• Title/Summary/Keyword: $Al_2O_3$ addition

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Effect of Additives on the Refractive Index of B2O3-SiO2-Al2O3 Glasses for Photolithographic Process in Electronic Micro Devices

  • Won, Ju-Yeon;Hwang, Seong-Jin;Lee, Jung-Ki;Kim, Hyung-Sun
    • Korean Journal of Materials Research
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    • v.20 no.7
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    • pp.370-373
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    • 2010
  • In fabricating plasma display panels, the photolithographic process is used to form patterns of barrier ribs with high accuracy and high aspect ratio. It is important in the photolithographic process to control the refractive index of the photosensitive paste. The composition of this paste for photolithography is based on the $B_2O_3-SiO_2-Al_2O_3$ glass system, including additives of alkali oxides and rare earth oxides. In this work, we investigated the density, structure and refractive index of glasses based on the $B_2O_3-SiO_2-Al_2O_3$ system with the addition of $Li_2O$, $K_2O$, $Na_2O$, CaO, SrO, and MgO. The refractive index of the glasses containing K2O, Na2O and CaO was similar to that of the [BO3] fraction while that of the SrO, MgO and Li2O containing glasses were not correlated with the coordination fraction. The coordination number of the boron atoms was measured by MAS NMR. The refractive index increased with a decrease of molar volume due to the increase in the number of non-bridging oxygen atoms and the polarizability. The lowest refractive index (1.485) in this study was that of the $B_2O_3-SiO_2-Al_2O_3-K_2O$ glass system due to the larger ionic radius of $K^+$. Based on our results, it has been determined that the refractive index of the $B_2O_3-SiO_2-Al_2O_3$ system should be controlled by the addition of alkali oxides and alkali earth oxides for proper formation of the photosensitive paste.

A study on the Mechanical Properties of $Al_2O_{3(p)}$/LXA Composites by Melt-stirring Method (용탕교반법에 의한 $Al_2O_{3(p)}$/LXA복합재료의 기계적 성질에 관한 연구)

  • 이현규;공창덕
    • Journal of the Korean Society of Propulsion Engineers
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    • v.4 no.1
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    • pp.65-73
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    • 2000
  • Casting of metal matrix composites is an attractive process since it offers a wide selection of materials and processing conditions. Among the casting methods, melt-stirring technology is much attractive route in industrial application because it is more simple and inexpensive compared to squeeze casting or powder metallurgy. In the present work, effects of particle size, volume fraction of particles and mg addition on mechanical properties and thermal expansion coefficients of $\alpha$ -$Al_2O_{3(p)}$/LXA composites were studied. It is shown that $\alpha$ -$Al_2O_3$ particles formed at the interface of $\alpha$ -$Al_2O_3$ particles and matrix made an important role on mechanical properties. Ultimate tensile strength of most composite materials was not increased. But in the case of 5vol% addition of 16$\mu\textrm{m}$ $\alpha$ -$Al_2O_3$ Particle, Ultimate tensile strength of composite materials with 3wt.% Mg was increased. Volume fraction of reinforcements and mg content were thermal expansion coefficients of composite materials were decreased.

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A Study on the Alumina Ceramic Composite Dispersed With the Zirconia (지르코니아-알루미나 세라믹 복합재료에 관한 연구)

  • Park, Jae-Sung;Lee, Yeong-Sin
    • 전자공학회논문지 IE
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    • v.49 no.2
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    • pp.1-8
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    • 2012
  • The effects of the addition of either monoclinic $ZrO_2(pure)$ or tetragonal $ZrO_2$ containing 5.35wt% $Y_2O_3(Y-TZP)$ on the mechanical properties and thermal shock resistance of $Al_2O_3$ ceramics were investigated. The addition of $ZrO_2$(m) and Y-TZP increased sintered density of $Al_2O_3$. The Vickers hardness also increased as the volume fraction of Y-TZP increased going through a maximum at 20wt%. The hardness of the specimens was found to be dependent on the sintered density. The higher volume fraction of either $ZrO_2(m)$ or Y-TZP resulted in the higher fracture toughness of the composite was. This result may be taken as evidence that toughening of $Al_2O_3$ can be achieved by not only the transformation toughening but microcrack toughening of $ZrO_2$. The thermal shock property for $Al_2O_3-ZrO_2$ composites was improved by increasing the volume fraction of monoclinic $ZrO_2(pure)$. The grain size increased as the volume fraction of $ZrO_2$ did.

Chromate Refractory by Combustion Process (연소합성에 의한 크로메이트 내화물 제조)

  • 김형순;한정환
    • Journal of the Korean Ceramic Society
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    • v.31 no.12
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    • pp.1437-1442
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    • 1994
  • Self propagating synthesis and thermal explosion of combustion reactions were applied to Al/K2Cr2O7/Al2O3 system as the first stage for a production of magnesia-chromium refractory. Several factors related to products made by two combustion reactions were considered and properties of products were characterised. Two processes were required to preheat upto at least 80$0^{\circ}C$ for the thermal explosion and the self propagating synthesis. These processes were so violent and explosive that alumina as diluent was added to the system in order to absorb the reaction heat and reduce the reaction rate. The products consisted of crystal phases of KAl5O8, Cr2O3, Al2O3, K2CrO4, and K2Al2O4.3H2O. The amount of KAl5O8 and K2Al2O4.3H2O crystal phases of products were decreased with further addition of alumina.

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Preparation of M Type Hexa-Ferrite Using the Mill Scale (Mill Scale을 이용한 M형 Ferrite의 합성)

  • 오영우
    • Journal of the Korean Magnetics Society
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    • v.6 no.4
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    • pp.204-210
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    • 1996
  • M type hexa-ferrites were prepared by means of a solid state reaction using mill scale, $Fe_{2}O_{3}$, and the mixture of mill scale and $Fe_{2}O_{3}$. The mixture of powders were calcined at $1150^{\circ}C$ for 2 hrs. and sintered at $1250^{\circ}C$ for 2 hrs, with varing the mole ratio of $Fe_{2}O_{3}$/$BaCO_{3}$, by 5.2~6.0. And the magnetic properties and morphologies of Baferrites with impurities such as $SiO_{2},\;Al_{2}O_{3},\;MgO,\;CaO\;and\;Na_{2}O$ in the mill scale were investigated. The magnetic properties were worsened by the addition of $Na_{2}O because of non-reacted iron oxide and intermediate compound of $BaFe_{2}O_{4}$ but they were improved apparently by the addition of $Si_{2}$ and $Al_{2}O_{3}$ in the composition of $BaO.5.6Fe_{2}O_{3}$. Moreover, $M_{s}$ decreased but $_{B}H_{C}$ increased through the addition of $Al_{2}O_{3}$ in Ba-ferrite. ${(BH)}_{max}$ of sintered BM($BaCO_{3}$, mill scale mixture) and BFM($BaCO_{3}$, $Fe_{2}O_{3}$, and null scale mixture) were 0.86 and 1.04 MGOe, respectively, and the magnetic properties were changed around $440^{\circ}C$.

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Dry Etching Properties of HfAlO3 Thin Film with Addition O2 gas Using a High Density Plasma

  • Woo, Jong-Chang;Lee, Yong-Bong;Kim, Jeong-Ho
    • Transactions on Electrical and Electronic Materials
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    • v.15 no.3
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    • pp.164-169
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    • 2014
  • We investigated the etching characteristics of $HfAlO_3$ thin films in $O_2/Cl_2/Ar$ and $O_2/BCl_3/Ar$ gas, using a high-density plasma (HDP) system. The etch rates of the $HfAlO_3$ thin film obtained were 30.1 nm/min and 36 nm/min in the $O_2/Cl_2/Ar$ (3:4:16 sccm) and $O_2/BCl_3/Ar$ (3:4:16 sccm) gas mixtures, respectively. At the same time, the etch rate was measured as a function of the etching parameter, namely as the process pressure. The chemical states on the surface of the etched $HfAlO_3$ thin films were investigated by X-ray photoelectron spectroscopy. Auger electron spectroscopy was used for elemental analysis on the surface of the etched $HfAlO_3$ thin films. These surface analyses confirm that the surface of the etched $HfAlO_3$ thin film is formed with nonvolatile by-product. Also, Cl-O can protect the sidewall due to additional $O_2$.

A Study of Electroplating Conditions and Corrosion Resistance for Al2O3 Dispersed Zn-Co-Cr Electroplated Steel Sheets (Al2O3 분산 Zn-Co-Cr 전기도금강판의 제조조건 및 내식성에 관한 연구)

  • Kim, S.B.;Suh, S.J.;Park, H.S.
    • Journal of the Korean Society for Heat Treatment
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    • v.6 no.2
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    • pp.89-97
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    • 1993
  • An improvement in corrosion resistance of various types of Zn-coated steel sheets is thought to be possible with the addition of fine oxide powder to the coating. In this study the corrosion resistance of the $Al_2O_3$ dispersed Zn-Co-Cr electroplated steel sheet has been investigated and the results were as follows : The corrosion resistance of $Al_2O_3$ dispersed Zn-Co-Cr electroplated steel sheets was improved by increasing the contents of Co and Cr ions, and also $Al_2O_3$ powders in the bath because of the increased amount of Co, Cr and $Al_2O_3$ in deposits. In the $Al_2O_3$ dispersed Zn-Co-Cr electroplated steels sheet, the structure of deposits was changed from fine microstructure as observed in high Co containing deposits to coarse microstructure as in high Cr and $Al_2O_3$ containing deposits. By cold rolling of the $Al_2O_3$ dispersed Zn-Co-Cr electroplated steel sheets to about 2 percent, thr corrosion resistance was improved further.

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The etching properties of $Al_2O_3$ thin films in $N_2/Cl_2/BCl_3$ and Ar/$Cl_2/BCl_3$ gas chemistry (유도결합 플라즈마를 이용한 $Al_2O_3$ 식각 특성)

  • Koo, Seong-Mo;Kim, Dong-Pyo;Kim, Kyoung-Tae;Kim, Chang-Il
    • Proceedings of the KIEE Conference
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    • 2004.11a
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    • pp.72-74
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    • 2004
  • In this study, we used a inductively coupled plasma (ICP) source for etching $Al_2O_3$ thin films because of its high plasma density, low process pressure and easy control bias power. $Al_2O_3$ thin films were etched using $Cl_2/BCl_3$, $N_2/Cl_2/BCl_3$, and Ar/$Cl_2/BCl_3$ plasma. The experiments were carried out measuring the etch rates and the selectivities of $Al_2O_3$ to $SiO_2$ as a function of gas mixing ratio, rf power, and chamber pressure. When $Cl_2$ 50% was added to $Cl_2/BCl_3$ plasma, the etch rate of the $Al_2O_3$ films was 118 nm/min. We also investigated the effect of gas addition. In case of $N_2$ addition, the etch rate of the $Al_2O_3$ films decreased while $N_2$ was added into $Cl_2/BCl_3$ plasma. However, the etch rate increased slightly as Ar added into $Cl_2/BCl_3$ plasma, and then further increase of Ar decreased the etch rate. The maximum etch rate was 130 nm/min at Ar 20% in $Cl_2/BCl_3$ plasma, and the highest etch selectivity was 0.81 in $N_2$ 20% in $Cl_2/BCl_3$ plasma. And, we obtained the results that the etch rate increases as rf power increases and chamber pressure decreases. The characteristics of the plasmas were estimated using optical emission spectroscopy (OES).

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A Study on the Sulfur-Resistant Catalysts for Water Gas Shift Reaction III. Modification of $Mo/γ-Al_2O_3$ Catalyst with Iron Group Metals

  • Park, Jin Nam;Kim, Jae Hyeon;Lee, Ho In
    • Bulletin of the Korean Chemical Society
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    • v.21 no.12
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    • pp.1233-1238
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    • 2000
  • $Mo/{\gamma}-Al_2O_3catalysts$ modified with Fe, Co, and Ni were prepared by impregnation method and catalytic activity for water gas shift reaction was examined. The optimum amount of Mo loaded for the reaction was 10 wt% $MoO_3$ to ${\gamma}-Al_2O_3.$ The catalytic activity of $MoO_3/{\gamma}-Al_2O_3was$ increased by modifying with Fe, Co, and Ni in the order of Co${\thickapprox}$ Ni > Fe. The optimum amounts of Co and Ni added were 3 wt% based on CoO and NiO to 10 wt% $MoO_3/{\gamma}-Al_2O_3$, restectively. The TPR (temperature-programmed reduction) analysis revealed that the addition of Co and Ni enganced the reducibility of the catalysts. The results of both catalytic activity and TPR experiments strongly suggest that the redox property of the catalyst is an important factor in water gas shift reaction on the sulfided Mo catalysts, which could be an evidence of oxy-sulfide redox mechanism.

Thermal Expansion and Dielectric Properties of CaO-ZnO-B2O3-SiO2 Glass-Added Al2O3 Composites for LTCC Applications

  • Byeon, Tae-Hun;Park, Hyo-Sung;Shin, Hyun-Ho;Yoon, Sang-Ok;Oh, Chang-Yong
    • Journal of the Korean Ceramic Society
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    • v.47 no.4
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    • pp.325-328
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    • 2010
  • Varying quantities of a high-thermal-expansion glass, 50CaO-20ZnO-$20B_2O_3-10SiO_2$ (CZBS), were added to alumina and sintered at $875^{\circ}C$ for 2 h for low temperature co-firing ceramic (LTCC) applications. As the amount of glass addition increased from 40 wt% to 70 wt%, the apparent density of the sintered product increased from 88.8% to 91.5%, which was also qualitatively confirmed by microstructural observation. When the glass addition was very high, e.g., 70 wt%, an apparent formation of secondary phases such as $CaZn_2AlZnSiAlO_7$, $Ca_2Al(AlSi)O_7$, $Ca_2Al_2SiO_7$, $Ca_2ZnSi_2O_7$ and ZnO, was observed. Both the dielectric constant and the coefficient of thermal expansion increased with the glass addition, which was qualitatively consistent with the analytical models, while the experimental values were lower than the predicted ones due to the presence of pores and secondary phases.