Application of MEMS to biologic system mainly categorized into bio-electronics and micro-medical systems, Bio-electronics concerns on the biocompatible electronic device, in-vivo sensors, the sensors based on biological materials, biological materials for electronics and optics, the concepts and materials Inspired by biology and useful for electronics, the algorithm inspired by biology, artificial sense, and the biologic-inorganic hybrids. Micro-medical systems are utilited into the drug delivery systems, micro patient monitoring systems, micro prosthesis and artificial organs, cardiology related prothesis, analysis systems, and the minimal invasive surgery tools based on the m icrom achining technology.