Journal of the Korea Organic Resources Recycling Association (유기물자원화)

Korea Organic Resources Recycling Association (유기성자원학회)
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Study of the Sludge Formation Mechanism in Advanced Packaging Process and Prevention Method for the Sludge

어드밴스드 패키징 공정에서 발생할 수 있는 슬러지의 인자 확인 및 형성 방지법의 제안

  • Jiwon Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Suk Jekal (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Ha-Yeong Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Min Sang Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Dong Hyun Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Chan-Gyo Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Yeon-Ryong Chu (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Neunghi Lee (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Chang-Min Yoon (Department of Chemical and Biological Engineering, Hanbat National University)
  • 김지원 (한밭대학교 화학생명공학과) ;
  • 제갈석 (한밭대학교 화학생명공학과) ;
  • 김하영 (한밭대학교 화학생명공학과) ;
  • 김민상 (한밭대학교 화학생명공학과) ;
  • 김동현 (한밭대학교 화학생명공학과) ;
  • 김찬교 (한밭대학교 화학생명공학과) ;
  • 추연룡 (한밭대학교 화학생명공학과) ;
  • 이능히 (한밭대학교 화학생명공학과) ;
  • 윤창민 (한밭대학교 화학생명공학과)
  • Received : 2023.02.16
  • Accepted : 2023.03.05
  • Published : 2023.03.30
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Abstract

In this study, the sludge formation in the wastewater drain from the advanced packaging process mechanisms are revealed as well as the key factors, materials, and sludge prevention methods using surfactant. Compared with that of conventional packaging process, advanced packaging process employ similar process to the semiconductor fabrication process, and thus many processes may generate wastewater. In specific, a large amount of wastewater may generate during the carrier wafer bonding, photo, development, and carrier wafer debonding processes. In order to identify the key factors for the formation of sludge during the advanced packaging process, six types of chemicals including bonding glue, HMDS, photoresist (PR), PR developer, debonding cleaner, and water are utilized and mixing evaluation is assessed. As a result, it is confirmed that the black solid sludge is formed, which is originated by the sludge seed formation by hydrolysis/dehydration reaction of HMDS and sludge growth via hydrophobic-hydrophobic binding with sludge seed and PR. For the sludge prevention investigation, three surfactants of CTAB, PEG, and shampoo are mixed with the key materials of sludge, and it is confirmed that the sludge formations are successfully suppressed. The underlying mechanism behind the sludge formation is that the carbon tails of the surfactant bind to PR with hydrophobic-hydrophobic interaction and inhibit the reaction with HMDS-based slurry seeds to prevent the sludge formation. In this regard, it is expected that various problems like clogging in drains and pipes during the advanced packaging process may effectively solve by the injection of surfactants into the drains.

본 연구에서는 어드밴스드 패키징 공정 중에 배관과 드레인에서 발생하는 슬러지의 형성 인자 및 메커니즘을 확인하고 계면활성제를 활용한 슬러지 방지법에 대해 제안하고자 하였다. 어드밴스드 패키징 공정은 기존의 컨벤셔널 패키징 공정과 다르게 전공정(Fabrication)에서 진행되는 공정들이 동일하게 적용되기에 폐액이 발생할 수 있는공정들이 다수 존재한다. 상세히는, 캐리어 웨이퍼 본딩, 포토, 현상, 및 캐리어 웨이퍼 디본딩 공정에서 다량의 폐액들이 발생하게 된다. 어드밴스드 패키징 공정의 폐액에서 슬러지가 형성되는 주요 인자를 확인하기 위해 6종의 화학 소재들인 Bonding glue, HMDS, Photoresist, PR developer, Debonding cleaner 및 수분을 활용하여 혼합 평가를 진행하였다. 그 결과, 검은색의 고체 슬러지가 형성이 됨을 확인할 수 있었으며, 이는 HMDS의 가수화/탈수 반응을 통한 Sludge seed의 제공 및 PR과의 소수성-소수성 결합을 통해 슬러지가 성장에 의한 것으로 추정된다. 이러한, 슬러지의 형성을 방지하기 위해 3종의 계면활성제들인 CTAB, PEG 및 샴푸를 슬러지의 주요 인자들과 함께 혼합한 결과, 슬러지가 형성되지 않았음을 확인할 수 있었다. 이는, 계면활성제의 탄소꼬리들이 PR과 소수성-소수성 결합하여 HMDS 기반의 Sludge seed와의 반응 및 슬러지의 형성을 억제하기 때문이다. 따라서, 계면활성제의 드레인 투입을 통해 어드밴스드 패키징 공정 중에 발생할 수 있는 슬러지의 형성 억제를 진행하여 드레인과 배관에서의 막힘과 같은 다양한 문제들을 해결할 수 있을 것으로 기대한다.

Keywords

Acknowledgement

본 과제(결과물)는 2022년도 교육부의 재원으로 한국연구재단의 지원을 받아 수행된 지자체 대학 - 협력기반 지역혁신 사업의 결과입니다.(2021RIS-004)

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