• 한국진공학회지
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• 제12권2호
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• pp.123-129
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• 2003

다공질 실리콘(PS)기판 위에 rf-스퍼터링법으로 10~40 nm의 두께의 반 투과성 구리박막을 증착하였다. PS는 p형 (100) 실리콘 웨이퍼를 기판으로 50㎃/$\textrm{cm}^2$의 전류밀도를 사용하여 전해 에칭법으로 양극 산화하여 제작하였다. PS층과 Cu박막의 미세구조를 분석하기 위하여 SEM, AFM 그리고 XRD 분석을 시행하였다. AFM 분석결과 Cu 박막의 RMS roughness 값은 약 1.47nm로 Volmer-Weber 유형의 결정립 성장을 보였으며, 결정립의 성장은 (111) 배향성을 나타냈다. PS층의 PL 스펙트럼은 blue green 영역에서 관찰되었고, Cu 박막 증착 후 0.05eV의 blue shift가 나타났으며, 약간의 강도저하를 보였다. PS/Cu접합구조의 FTIR스펙트럼은 주 피크변화는 없으나 전반적인 강도의 감소를 보였다. I-V 특성곡선으로 본 PS/Cu 접합구조는 ideality factor가 2.77이고 barrier의 높이가 0.678eV인 Schottky 유형의 다이오드 특성을 보였다. PS/Cu 접합구조로 만든 다이오드 제조로 EL특성을 관찰할 수 있었다.

• 폴리머
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• 제38권3호
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• pp.358-363
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• 2014

원자력현미경(AFM) tip을 표면 처리하여 임프린트용 acrylate 레진과의 접착력을 측정하였다. 표면 처리를 하지 않은 실리콘 tip에 비하여 $CH_4$ 플라즈마로 소수성 처리한 경우 접착력은 38% 감소한 반면 친수성의 $O_2$ 플라즈마로 처리한 경우에는 접착력이 1.6 배 증가하였다. 이러한 AFM 결과들은 정성적 실험 결과 밖에 얻을 수 없는 cross-cut 접착실험에 비하여 매우 구체적인 정량적 결과들을 제공하였다. 나노 크기의 임프린트 패턴을 전사하는 경우, 몰드와 레진 사이 접촉 면적이 커져서 시료 전체의 접착력이 커지기 때문에 패턴 크기가 작아지는 나노임프린트 공정에서는 몰드 표면 처리 문제가 더욱 중요하게 되는 것을 알 수 있었다.

• 한국정밀공학회지
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• 제14권9호
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• pp.146-154
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• 1997

Ion implantation has been used successfully as a surface treatment technology to improve the wear. fatigue and corrosion resistances of materials. A modified surface layer by ion implantation is very thin(under 1 m), but it has different mechanical properties from the substrate. It has also different wear characteristics. Since wear is a dynamic phenomenon on interacting surfaces with relative motion, an effective method for investigtating the wear of a thin layer is the observation of wear process in microscopic detail using in-situ system. The change of wear properties produces the transition of wear mode. To know the microscopic wear mechanism of this thin layer, it is very important to clarify its microscopic wear mode. In this paper, using the SEM and AFM Rribosystems as in-situ system, the microscopic wear of Ti ion-implanted 1C-3Cr steel, a material for roller in the cold working process, was investigated in repeated sliding. The depth of wear groove and the speciffc wear amount were changed with transition of microscopic wear mode. The depth of wear groove with friction cycles in AFM tribosystem and specific wear amount of Ti ion-implanted 1C-3Cr steel were less about 2-3 times than those of non-implanted 1C-3Cr steel. The microscopic wear mechansim of Ti ion-implanted 1C-3Cr steel was also clarified. The microscopic wear property was quantitatively evaluated in terms of microscopic wear mode and specific wear amount.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.218-218
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• 2012

Recently, hexagonal manganites have attracted much attention because of the coexistence of ferroelectricity and antiferromagnetic (AFM) order. The crystal structure of hexagonal manganites consists of $MnO_5$ polyhedra in which $Mn^{3+}$ ion is surrounded by three oxygen atoms in plane and two apical oxygen ions. The Mn ions within Mn-O plane form a triangular lattice and couple the spins through the AFM superexchange interaction. Due to incomplete AFM coupling between neighboring Mn ions in the triangular lattice, the system forms a geometrically-frustrated magnetic state. Among hexagonal manganites, $YMnO_3$, in particular, is the best known experimentally since the f states are empty. In addition, for applications, $YMnO_3$ thin films have been known as promising candidates for non-volatile ferroelectric random access memories. However, $YMnO_3$ has low magnetic order temperature (~70 K) and A-type AFM structure, which hinders its applications. We have synthesized $YMn1_{-x}Cr_xO_3$ (x = 0, 0.05 and 0.1) samples by the conventional solid-state reaction. The powders of stoichiometric proportions were mixed, and calcined at $900^{\circ}C$ for $YMn1_{-x}Cr_xO_3$ for 24 h. The obtained powders were ground, and pressed into 5-mm-thick disks of 1/2-inch diameter. The disks were directly put into the oven, and heated up to $1,300^{\circ}C$ and sintered in air for 24 h. The phase of samples was checked at room temperature by powder x-ray diffraction using a Rigaku Miniflex diffractometer with Cu $K{\alpha}$ radiation. All the magnetization measurements were carried out with a superconducting quantum-interference-device magnetometer. Our experiments point out that the Cr-doped samples show the characteristics of a spin-glass state at low temperatures.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.73-75
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• 2013

Atomic force microscopy (AFM) [1] can now not only image individual atoms but also construct atom letters using atom manipulation method [2]. Therefore, the AFM is the second generation atomic tool following the well-known scanning tunneling microscopy (STM). The AFM, however, has the advantages that it can image even insulating surfaces with atomic resolution and also measure the atomic force itself between the tip-apex outermost atom and the sample surface atom. Noting these advantages, we have been developing a novel bottom-up nanostructuring system, as shown in Fig. 1, based on the AFM. It can identify chemical species of individual atoms [3] and then manipulate selected atom species to the designed site one-by-one [2] to assemble complex nanostructures consisted of many atom species at room temperature (RT). In this invited talk, we will introduce our results toward atom-by-atom assembly of composite nanomaterials based on the AFM at RT. To identify chemical species, we developed the site-specific force spectroscopy at RT by compensating the thermal drift using the atom tracking. By converting the precise site-specific frequency shift curves, we obtained short-range force curves of selected Sn and Si atoms as shown in Fig. 2(a) and 2(b) [4]. Then using the atom-by-atom force spectroscopy at RT, we succeeded in chemical identification of intermixed three atom species in Pb/Sn/Si(111)-(${\surd}3$'${\surd}3$) surface as shown in Fig. 2(c) [3]. To create composite nanostructures, we found the lateral atom interchange phenomenon at RT, which enables us to exchange embedded heterogeneous atoms [2]. By combining this phenomenon with the modified vector scan, we constructed the atom letters "Sn" consisted of substitutional Sn adatoms embedded in Ge adatoms at RT as shown in Fig. 3(a)~(f) [2]. Besides, we found another kind of atom interchange phenomenon at RT that is the vertical atom interchange phenomenon, which directly interchanges the surface selected Sn atoms with the tip apex Si atoms [5]. This method is an advanced interchangeable single atom pen at RT. Then using this method, we created the atom letters "Si" consisted of substituted Si adatoms embedded in Sn adatoms at RT as shown in Fig. 4(a)~(f) [5]. In addition to the above results, we will introduce the simultaneous evaluation of the force and current at the atomic scale using the combined AFM/STM at RT.

• 콘크리트학회논문집
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• 제27권1호
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• pp.85-92
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• 2015

콘크리트 내 염소이온은 콘크리트 내부로 침투하여 철근부식을 일으키는 주요 요인이다. 그런데 내재된 염소이온의 일부는 시멘트의 수화물과 반응하여 물리 또는 화학적 흡착을 유발하여 침투속도는 느려진다. 이때 시멘트의 수화물이 염소이온의 고정화에 영향을 미치는 요인이므로, 본 논문은 독립적인 시멘트 수화물에서 염소의 흡착에 대하여 초점을 두어 연구하였다. 본 연구의 목적은 시멘트 수화물이 염소이온을 흡착하는 시간의존적 거동을 고찰하여 염소이온 고정화의 메커니즘을 구명하는 것이다. 시멘트 수화물 중 AFt 상과 CH 상은 염소이온을 흡착하지 못하였으나 C-S-H 상과 AFm 상은 염소 흡착능력을 갖고 있는 것으로 나타났다. 특히, AFm 상은 40일 동안 느린 속도로 화학적 흡착 거동을 보인 반면, C-S-H 상은 순간적 물리흡착, 물리화학적 흡착, 그리고 화학적 흡착의 3단계로 구분되어 순차적인 흡착거동을 보였다. 반응 실험결과를 토대로, C-S-H 상과 AFm 상의 흡착 거동 해석기법이 제안되었다. 본 연구는 염소이온의 도입원에 따른 흡착 메커니즘을 이해를 토대로, 염소이온의 도입원에 따른 염소이온의 침투속도를 산정하는데 활용될 수 있을 것으로 기대된다.

• 마이크로전자및패키징학회지
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• 제7권1호
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• pp.35-40
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• 2000

Teflon-like fluorocarbon thin film was deposited on various substrates by vapor deposition using PFDA (perfluorodecanoic acid). The fluorocarbon films were characterized by static/dynamic contact angle analysis, VASE (Variable-angle Spectroscopic Ellipsometry) and AFM/LFM (Atomic/Lateral Force Microscopy). Based on Lewis Acid/Base theory, the surface energy ($S_{E}$) of the films was calculated by the static contact angle measurement. The work of adhesion (WA) between de-ionized water and substrates was calculated by using the static contact data. The fluorocarbon films showed very similar values of the surface energy and work of adhesion to Teflon. All films showed larger hysteresis than that of Teflon. The roughness and relative friction force of films were measured by AFM and LFM. Even though the small reduction of surface roughness was found on film on $SiO_2$surface, the large reduction of relative friction farce was observed on all films. Especially the relative friction force on TEOS was decreased a quarter after film deposition. LFM images showed the formation of "strand-like"spheres on films that might be the reason far the large contact angle hysteresis.

• Journal of Magnetics
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• 제21권2호
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• pp.159-163
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• 2016

Antiferromagnet (AFM)/ferromagnet (FM) bilayer structures are widely used in the magnetic devices of sensor and memory applications, as AFM materials can induce unidirectional anisotropy of the FM material via exchange coupling. The strength of the exchange coupling is known to be sensitive to quality of the interface of the AFM/FM bilayers. In this study, we utilize proton irradiation to modify the interface structures and investigate its effect on the magnetic properties of AFM/FM structures, including the exchange bias and magnetic thermoelectric effect. The magnetic properties of IrMn/CoFeB structures with various IrMn thicknesses are characterized after they are exposed to a proton beam of 3 MeV and $1{\sim}5{\times}10^{14}ions/cm^2$. We observe that the magnetic moment is gradually reduced as the amount of the dose is increased. On the other hand, the exchange bias field and thermoelectric voltage are not significantly affected by proton irradiation. This indicates that proton irradiation has more of an influence on the bulk property of the FM CoFeB layer and less of an effect on the IrMn/CoFeB interface.

• Macromolecular Research
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• 제12권1호
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• pp.134-140
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• 2004

Semi-crystalline poly(ethylene terephthalate) (PET) film surfaces were modified with argon and oxygen plasmas by radio-frequency (RF) glow discharge at 240 mTorr/40 W; the changes in topography and surface structure were investigated by atomic force microscopy (AFM) in conjunction with specular reflectance of infrared microspectroscopy (IMS). Under our operating conditions, analysis of the AFM images revealed that longer plasma treatment results in significant ablation on the film surface with increasing roughness, regardless of the kind of plasma used. The basic topographies, however, were different depending upon the kind of gas used. The specular reflectance analysis showed that the ablative mechanisms of the argon and oxygen plasma treatments are entirely different with one another. For the Ar-plasma-treated PET surface, no observable difference in the chemical structure was observed before and after plasma treatment. On the other hand, the oxygen-plasma-treated PET surface displays a significant decrease in the number of aliphatic C-H groups. We conclude that a constant removal of material from the PET surface occurs when using the Ar-plasma, whereas preferential etching of aliphatic C-H groups, with respect to, e.g. , carbonyl and ether groups, occurs upon oxygen plasma.

• 반도체디스플레이기술학회지
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• 제14권4호
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• pp.1-7
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• 2015

People are always pursuing the aesthetic feeling relentlessly. But some people have such problems with their hairs like alopecia, cancer chemotherapy, burns, and scalp injury. So the synthetic hair has played a very important role to make up for these deficiencies. But long term use can lead to adverse reactions or uncomfortable feeling. This is primarily caused by its properties differ with human hair. In particular, nanotribological characterizations (roughness, friction force and adhesive force) of synthetic hair surface are dissatisfy with the needs of normal hairs. This paper presents the experiments on nanotribological characterizations measurements of human hairs (coloring hair, permed hair and common hair) in shampooing condition or without shampooing condition. Using atomic force microscopy (AFM) to find out a range of synthetic hair nanotribological characterizations which can correspond with natural hair. The measurements of nanotribological characterizations focus on surface roughness, friction force and adhesive force, and a new design of AFM probe was used for measuring the nanotribological characterizations.