• Korean Journal of Materials Research
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• v.1 no.3
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• pp.125-131
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• 1991

Boron penetration phenomenon of $p^{+}$ silicon gate with as-deposited amorphous or polycrystalline Si upon high temperature annealing was investigated using high frequency C-V (Capacitance-Volt-age) analysis, CCST(Constant Current Stress Test), TEM(Transmission Electron Microscopy) and SIMS(Secondary Ion Mass Spectroscopy), C-V analysis showed that an as-deposited amorphous Si gate resulted in smaller positive shifts in flatband voltage compared wish a polycrystalline Si gate, thus giving 60-80 percent higher charge-to-breakdown of gate oxides. The reduced boron penetration of amorphous Si gate may be attributed to the fewer grain boundaries available for boron diffusion into the gate oxide and the shallower projected range of $BF_2$ implantation. The relation between electron trapping rate and flatband voltage shift was also discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.416-416
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• 2010

본 연구에서는 저가격, 대면적화를 위한 롤투롤 스퍼터를 설계&개발하고, 성막직전 PET 기판의 열처리 유무를 통한 ITO 박막을 성막 시킨 저항막 방식의 터치 패널용 투명 전극에 대하여 전기적, 광학적, 구조적, 표면적 특성을 분석하였다. 롤투롤 스퍼터는 degassing챔버와 스퍼터 챔버가 한 시스템에 구성되었고, Degassing 챔버는 좌우측의 Rewinder/Unwinder 롤러에 의해 감고 풀어지는 PET기판의 수분 및 가스를 중앙부에 위치한 히터를 통해 제거하며, 수분 제거 후 스퍼터 챔버로 옮겨진 1250 mm폭의 PET기판을 Unwinder/Rewinder 롤러에 장착하며, Unwinder 롤러로부터 풀려진 PET 기판은 guide 롤러를 거쳐 cooling drum과의 물리적 접촉에 의해 PET 기판의 냉각이 일어나게 된다. ITO 캐소드 전에 장착된 할로겐 히터 상부로 기판이 지나가면서 열처리가 진행되고 열처리 후 두 개의 ITO 캐소드 상부를 지나면서 연속적으로 ITO 박막이 PET 기판에 성막 되게 된다. ITO 박막의 주요 성막 변수인 DC Power, Ar/$O_2$ 가스 유량비, 기판의 속도는 최적으로 고정하고, 성막 직전 기판의 열처리에 유무에 따른 ITO박막의 필름을 각각 고온 챔버에서 $140^{\circ}C{\times}90min$ 동안 열처리를 통한 내열성 테스트를 진행하여 ITO 필름의 특성 향상을 비교 분석하였다. 분석을 위해 전기적 특성은 four-point probe로 측정했고, 투과도는 Nippon Denshoku사(社)의 COH-300A를 이용해 가시광(550nm)에서 분석했고, FE-SEM으로 ITO박막 의 표면 상태를 분석하였다. 또한 Bending Tester(Z-100)를 이용하여 기계적 안정성을 분석하였다. 성막직전 PET 기판의 열처리를 하지 않은 ITO박막은 고온의 챔버 에서 $140^{\circ}C{\times}90min$ 동안 내열성 테스트 후 면저항이 511($\omega/\Box$)에서 630($\omega/\Box$)으로 높아졌으나, 성막직전 열처리를 통한 ITO 박막인 경우에는 465($\omega/\Box$)에서 448($\omega/\Box$)로 안정화 되었고, 투과율은 성막직전 열처리를 통해 1%향상되어 89%를 보였고, 유연성 또한 보다 우수한 특성을 보였다. 표면 조도는 평균 0.416 nm의 낮은 값을 보였다. 이는 PET 기판의 degassing 공정 중 충분히 제거되지 않은 가스나 불순물을 성막직전 열처리 공정으로 충분히 제거하여 깨끗한 PET 기판 상에 ITO 박막을 성막시키고, 열처리시 기판에 주어진 열에너지에 의해 보다 밀도가 높은 ITO 박막이 성장했기 때문으로 사료 된다.

• KSBB Journal
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• v.9 no.2
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• pp.211-223
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• 1994

In fermentations with a 4-liter stirred tank bioreactor, a better than two-fold enhancement of the gas-liquid mass transfer coefficient$(k_La)$ in the celite-immobilized fungal cultures of Tolypocladium in flatum over the parallel conventional free-cell was observed at identical biomass concentrations, despite the higher specific oxygen uptake rate of the immobilized fungi during exponential growth. As a result oxygen sufficient conditions, i. e., dissolve oxygen(D.O.) concentrations exceeding 75% air saturation, could be maintained throughout exponential growth period of the immobilized culture, in contrast to the suspended fungal culture, whose D.O. levels fell below 50% air saturation. A linear monotonic dependence of $k_La$ upon impeller agitaion rate was found for both immobilized and conventional cultivation modes over a range of 250 to 550rpm, the slope being a function of biomass concentration for the free but not for the immobilized cell system In contrasts oxygen transfer rate was a much weaker function of aeration rate up to about 2.5 vvm for both culture configurations. Above this level, aeration rate had no further effect on the mass transfer. In addition, the immobilized cultures sustained good morphological and physiological states, leading to almost two times higher cyclosporln A (CyA) productivity overt the parallel free cell system. These experiments suggest that the celite-immobilized fungal system in a stirred tank reactor has considerable promise for scaling up cyclosporin A production in terms of high-density cultivation.

• Korean Journal of Soil Science and Fertilizer
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• v.28 no.4
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• pp.350-355
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• 1995

This study was conducted to use oyster shells, which have caused environmental problems in the coastal of Korea, as an agricultural material after processing. Physico-chemical components and neutralizing amount on the Ihyun silt loam of crushed oyster shell and slaked lime were examined. In field experiment, the properties of the soil, growth and yield of lettuce, cabbage, spinach, onion, red pepper and soybean were examined by the treatments of the shell(3.68ton/ha) or the lime (2.76ton/ha) with a randomized block design. Particle size of crushed oyster shell consisted of 73.4% of 1~60mesh and 26.6% larger then 61 mesh and contents of CaO, OM, and $P_2O_5$, etc. were 55.5%, 1.3%, and 0.29%, respectively. The requirement of the shell to neutralize the soil was 130~135% of the lime, but after 24months, it was the same. The application of the shell increased the contents of available $P_2O_5$ and $SiO_2$ exchangeable Ca in used soil. The shell tratment increased the leaf height, leaf width, etc. of the examined plants, and the yields 6~154% according to examined plants, as compared with the nonliminged, indicating that the shell possesses a great potential as an agricultural material with the same effectiveness as the lime.

• Resources Recycling
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• v.13 no.2
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• pp.9-15
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• 2004

A large tons of spent iron oxide catalyst come from the Styrene Monomer(SM) production company. It is caused to pollute the land and underground water due to the high alkali contents in the catalyst by burying them in the landfill. In order to recycle the spent catalyst, a basic study on the recovery of chromium ion from metal plating wastewater with the spent catalyst was carried out. The iron oxide catalyst adsorbed physically $Cr^{+6}$ in the lower pH 3.0, that is the isoelectric point of the spent catalyst. It was found that the iron oxide catalyst reduced the $Cr^{+6}$ into Cr+3 by the oxidation of ferrous ion into ferric ion on the surface of catalyst, and precipitated as $Cr(OH)_3$ in the higher than pH 3.0. The $Cr^{+6}$ was recovered 2.0∼2.3g/L catalyst in the range of pH 0.5∼2.0, but it was recovered 1.5 g/L catalyst at pH 3.0 of wastewater. The recovery of Cr was increased as the higher concentration in the continuous process, but the flowrates were nearly affected on the Cr recovery.

• Applied Chemistry for Engineering
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• v.30 no.4
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• pp.460-465
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• 2019

In this study, the optimization of active materials and the preparation of particulate adsorbents for the application of metal oxide-based adsorbents for the treatment of $H_2S$, an air pollutant and odorant, occurred in various industrial facilities were investigated. The adsorbents were prepared by using $TiO_2$, which has a high physicochemical stability and relatively high specific surface area among metal oxides and also by different kinds and contents of active materials. The correlation between the physicochemical property and adsorption performance of the adsorbents confirmed that the adsorbent containing KI, which is a typical alkali metal among the active metals, showed the highest adsorption performance. The relationship between the contents and the adsorption performance was non-proportional, but a volcano plot. From XRD, SEM and BET analyses, it was confirmed that the active material was exposed to the surface above a certain amount and also the adsorption performance was the best when the specific surface area and pore volume were $40{\sim}100m^2/g$ and $0.1{\sim}0.3cm^3/g$, respectively. For practical application, the adsorbent was granulated or coated on a ceramic support. It was also confirmed that the adsorbent showed high adsorption performance when the adsorbent was coated on the ceramic rather than that of the granulated support.

• Progress in Superconductivity and Cryogenics
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• v.1 no.2
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• pp.1-7
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• 1999

we evaluated the effects of joining process such as contact method. shape of joined area and pressure on the electrical and mechanical properties of Bi-2223 superconducting tape, Specifically. the current capacity of the jointed tape was measured as a function of uniaxial pressure. and the thermal shock, bonding strength and the thermal of the tape were evaluated and correlated to the microstructural evolution. It was observed that the current capacity was significanrly dependent on the uniaxial pressure The jointed tape, fabricated with a pressure of 1,000-1,600 Mpa. showed the highest value of current capacity results from improvements in core density, contacting area and grain alignment, ect. In addition, the strength of jointed tape was measured to be 86 Mpa, which is about 88% of the unjoined ape's strength. The irreversible strain($\varepsilon$irrev) for the jointed tape was measured to be 0.1%, smaller than that of unjoined tape ($\varepsilon$irrev= 0.3%). The decrease in the strength and irreversible strain for jointed tape is believed to be due to the irregular geometry/morphology of the transition area of the tape.

• Journal of Korean Society of Water and Wastewater
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• v.25 no.3
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• pp.399-405
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• 2011

In a desalination technology using RO membranes, chemical cleaning makes damage for membrane surface and membrane life be shortened. In this research cleaning technology using direct osmosis (DO) was introduced to apply it under the condition of high pH and high concentration of feed. When the high concentration of feed is injected to the concentrate side after release of operating pressure, then backward flow occurred from treated water toward concentrated for osmotic pressure. This flow reduces fouling on the membrane surface. Namely, flux of DO was monitored under pH 3, 5, 10 and 12 conditions at feed concentrations of NaCl 40,000 mg/L, 120,000 mg/L and 160,000 mg/L. As a result, DO flux in pH 12 increased about 21% than pH 3. DO cleaning was performed under the concentrate NaCl 160,000 mg/L of pH 12 during 20 minutes. Three kinds of synthetic feed water were used as concentrates. They consisted of organic, inorganic and seawater; chemicals of SiO2 (200 mg/L), humic acid (50 mg/L) sodium alginate (50 mg/L) and seawater. As a result, fluxes were recovered to 17% in organic fouling, 15% in inorganic fouling and 14% of seawater fouling after cleaning using DO under the condition of concentrate NaCl 160,000 mg/L of pH 12.

• Journal of Environmental Science International
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• v.9 no.3
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• pp.261-266
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• 2000

A kinetic study for nitrate removal by anion exchange resin was performed using continuous column reactors. Kinetic approach from the packed bed showed the reaction rate constant k$_1$ was 0.07~0.17 $\ell$/mgㆍhr and maximum exchange quantity q$_{o}$ was 27.75~31.81 mg/g. The results from the continuous column well agreed with that from the batch reactor. An economic analysis of the water treatment plant by anion exchange resin with a regenerating system was performed to design plant and process. Based on the treatment of 20 mg/$\ell$ nitrate-contained wastewater of 10,000 gallons per day to 2 mg/$\ell$, total capital cost and total annual cost are estimated to be 836 million wons and 211 million wons, respectively.y.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.149-153
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• 2003

Chemical mechanical polishing (CMP) technology for global planarization of multi-level inter-connection structure has been widely studied for the next generation devices. CMP process has been paid attention to planarized pre-metal dielectric (PMD), inter-layer dielectric (ILD) interconnections. Expecially, shallow trench isolation (STI) used to CMP process on essential. Recently, the direct STI-CMP process without the conventional complex reverse moat etch process has established by using slurry additive with the high selectivity between $SiO_2$ and $Si_3N_4$ films for the purpose of process simplification and n-situ end point detection(EPD). However, STI-CMP process has various defects such as nitride residue, tom oxide and damage of silicon active region. To solve these problems, in this paper, we studied the planarization characteristics using a high selectivity slurry(HSS). As our experimental results, it was possible to achieve a global planarization and STI-CMP process could be dramatically simplified. Also we estimated the reliability through the repeated tests with the optimized process conditions in order to identify the reproducibility of HSS STI-CMP process.