• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.72-74
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• 2004

In this study, we used a inductively coupled plasma (ICP) source for etching $Al_2O_3$ thin films because of its high plasma density, low process pressure and easy control bias power. $Al_2O_3$ thin films were etched using $Cl_2/BCl_3$, $N_2/Cl_2/BCl_3$, and Ar/$Cl_2/BCl_3$ plasma. The experiments were carried out measuring the etch rates and the selectivities of $Al_2O_3$ to $SiO_2$ as a function of gas mixing ratio, rf power, and chamber pressure. When $Cl_2$ 50% was added to $Cl_2/BCl_3$ plasma, the etch rate of the $Al_2O_3$ films was 118 nm/min. We also investigated the effect of gas addition. In case of $N_2$ addition, the etch rate of the $Al_2O_3$ films decreased while $N_2$ was added into $Cl_2/BCl_3$ plasma. However, the etch rate increased slightly as Ar added into $Cl_2/BCl_3$ plasma, and then further increase of Ar decreased the etch rate. The maximum etch rate was 130 nm/min at Ar 20% in $Cl_2/BCl_3$ plasma, and the highest etch selectivity was 0.81 in $N_2$ 20% in $Cl_2/BCl_3$ plasma. And, we obtained the results that the etch rate increases as rf power increases and chamber pressure decreases. The characteristics of the plasmas were estimated using optical emission spectroscopy (OES).

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.19 no.2
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• pp.161-176
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• 2021

In this study, the electrochemical behavior of Sm on the binary liquid Al-Ga cathode in the LiCl-KCl molten salt system is investigated. First, the co-reduction process of Sm(III)-Al(III), Sm(III)-Ga(III), and Sm(III)-Ga(III)-Al(III) on the W electrode (inert) were studied using cyclic voltammetry (CV), square-wave voltammetry (SWV) and open circuit potential (OCP) methods, respectively. It was identified that Sm(III) can be co-reduced with Al(III) or Ga(III) to form Al_zSm_y or Ga_xSm_y intermetallic compounds. Subsequently, the under-potential deposition of Sm(III) at the Al, Ga, and Al-Ga active cathode was performed to confirm the formation of Sm-based intermetallic compounds. The X-ray diffraction (XRD) and scanning electron microscopy-energy dispersive spectroscopy (SEM-EDS) analyses indicated that Ga₃Sm and Ga₆Sm intermetallic compounds were formed on the Mo grid electrode (inert) during the potentiostatic electrolysis in LiCl-KCl-SmCl₃-AlCl₃-GaCl₃ melt, while only Ga₆Sm intermetallic compound was generated on the Al-Ga alloy electrode during the galvanostatic electrolysis in LiCl-KCl-SmCl₃ melt. The electrolysis results revealed that the interaction between Sm and Ga was predominant in the Al-Ga alloy electrode, with Al only acting as an additive to lower the melting point.

• Journal of Environmental Science International
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• v.18 no.5
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• pp.589-594
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• 2009

The goals of this study were conducted to investigate the effects of applying liquid aluminum chloride ($AlCl_3$) to rice hulls on pH and soluble reactive P (SRP). A total of 800 broiler chicks (4 treatments $\times$ 4 replicates $\times$ 50 birds) were housed into 16 floor pens in a single house for 5 weeks. The treatments were divided into 4 groups: control, 100 g of liquid $AlCl_3/kg$ of rice hulls, 200 g of liquid $AlCl_3/kg$ of rice hulls, and 300 g of liquid $AlCl_3/kg$ of rice hulls. Liquid $AlCl_3$ was sprayed on the rice hulls surface at a rate of 100 g, 200 g, and 300 g liquid $AlCl_3$ per kg rice hull. pH values and SRP contents were significantly decreased (P<0.05) with the increased liquid $AlCl_3$ levels in comparison with control. However, no significant differences in SRP contents were observed among all treatments at 3 and 4 weeks. Applying 100 g, 200 g, and 300 g liquid $AlCl_3$ to rice hulls reduced SRP contents by 18, 25, and 52% for 5 weeks, respectively, compared with the controls. In conclusion, these results suggest that using liquid $AlCl_3$ on rice hulls should be promising for reducing water contamination and resulted in a reduction in SRP contents, which reduced pH.

• Journal of Korean Society of Environmental Engineers
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• v.37 no.6
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• pp.325-331
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• 2015

The experimental results of the characteristics of aluminum based and ferric based coagulants for the Nakdong River water showed that the main hydrolysis species contained in alum and $FeCl_3$ are monomeric species of 98% and 93.3%, respectively. The PACl of r=1.2 produced by the addition of base contained 31.2% of polymeric Al species and the PACl of r=2.2 contained 85.0% of polymeric Al species, as showing more polymeric Al species with increasing r value. Coagulation tests using Al(III) and Fe(III) salts coagulants for the Nakdong River water showed that the coagulation effectiveness of turbidity and organic matter was high in the order of $FeCl_3$ > PACl (r=2.2) > PACl (r=1.2) > alum. $FeCl_3$ has showed better flocculation efficiency than Al(III) salts coagulants. In addition, in case of Al(III) coagulants, the Al(III) coagulants of higher basicity, which contained more polymeric Al species, resulted in better coagulation efficiency for both turbidity and organic matter removed. The optimum pH range for all of the coagulants investigated was around pH 7.0 under the experimental pH range of 4.0~9.5. Especially, the highest basicity PACl (r=2.2) and $FeCl_3$ were considered as more appropriate coagulants for the removal of turbidity in the case of raw water exhibiting higher pH.

• Korean Journal of Clinical Laboratory Science
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• v.49 no.3
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• pp.271-278
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• 2017

This study was performed to evaluate the cytotoxicity of aluminum chloride ($AlCl_3$), and the protective effect of Lonicerae flos (LF) extract on $AlCl_3-induced$ cytotoxicity in the cultured C6 glioma cells. Here, the cell viability and antioxidative effects, such as DPPH-radical scavenging activity, superoxide anion scavenging activity, and lipid peroxidation (LP), were assessed. $AlCl_3$ significantly decreased the cell viability in a dose-dependent manner; the $XTT_{50}$ value was measured at $128.8{\mu}M$ of $AlCl_3$. The cytotoxicity of $AlCl_3$ was determined as highly toxic the y Borenfreund and Puerner's toxic criteria. The butylated hydroxytoluene (BHT) and antioxidant both significantly increased the cell viability, which was damaged by $AlCl_3-induced$ cytotoxicity in these cultures. In the protective effect of LF extract on $AlCl_3-induced$ cytotoxicity, the LF extract significantly increased the superoxide anion scavenging activity and inhibitory activity of LP, as well as the DPPH-radical scavenging activity. From these results, it is suggested that the oxidative stress may have been involved in the cytotoxicity of $AlCl_3$, and LP extract effectively protected $AlCl_3-induced$ cytotoxicity through the antioxidative effects. Conclusively, the natural resources, like LP extract, may be a putative therapeutic agent for the treatment of dementia induced by allergen like aluminum correlated with the oxidative stress.

• Applied Chemistry for Engineering
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• v.8 no.5
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• pp.844-852
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• 1997

In the polymerization of ethylene to produce crystalline polyethylene wax using the homogeneous titanium-based catalyst, the effects of various parameters such as catalyst, temperature, pressure, comonomer and time on the performance of catalyst and the properties of polyethylene wax were investigated. The properties of polyethylene wax obtained were characterized in terms of molecular weight, molecular weight distribution, crystallinity, density and morphology. Among the polymerization features with a series of mixed cocatalyst systems of $(C_2H_5)_3Al$, $(i-C_4H_9)_3Al$, $(C_2H_5)_2AlCl$ and $(C_2H_5)_3Al_2Cl_3$, it turned out that the combination of $(C_2H_5)_3Al$ and $(C_2H_5)_3Al_2Cl_3$ was more effective than any other combination. It was noted that the activity of catalyst and the properties of polyethylene wax were affected by the polymerization parameters, i.e. time, temperature and hydrogen partial pressure. The various kinds of crystalline polyethylene wax could be obtained by careful control of these parameters. Also we could obtain low density polyethylene wax which has density down to 0.91 g/cc by use of 1-butene as a comonomer.

• Journal of the Korean Ceramic Society
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• v.43 no.7 s.290
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• pp.445-450
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• 2006

The preparation of AlN powder by SHS in the system of $Al-AlN-NH_4Cl$ was investigated in this study. In the preparation of AlN powder, the effect of gas pressure and the composition such as Al, AlF, and additive in mixture on the reactivity were investigated. At 60 atm of the initial inert gas pressure in reactor, the optimum composition for the preparation of pure AlN was 35 wt%Al+5 wt% $NH_4Cl+60wt%$AlN. The AlN powder synthesized in this condition was a single phase AlN with a whisker morphology.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.12
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• pp.1005-1008
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• 2009

In this study, adaptively coupled plasma (ACP) source was used for dry etching of $Al_2O_3$ thin film. During the etching process, the wafer surface temperature is an important parameter to influent the etching characteristics. Therefore, the experiments were carried out in ACP to measuring the etch rate, the selectivities of $Al_2O_3$ thin film to mask materials and the etch profile as functions of $Cl_2$/Ar gas ratio and substrate temperature. The highest etch rate of $Al_2O_3$ was 65.4 nm/min at 75% of $Cl_2/(Cl_2+Ar)$ gas mixing ratio. The etched profile was characterized using field effect scanning electron microscopy (FE-SEM). The chemical states of $Al_2O_3$ thin film surfaces were investigated with x-ray photoelectron spectroscopy (XPS).

• Applied Chemistry for Engineering
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• v.26 no.3
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• pp.366-371
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• 2015

The kinetic behavior of tetrahydrotricyclopentadiene (THTCPD) isomerization was studied by using two kinds of chloroaluminate ionic liquid (IL) catalyst with different Lewis acidity. THTCPD isomerization pathway was discussed under the different temperature and time as reaction parameters using IL catalysts consisting of 1-butyl-3-methylimidazolun chloride $(BMIC)/AlCl_3$ with low acidity and pyridine hydrochloride $(PHC)/AlCl_3$ with high acidity. The conversion of THTCPD isomerization increased with increasing Lewis acidity of IL catalyst. The THTCPD isomerization pathway changed as a function of reaction temperature and catalyst acidity. In the case of $BMIC/AlCl_3$ IL catalyst, THTCPD isomerization pathway was similar to that of using conventional $AlCl_3$ catalyst. However, two different types of additional pathways (endo, exo, endo-NB ${\rightarrow}$ exo, exo, endo-NB ${\rightarrow}$ exo, exo, exo-NB and endo, exo, endo-NB ${\rightarrow}$ exo, exo, endo-NB ${\rightarrow}$ exo, exo, exo-CP) were appeared when using $PHC/AlCl_3$ IL catalyst.

• Applied Chemistry for Engineering
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• v.26 no.2
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• pp.224-228
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• 2015

The carbon precursor pitch from pyrolyzed fuel oil (PFO), by-product of Naphta cracking process (NCC), was prepared through heat and UV irradiation treatments with various concentrations of $AlCl_3$, which is a new pitch preparation method. The reformed pitches were characterized by measuring their elemental composition, chemical structure of components, molecular weight distribution, and softening point. The oxygen contents of reformed pitch increased as increasing $AlCl_3$ amounts on the other hand, the carbon and hydrogen contents were not nearly changed. UV irradiated reformed pitches were composed of more aromatic carbon compounds than that of using only heat-treatment without any UV irradiation. The addition of $AlCl_3$ catalyst was ineffective on the aromaticity of reformed pitches. The softening point of prepared pitches was in the range of $103.3{\sim}168.9^{\circ}C$. Also the yield of prepared pitch increased from 48% to 80% when 5 wt% of $AlCl_3$ was added during the heat and UV irradiation reforming. It is expected that the UV irradiation reforming method can be practical and helpful to produce high yields of pitches with diverse properties.