short nozzle into the bed that was fluidized by air. Extraction temperature and pressure were varied at $50~120^{\circ}C$, $150~200\;kg/\textrm{cm}^2$, respectively. The thickness of theoritical coating layer ws measured, and precipitate coating layer on surface was analyzed by using SEM, FT-IR. The release behaviors of $Mg^{2+}$ ions were inspected by atomic absorbance spectrophtometer.

• Korean Chemical Engineering Research
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• v.53 no.5
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• pp.557-564
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• 2015

The previous etching, rinsing and drying processes of wafers for MEMS (microelectromechanical system) using SC-$CO_2$ (supercritical-$CO_2$) consists of two steps. Firstly, MEMS-wafers are etched by organic solvent in a separate etching equipment from the high pressure dryer and then moved to the high pressure dryer to rinse and dry them using SC-$CO_2$. We found that the previous two step process could be applied to etch and dry wafers for MEMS but could not confirm the reproducibility through several experiments. We thought the cause of that was the stiction of structures occurring due to vaporization of the etching solvent during moving MEMS wafer to high pressure dryer after etching it outside. In order to improve the structure stiction problem, we designed a continuous process for etching, rinsing and drying MEMS-wafers using SC-$CO_2$ without moving them. And we also wanted to know relations of states of carbon dioxide (gas, liquid, supercritical fluid) to the structure stiction problem. In the case of using gas carbon dioxide (3 MPa, $25^{\circ}C$) as an etching solvent, we could obtain well-treated MEMS-wafers without stiction and confirm the reproducibility of experimental results. The quantity of rinsing solvent used could be also reduced compared with the previous technology. In the case of using liquid carbon dioxide (3 MPa, $5^{\circ}C$, we could not obtain well-treated MEMS-wafers without stiction due to the phase separation of between liquid carbon dioxide and etching co-solvent(acetone). In the case of using SC-$CO_2$ (7.5 Mpa, $40^{\circ}C$), we had as good results as those of the case using gas-$CO_2$. Besides the processing time was shortened compared with that of the case of using gas-$CO_2$.

• Proceedings of the PSK Conference
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• 2003.10b
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• pp.236.3-237
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• 2003

Fine particles of water-soluble pharmaceuticals were prepared using a new micronization method, Carbon Dioxide Assisted Nebulization in a Bubble Dryer(CAN-BD). The process utilized mixtures of CO$_2$ in aqueous solution at supercritical conditions to form an emulsion. The aerosols were dried with pre-heated nitrogen, and the drying chamber was operated at near atmospheric pressure. The dry particles were collected on membrane filter at the bottom of the drying chamber. Several processing parameters such as flow rate, temperature, pressure, solid concentration and processing scale were accessed using NaCl, human serum albumin, and granulocyte-colony stimulating factor as model pharmaceuticals. (omitted)

• Clean Technology
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• v.24 no.1
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• pp.1-8
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• 2018

As the social demands for environmental pollution increase and regulations on the dyeing process wastewater are strengthened, supercritical dyeing process has been attracting attention as an alternative technology to reduce wastewater and energy consumption. In the supercritical dyeing process where carbon dioxide is used as a solvent instead of water as a solvent, there is no wastewater generated. The unfixed dyes can be reused later which makes the process environment-friendly. Also, after dyeing process, dried textiles can be obtained without additional drying process, which makes the process energy efficient. In this article, we have summarized the development of the supercritical dyeing process along with the research in Korea today and compared the principle of supercritical dyeing process with conventional dyeing process. To further explain the principle, studies of the distribution factor and mass transfer of dyes in supercritical carbon dioxide and fibers, as well as solubility between supercritical $CO_2$ and dyes are discussed. The dynamic behavior of dyes in supercritical dyeing apparatus and summary of the supercritical dyeing facilities developed around the world are also discussed. Finally, we suggest the direction of research and development for optimization of supercritical dyeing process and application to synthetic fibers and natural fibers except for polyester.