과제정보
이 논문은 한국연구재단(NRF, 과제번호 2020M3H4A3106001, 과제고유번호 1711127315, 과제명 "초미세 공정용 오염입자 저감 내플라즈마 코팅소재 개발")과 한국산업기술진흥원(KIAT, 과제번호 P0023759, 과제고유번호 1415189568, 과제명 "석영유리 대비 3배 이상 내 플라즈마성이 높은 저융점 무알칼리 비정질소재 개발")로부터 지원을 받아 연구되었습니다.
참고문헌
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