• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.37 no.11
• /
• pp.18-24
• /
• 2000

(Ba,Sr)$TiO_3$ thin films have attracted great interest as new dielectric materials of capacitors for ultra-large-scale integrated dynamic random access memories (ULSI-DRAMs) such as 1 Gbit or 4 Gbit. In this study, inductively coupled $BCl_3/Cl_2/Ar$ plasmas was used to etch (Ba,Sr)$TiO_3$ thin films. RF power/dc bias voltage=600 W/-250 V and chamber pressure was 10 mTorr. The $Cl_2/(Cl_2+Ar)$ was fixed at 0.2 the (Ba,Sr)$TiO_3$ thin films were etched adding $BCl_3$. The highest (Ba,Sr)$TiO_3$ etch rate is $480{\AA}/min$ at 10 % $BCl_3$ to $Cl_2/Ar$. The change of Cl, B radical density measured by optical emission spectroscopy(OES) as a function of $BCl_3$ percentage in $Cl_2/Ar$. The highest Cl radical density was shown at the addition of 10% $BCl_3$ to $Cl_2/Ar$. To study on the surface reaction of (Ba, Sr)$TiO_3$ thin films was investigated by XPS analysis. Ion bombardment etching is necessary to break Ba-O bond and to remove $BaCl_2$. There is a little chemical reaction between Sr and Cl, but Sr is removed by physical sputtering. There is a chemical reaction between Ti and Cl, and $TiCl_4$ is removed with ease. The cross-sectional of (Ba,Sr)$TiO_3$ thin film was investigated by scanning electron microscopy (SEM), the etch slope is about 65~70$^{\circ}$.

• Journal of the Korean Society of Safety
• /
• v.20 no.4 s.72
• /
• pp.29-33
• /
• 2005

In this paper, reflectance and the dielectric characteristics for $P_2O_5-ZnO-BaO$ system and $SiO_2-ZnO-B_2O_3$ system have been investigated as a function of contents of $TiO_2$. The reflectance was decreased with increasing the contents of $TiO_2$ and the reflectance of $P_2O_5-ZnO-BaO$ system was lowered than that of $SiO_2-ZnO-B_2O_3$ system. The dielectric constant of $P_2O_5-ZnO-BaO$ system was higher than $SiO_2-ZnO-B_2O_3$ system, and the dielectric constant in the both system was increased with increasing of $TiO_2$ contents. This can be explained as the space charge effects. These results are could be applied to the under plate dielectrics of PDP required high reflective ratio and breakdown strength.

• Korean Journal of Materials Research
• /
• v.16 no.4
• /
• pp.235-240
• /
• 2006

We investigated the effect of ZnO filler on the microstructure of $BaO-B_2O_3-ZnO-P_2O_5$ glass system to find an etching mechanism of barrier ribs. The sintering behavior of composites heated in the temperature range $560-600^{\circ}C$ was studied by volumetric shrinkage rate and microstructure. The etching test was carried out in $HNO_3$ solution at $50^{\circ}C$ for 10 min. The volumetric shrinkage of sintered sample decreased with the increased firing temperature because of the formation of two crystals. Glass and ZnO filler react forming the $BaZn_2(PO_4)_2$ crystal phases during the sintering process. Etching phenomenon of sintered samples by $HNO_3$ showed that the $BaZn_2(PO_4)_2$ crystal phase was strongly leached compared to glass matrix, crystal phases and fillers. Therefore, the control of interface by condition of sintering is so important to achieve etching effect in barrier ribs.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07b
• /
• pp.772-775
• /
• 2004

본 논문에서는 $B_2O_3$ 첨가가 Ba$(Mg_{1/3}Ta_{2/3})O_3$ (BMT)의 유전특성 및 미세구조의 변화에 미치는 영향에 대해 연구하였다 $B_2O_3$가 소량 첨가되었을 때는 결정립의 성장을 야기하여 치밀한 미세구조를 보였지만, 다량이 첨가된 경우 비정상 결정립 성장을 야기하여 치밀화가 떨어지는 미세구조를 보임과 동시에 $Ba_3Ta_5O_{15}$의 2차상을 형성했다. 이는 소량의 $B_2O_3$ 첨가가 유전특성의 향상을 가져왔지만, 다량의 첨가는 오히려 특성의 악화를 가져온 결과의 원인이라 생각된다. 0.5mol%의 $B_2O_3$를 첨가하여 $1500^{\circ}C$에서 6시간 소결한 경우 ${{\varepsilon}_r}=24$, $Q{\times}f=210,000GHz$의 유전 특성 값과 $4.74ppm/^{\circ}C$의 $T_{cf}$ 값을 얻었다.

• Korean Journal of Materials Research
• /
• v.7 no.1
• /
• pp.57-61
• /
• 1997

Formation of fluorite structure and other related crystal structures in the $Y_{0.8}Ta_{0.2}O_{1.7}$-MO(M=Ba, Sr, Ca and Mg) system has been studied $Ba_2YTaO_6,\;Sr_2YTaO_6$ of cubic perovskite type ordered structure anti $Y_2O_3$ of cubic structure were produced besides the defect fluorite structure when 4 moIob of BaO or SrO was added to $Y_{0.8}Ta_{0.2}O_{1.7}$ When CaO more than 8 nlol"/o was added to $Y_{0.8}Ta_{0.2}O_{1.7}$, monoclinic: $Ca_2YTaO$, and cubic $Y_2O_3$ were pri~tlucecl ;IS this sec:onci phases hesides the main fluorite truc,ture. Smglc phase of fluorite structure \vas 1)roduc:ciI when MgO was added up to 12 mol%, however, MgO appeared as the second phase besides the main fluorire structure when MgO was added more than lti moI0'. Consquently, it is considered rh;it the formation of tluorite structure is related with the formation of the cubic perovskite type ordered structure of $A_2(B'B")O_6$ as well as the cation radii of the additives.additives.

• Journal of the Korean Magnetics Society
• /
• v.6 no.4
• /
• pp.204-210
• /
• 1996

M type hexa-ferrites were prepared by means of a solid state reaction using mill scale, $Fe_{2}O_{3}$, and the mixture of mill scale and $Fe_{2}O_{3}$. The mixture of powders were calcined at $1150^{\circ}C$ for 2 hrs. and sintered at $1250^{\circ}C$ for 2 hrs, with varing the mole ratio of $Fe_{2}O_{3}$/$BaCO_{3}$, by 5.2~6.0. And the magnetic properties and morphologies of Baferrites with impurities such as $SiO_{2},\;Al_{2}O_{3},\;MgO,\;CaO\;and\;Na_{2}O$ in the mill scale were investigated. The magnetic properties were worsened by the addition of $Na_{2}O because of non-reacted iron oxide and intermediate compound of $BaFe_{2}O_{4}$ but they were improved apparently by the addition of $Si_{2}$ and $Al_{2}O_{3}$ in the composition of $BaO.5.6Fe_{2}O_{3}$. Moreover, $M_{s}$ decreased but $_{B}H_{C}$ increased through the addition of $Al_{2}O_{3}$ in Ba-ferrite. ${(BH)}_{max}$ of sintered BM($BaCO_{3}$, mill scale mixture) and BFM($BaCO_{3}$, $Fe_{2}O_{3}$, and null scale mixture) were 0.86 and 1.04 MGOe, respectively, and the magnetic properties were changed around $440^{\circ}C$.

• Korean Journal of Materials Research
• /
• v.18 no.12
• /
• pp.678-682
• /
• 2008

This study investigates $Bi_2O_3$-$B_2O_3$-BaO-ZnO glass with variations of the $Co_3O_4$ content (0.25, 0.5, 1, and 2 wt%) and the interaction between transparent dielectric and Ag electrodes heat-treated at $500-560^{\circ}C$ for 30 min. The glass transition temperature, softening temperature and thermal expansion coefficient were $432^{\circ}C$, $460^{\circ}C$ and $81.4{\times}10^{-7}/^{\circ}C$, respectively. The transmittance of 0.25 wt% $Co_3O_4$ to which dielectric was added was highest and was decreased due to coloration with the addition of more than 0.25 wt%. However, without $Co_3O_4$, the transmittance of the transparent layer was decreased due to the formation of $Ba_5Bi_3$; however, the occurrence of the crystal phase decreased as a result of the addition of $Co_3O_4$. The amount of $Co^{2+}$ ions increased as the $Co_3O_4$ increased. With a maximum of $Co^{3+}$ ions, the highest transmittance was observed.

• Journal of the Korean Magnetic Resonance Society
• /
• v.17 no.2
• /
• pp.86-91
• /
• 2013

Detailed information about the structural nature of three-coordinate borons in ${\beta}-BaB_2O_4$ is obtained through $^{11}B$ MAS NMR and $^{11}B$ single-crystal NMR. The three-coordinate $BO_3$ of the two borons B(1) and B(2) in ${\beta}-BaB_2O_4$ were distinguished. The spin-lattice relaxation time in the laboratory frame $T_1$ for B(1) and B(2) slowly decreases with increasing temperature, whereas the spin-lattice relaxation time in the rotating frame $T_{1{\rho}}$ for B(1) and B(2), which differs from $T_1$, is nearly constant. The B(1) and B(2) of the two types were distinguished by $^{11}B$ MAS NMR and $^{11}B$ single-crystal NMR.

• Journal of the Korean Chemical Society
• /
• v.27 no.3
• /
• pp.224-232
• /
• 1983

The effects of ball-milling time on solid state reactions in the system $BaCO_3-Fe_2O_3$ and the magnetic properties of Ba-ferrite 4(BaFe_{12}O_{19})$ have been studied. $BaCO_3-Fe_2O_3 $mixtures were prepared by ball-milling for varying lengths of time; 5, 15, 30, 80 and 200 hours. Techniques employed were thermogravimetry, X-ray diffraction analysis, scanning electron microscopy and B-H curve tracer. It is shown that the aggregation states and superparamagnetic size fractions obtained by increasing ball-milling time have remarkable effects on solid state reactions and magnetic properties of Ba-ferrite.

• Journal of the Korean Magnetics Society
• /
• v.19 no.4
• /
• pp.152-155
• /
• 2009

Ba-Ferrite single crystals were prepared and the magnetic and thermal properties were characterized by Mossbauer spectroscopy. The single crystal layer was cut in the c-axis and radiated to the surface by ${\gamma}$-rays for Mossbauer spectroscopy. We found out that the spin states in Fe ions were parallel to the ${\gamma}$-rays direction and the whole crystal bulk formed only one crystal with the same spin direction. $M\"{o}ssbauer$ spectra in single crystal have only 4 sets of 4 absorption lines in each Fe site when the ${\gamma}$-rays have the same radiation direction with the c-axis in the crystal, and there was no 2b-site spectrum. The zero absorption of 2b-site means that there was a fast diffusion motion in a double-well atomic potential at room temperature, in which bipyramidal Fe ions have the two minima at each side mirror plane.