과제정보
본 연구는 산업통상자원부에서 실시하는 우수기업연구소육성사업(ATC+)으로 진행되었으며 이에 감사드립니다(과제번호: 20018017).
참고문헌
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- T. Baker, A. Mayo, Z. Veisi, P. Lu and J. Schemitt, "High temperature HVPE of AlN on sapphire templates", Physica Status Solidi 11 (2014) 373.
- S.M. Kang and G.P. Yin, "A study on the growth morphology of AlN single crystal according to the change in temperature using HVPE method", J. Korean Cryst. Growth and Cryst. Tech. 34 (2024) 36.
- S.M. Kang and G.P. Yin, "A study on the growth behavior of AlN single crystal according to the change of N2 in HVPE propcess", J. Korean Cryst. Growth and Cryst. Tech. 34 (2024) 61.