• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.12
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• pp.939-943
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• 2011

In this paper, reliability of the two sandwiched MIM capacitors of $Al_2O_3-HfO_2-Al_2O_3$ (AHA) and $SiO_2-HfO_2-SiO_2$ (SHS) with hafnium-based dielectrics was analyzed using two kinds of voltage stress; DC and AC voltage stresses. Two MIM capacitors have high capacitance density (8.1 fF/${\mu}m^2$ and 5.2 fF/${\mu}m^2$) over the entire frequency range and low leakage current density of ~1 nA/$cm^2$ at room temperature and 1 V. The charge trapping in the dielectric shows that the relative variation of capacitance (${\Delta}C/C_0$) increases and the variation of voltage linearity (${\alpha}$/${\alpha}_0$) gradually decreases with stress-time under two types of voltage stress. It is also shown that DC voltage stress induced greater variation of capacitance density and voltage linearity than AC voltage stress.

• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.202-208
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• 1997

Bi-layered SrBi2Ta2O9(SBT) films were deposited on Pt/Ti/SiO2/Si sibstrates by rf magnetron sputt-ering at room temperature and then were annealed at 75$0^{\circ}C$, 80$0^{\circ}C$ and 85$0^{\circ}C$ for 1 hour in oxygen at-mosphere. The film composition of SrBi2Ta2O9 was obtained after depositing at room temperature and annealing at 80$0^{\circ}C$. Excess 20mole% Bi2O3 and 30 mole% SrCO3 were added to the target to compensate for the lack of Bi and Sr in SBT film. 200 nm thick SBT film exhibited and dense microstructure, adielectric constant of 210, and a dissipation factor of 0.05 at 1 MHz frequency. The films exhibited Curie temperature of 32$0^{\circ}C$ and a dielectric constant of 314 at that temperature under 100 kHz frequency. The remanent polarization(2Pr) and the coercive field(2Ec) of the SBT films were 9.1 $\mu$C/$\textrm{cm}^2$ and 85 kV/cm at an applied voltage of 3V, resspectively and the SBT film showed a fatigue-free characteristics up to 1010 cy-cles under 5V bipolar pulse. The leakage current density of the SBT film was about 7$\times$10-7A/$\textrm{cm}^2$ at 150 kV/cm. Fatigue-free SBT films prepared by rf magnetron sputtering can be suitable for application to non-volatile memory device.

• Journal of Korean Tunnelling and Underground Space Association
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• v.19 no.2
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• pp.161-177
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• 2017

This paper presents the design considerations and field applications on inflatable structure system to protect rapidly flooding damages in large section tunnel. This inflatable structure system is very valuably used to protect passively and rapidly the possibilities of tunnel damages by flooding threats and unusual leakage to be occurred during and after underground infrastructure. In particular, this system should be necessary in subsea tunnel. The predominant factors in the design of inflatable structure system are the leakage and friction characteristics between the inflater and tunnel liner. The analytical and experimental studies are performed to develop the design considerations and to examine the design parameters of the inflatable structure system. The analytical solutions are developed using membrane theory to suggest the design considerations. The relative friction tests of several fabric materials are also carried out to determine the friction characteristics according to the different friction conditions between inflater and tunnel surface. The test results show that the friction coefficients in wet surface condition are about 20% lower than the values in dry surface condition. In addition, virtual design of tunnel protection system for two virtual subsea tunnel sites which is under reviewing in Korea, is carried out based on this research. It is expected that the results of this research will be very useful to understand the inflater structure design and development the technology of tunnel protection structures in the future.

• Restorative Dentistry and Endodontics
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• v.27 no.2
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• pp.142-149
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• 2002

Low-viscosity composite resins may produce better sealed margins than stiffer compositions (KempScholte and Davidson, 1988: Crim, 1989). Plowable composites have been recommended for use in Class V cavities but it is also controversial because of its high rates of shrinkage. On the other hand, in the study comparing elastic moduli and leakage, the microfill had the least leakage (Rundle et at. 1997) Furthermore, in the 1996 survey of the Reality Editorial Team, microfills were the clear choice for abfraction lesions. The purpose of this study was to evaluate the microleakage of 6 compostite resins (2 hybrids, 2 microfills, and 2 flowable composites) with and without load cycling. Notch-shaped Class V cavities were prepared on buccal surface of 180 extracted human upper premolars on cementum margin. The teeth were randomly divided into non-load cycling group (group 1) and load cycling group (group 2) of 90 teeth each. The experimental teeth of each group were randomly divided into 6 subgroups of 15 samples. All preparations were etched, and Single bond was applied. Preparations were restored with the following materials (n=15) : hybrid composite resin [Z250(3M Dental Products Inc. St. Paul, USA), Denfil(Vericom, Ahnyang, Korea)], microfill [Heliomolar RO(Vivadent, Schaan, Liechtenstein), Micronew(Bisco Inc. Schaumburg, IL, USA)], and flowable composite［AeliteFlo(Bisco Inc. Schaumburg, IL, USA), Revolution(Kerr Corp. Orange, CA, USA)]. Teeth of group 2 were subjected to occlusal load (100N for 50,000 cycles) using chewing simulator(MTS 858 Mini Bionix II system, MTS Systems Corp. Minn. USA). All samples were coated with nail polish 1mm short of the restoration, placed in 2％ methylene blue for 24 hours, and sectioned with a diamond wheel. Enamel and dentin/cementum margins were analyzed for microleakage on a sclale of 0 (no leakage) to 3 (3/3 of wall). Results were statistically analyzed by Kruscal-Wallis One way analysis, Mann-Whitney U-test, and Student-Newmann-Keuls method. (p = 0.05) Results : 1. There was significantly less microleage in enamel margins than dentinal margins of all groups (p＜0.05) 2. There was no significant between six composite resin in enamel margin of group 1. 3. In dentin margin of group 1, flowable composite had more microleakage than others but not of significant differences. 4. there was no significant difference between six composite resin in enamel margin of group 2. 5. In dentin margin of group 2, the microleakage were R＞A =H=M＞D＞Z. But there was no significant differences. 6. In enamel margins, load cycling did not affect the marginal microleakage in significant degree. 7. In enamel margins, load cycling did affect the marginal microleakage only in Revolution. (p＜0.05).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.174-174
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• 2009

현재 전자부품용으로 사용되는 유리프리트의 경우 PbO계를 주로 사용하고 있다. 최근 환경규제에 따른 PbO 사용이 제한됨에 따라 이를 대체할 Pb-free 유리 조성에 대한 연구가 활발히 진행 중이다. Pb-free계로서는 $Bi_2O_3$계, $B_2O_3$계가 주로 연구되고 있으나 소성 온도가 $500^{\circ}C$이상으로 높고 또한 $Bi_2O_3$ 계는 중금속이기 때문에 문제가 있다. 본 연구에서는 $400^{\circ}C$ 미만 소성이 가능한 SnO-$P_2O_5$계를 기본 조성계로 선택하고 열적, 전기적, 화학적 특성을 개선하기 위해 $R_2O_3$(R=Al, B), RO(R=Mg, Zn, Ca, Ba) 를 첨가하였다. 개선된 조성으로 샘플을 만들고 이를 대상으로 실제 전자부품 생산 공정에 적용 실험을 진행 하였다. 실험에 사용된 전자 부품은 소형 칩 베리스터로 생산 공정에서 코팅용 유리프리트와 파우더를 절연체로서 전면에 코팅하게 된다. 유리프리트를 코팅함으로서 누설 전류를 차단하고 생산 공정시 베리스터 내부를 보호하게 된다. 실험에 사용된 샘플의 열적 특성은 TMA로, 전기적 절연 특성은 고 절연저항 측정기로 측정하였고 내 산성과 내 알칼리성도 측정하였다. 샘플을 이용하여 완성된 칩 베리스터의 성능은 고온, 내습 신뢰성 TEST(고온:$150^{\circ}C$ 12HR, 내습:$85^{\circ}C$-85%12HR)로 실험하여 합부판정 (Leakage current <10uA)을 내려 완성품과 불량품을 가려내었다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.6
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• pp.272-278
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• 2003

$Bi_4Ti_3O_{12}$ (BIT) and $(Bi_{3.25}La_{0.75})(Ti_{2.97}V_{0.03})O_{12}$ (BLTV) thin films were deposited on ITO/glass substrates by metal organic chemical vapor deposition (MOCVD) using ultrasonic spraying. After deposition of the films in oxygen atmosphere for 30 min, the films were heated by rapid thermal annealing (RTA) method, especially direct insertion, at various temperatures. The films were investigated on phase formation temperature, microstructure and electrical properties. From x-ray diffraction (XRD) patterns, the perovskite phase formation temperature of BLTV thin film was about $600^{\circ}C$ which was lower than that of BIT, $650^{\circ}C$. The leakage current of the BLTV thin film was measured to be $1.52\times 10^{-9}$A/$cm^2$ at an applied voltage of 1 V. The remanent polarization (Pr) and coercive field (Ec) values of the BLTV film deposited at $650^{\circ}C$ were $5.6\muC/cm^2$ and 96.5 kV/cm, respectively.

• Journal of the Semiconductor & Display Technology
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• v.8 no.3
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• pp.19-23
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• 2009

We have studied dielectric characteristics of low-k interlayer dielectric materials was fabricated by plasma enhanced chemical vapor deposition (PECVD). BTMSM precursor was introduced with the flow rates from 24 sccm to 32 sccm by 2 sccm step in the constant flow rate of 60 sccm $O_2$. Then, SiOCH thin film deposited at room temperature was annealed at temperature of $400^{\circ}C$ and $500^{\circ}C$ for 30 minutes in vacuum. The vibrational groups of SiOCH thin films were analyzed by FT/IR absorption lines, and the dielectric constant of the low-k SiOCH thin films were obtained by measuring C-V characteristic curves. With the result that FTIR analysis, as BTMSM flow rate increase, relative carbon content of SiOCH thin film increased from 29.5% to 32.2%, and increased by 32.8% in 26 sccm specimen after $500^{\circ}C$ annealing. Dielectric constant was lowest by 2.32 in 26 sccm specimen, and decreased more by 2.05 after $500^{\circ}C$ annealing. Also, leakage current is lowest by $8.7{\times}10^{-9}A/cm^2$ in this specimen. In the result, shift phenomenon of chemical bond appeared in SiOCH thin film that BTMSM flow rate is deposited by 26 sccms, and relative carbon content was highest in this specimen and dielectric constant also was lowest value

• Korean Chemical Engineering Research
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• v.51 no.3
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• pp.308-312
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• 2013

Active carbons with high specific surface area and micro pore structure were prepared from the coconut shell char using the chemical activation method of NaOH. The preparation process has been optimized through the analysis of experimental variables such as activating chemical agents to char ratio and the flow rate of gas during carbonization. The active carbons with the surface area (2,481 $m^2/g$) and mean pore size (2.32 nm) were obtained by chemical activation with NaOH. The electrochemical performances of hybrid capacitor were investigated using $LiMn_2O_4$, $LiCoO_2$ as the positive electrode and prepared active carbon as the negative electrode. The electrochemical behaviors of hybrid capacitor using organic electrolytes ($LiPF_6$, $TEABF_4$) were characterized by constant current charge/discharge, cyclic voltammetry, cycle and leakage tests. The hybrid capacitor using $LiMn_2O_4$/AC electrodes had better capacitance than other hybrid systems and was able to deliver a specific energy as high as 131 Wh/kg at a specific power of 1,448 W/kg.

• Food Science and Preservation
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• v.18 no.4
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• pp.429-435
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• 2011

The demand of packaged baby leaves has been increased for its convenient use as fresh-cut produce. This investigation was aimed to explore the effects of different sanitizers on the quality parameters of 'Tah Tasai' Chinese cabbage (Brassica campestris var. narinosa) baby leaves. Thirteen days old baby leaves were harvested and washed in tap water (TW), 100 ppm chlorine solution (Cl), 2 ppm ozonated water ($O_3$), 15 ppm chlorine dioxide solution ($ClO_2$) and washing with 0.2% citric acid solution followed by 50% ethanol spray (CA+Et). The samples were then packaged in 50 ${\mu}m$ polyethylene bags and stored at $5^{\circ}C$ for 10 days. Off-odor of packaged baby leaves was not detected during storage. There was no significant difference in color parameters among the treatments. Samples treated with $O_3$ showed substantially higher electrolyte leakage throughout the storage. This treatment also rendered a higher accumulation of $CO_2$ in the packages. Samples treated with Cl and CA+Et maintained good overall visual quality with higher scores compared to that of $O_3$ and $ClO_2$. Although Cl treatment showed lower number of total aerobic count at the beginning of storage, citric acid in combination with ethanol treatment was more effective until the end of storage. The combined treatment also showed comparatively lower coliform plate count. This result indicates that citric acid wash followed by ethanol spray could be an alternative to chlorine for environment friendly sanitization of baby leaves.

• Journal of Korean Vacuum Science & Technology
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• v.4 no.3
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• pp.73-77
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• 2000

Single crystal and polycrystalline Si thin films were doped with phosphorus by a 2-zone diffusion method to develop the low-resistivity polycrystalline Si electrode for a hemispherical grain. Solid phosphorus source was used in order to achieve uniformly and highly doped surface region of polycrystalline Si films having rough surface morphology. In case of 2-zone diffusion method, it is proved that the heavy doping near the surface area can be achieved even at a relatively low temperature. SIMS analysis revealed that phosphorus doping concentration in case of using solid P as a doping source was about 50 times as that of phosphine source at 750$^{\circ}C$. Also, ASR analysis revealed that the carrier concentration was about 50 times as that of phosphine. In order to evaluate the electrical characteristics of doped polycrystalline Si films for semiconductor devices, MOS capacitors were fabricated to measure capacitance of polycrystalline Si films. In ${\pm}$2 V measuring condition, Si films, doped with solid source, have 8% higher $C_{min}$ than that of unadditional doped Si films and 3% higher $C_{min}$ than that of Si films doped with $PH_3$ source. The leakage current of these films was a few fA/${\mu}m^2$. As a result, a 2-zone diffusion method is suggested as an effective method to achieve highly doped polycrystalline Si films even at low temperature.