In this paper, in order to reduce the high COO (cost of ownership) and COC (cost of consumables), we have collected the silica abrasive powders by filtering method after subsequent CMP (chemical mechanical polishing) process for the purpose of abrasives recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size distribution and FE-SEM (field emission-scanning electron microscope) measurements of abrasive powders. It was annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable rate of removal and good planarity with commercial products. Consequently we can expect the saving of high cost slurry.

In this paper, thermal and structural properties of epoxy/elastomer blend were measured by DSC, TGA and FESEM. Specimens were made of dumbbell forms by the ratio of 5, 10, 15, and 20[phr] by changing elastomer content. The measuring temperature ranges of DSC were from -20[℃] to 150[℃] and heating rate was 4[℃/min]. And the measuring temperature ranges of TGA were from 0[℃] to 800[℃], and heating rate was 5[℃/min]. Also we observed structure of specimens through FESEM with magnification of 1000 times and voltage of 15[kV] by breaking quenched specimens. As experimental results, we could know that thermal and structural properties were improved according to decrease of elastomer content. Because it increased glass transition temperature, high temperature and structure of elastic epoxy.

SiO₂ thin films are fabricated using sol-gel method and dipping method. Gelation time is faster according to increasing the amount of H₂O except H₂O/Si(OC₂H/sub 5/)₄=4. Initial viscosity is highest at H₂O/Si(OC₂H/sub 5/)₄=6. Gelation time is faster according to increasing the amount of CH₃COOH. The relative dielectric constant of thin films decreases a little according to increasing the measuring frequency. The dielectric dissipation factor of thin films increases a little below 100kHz and it increases rapidly over 100kHz.

Pulse modulation technique provide additional controling method for electron temperature and density in rf and microwave processing plasma. Transient characteristics of electron density and temperature have been measured in pulse modulated rf inductively coupled argon plasma using simple probe circuit. Electron temperature relaxation is clearly identified in the after glow stage. Controllability of average electron temperature and density depends on the modulation frequency and duty ratio. Numerical calculation of time-dependent electron density and temperature have been performed based on the global model. It has been shown that simple langmuir probe measurement method used for continuous plasma is also applicable to time-dependent measurement of pulse modulated plasma.

Various devices for diagnosing arrester soundness are suggested, and most of them simply measure magnitude of leakage current. However, such kind of devices do not provide detailed information needed for the diagnosis. In this study, we designed and fabricated a new arrester analyzer by means of measuring the magnitude, the phase vs. wave height and the harmonics of total leakage currents. The analyzer is composed of a current detector, an optical linker, and a main device operated by a microprocessor. The main device is connected with leakage current detector optically not to be influenced by electromagnetic interference. The analyzer developed measures only total leakage currents, but analyzes most parameters needed for the arrester diagnostics.

In this paper, lumped equivalent circuits for a conventional parallel directional coupler are proposed. This equivalent circuits only have self inductance and self capacitance, so we can design exact lumped equivalent circuit. The equivalent circuit and design formula for the presented lumped element coupler is derived based on the even- and odd-mode properties of parallel-coupled line. By using the derived design formula, we have designed the 3dB and 4.7dB MMIC couplers at the center frequency of 3.4GHz and 5.6GHz respectively. Measurements for the designed MMIC directional couplers show at 4dB and 5.2dB-coupling value at the center frequency of 3.4GHz and 5.6GHz. Excellent agreements between simulation results and measurement results on the designed directional couplers show the validity of this paper

We stabilized the frequency and power of a high voltage excited CW CO2 laser on the peak of the Doppler broadened gain curve using the photoacoustic effect generated from the laser itself. The photoacoustic signal is directly coupled from an radio frequency discharge chamber via a capacitor microphone into a detector and a lock-in stabilizer. The frequency stability is estimated to be better then 1.2×10/sup -7/ at the transition P(20) line. The stabilized output power variation was reduced to from 77 % to 3.3 %.