참고문헌
- Proceeding of the International School of Physics Course CXXⅧ The LIGA process : a Microfabrication Technology with Applications in Medical Devices J. Mohr;E. Burattini(ed.);A. Balerna(ed.)
- SPIE v.1465 X-ray Lithography - An Overview J.R. Maldonado
- Microelectronic Engineering v.4 Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic molding(LIGA process) E.W.Becker;W.Ehrfeld;P.Hagmsnn;A.Maner;D.Munchmeyer
- Electrochimica Acta v.39 no.8/9 New microelectrodes for the investigation of the electroforming of LIGA microstructure K.Leyendecker;W.Bacher;W.Stark;A.Thommes
- J. Microelectromechanical Systems v.4 no.2 Fabrication of Metallic Microstructure by electroplating using deep-etched silicon molds D.Sander;R.Hoffmann;V.Relling;J.Muller
- Materials Science and Technology v.11 no.3 Physical properties and structure of electrodeposited nickel form sulphamate-chloride-ethyleneglycol bath V.B.Singh;R.S.Sarabi