Dry etching of Polymethyl methacrylate (PMMA) in capacitively coupled $SF_6,\;SF_6/Ar\;and\;SF_6/CH_4$ plasmas
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- 한국재료학회:학술대회논문집
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- 한국재료학회 2007년도 추계학술발표대회 및
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- pp.103.2-103.2
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- 2007