Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지
DOI QR코드

DOI QR Code

Effect of fluorine gas addition for improvement of surface wear property of DLC thin film deposited by using PECVD

PECVD를 이용한 DLC 박막의 표면 마모 특성 향상을 위한 플루오린 첨가의 영향

  • Received : 2021.12.13
  • Accepted : 2021.12.30
  • Published : 2021.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

In this study, DLC films deposited by PECVD were evaluated to the properties of super-hydrophobic by CF4 treatment. The structure of DLC films were confirmed by Raman Spectra whether or not mixed sp3 (like diamond) peak and sp2 (like graphite) peak. And the hydrogen contents in the DLC films (F-DLC) were measured by RBS analysis. In addition, DLC films were analyzed by scratch test for adhesion, nano-indentation for hardness and tribo-meter of Ball-on-disc type for friction coefficient. In the result of analysis, DLC films had traditional structure regardless of variation of hardness at constant conditions. Also adhesion of DLC film was increased as higher material hardness. Otherwise, friction coefficient was increased as lower material hardness. The DLC films were treated by CF4 plasma treatment to enhance the properties of super-hydrophobic. And the DLC films were measured by ESEM(Enviromental Scanning Electron Microscope) for water condensation.

Keywords

Acknowledgement

본 연구는 뿌리기술연구개발사업(kitech_EO210009)의 연구비 지원으로 수행되었으며, 이에 감사의 뜻을 밝힙니다.

References

  1. A. Matthews, S.S. Eskildsen, Engineering applications for diamond-like carbon, Diamond and Related Materials 2(1994)902-911
  2. C. Donnet, Advanced solid lubricant coatings for high vacuum environments, Surf. Coat. Technol. 80(1996)151-156. https://doi.org/10.1016/0257-8972(95)02702-5
  3. B. Podgornik, B. Zajec, S. Strnad, K. Stana-Kleinschek, Influence of surface energy on the interactions between hard coatings and lubricants, Wear 262(2007)1199-1204 https://doi.org/10.1016/j.wear.2006.11.008
  4. L.H. Li, X.B. Tian, P.K. Chu, Y.H. Zhang, X.M. Cui, H.Q. Zhang, Growth and nucleation of diamond-like carbon(DLC) film on aluminum, Nuclear Instruments and Methods in Physics Research B 206(2003)691-695. https://doi.org/10.1016/S0168-583X(03)00827-9
  5. M. Morgan, Electrical conduction in amorphous carbon films, Thin Solid Films 7(1971)313-323. https://doi.org/10.1016/0040-6090(71)90049-6
  6. C. Weissmantel, Ion beam deposition of special film structures, J. Vac. Sci. Technol. 18(1981)179. https://doi.org/10.1116/1.570719
  7. A. Erdemir, G.R. Fenske, Tribological performance of diamond and diamond like carbon films at elevated temperatures, Tribology Transactions 39(1996)787-794 https://doi.org/10.1080/10402009608983596
  8. Q.F. Zeng, Thermally induced superlow friction of DLC films in ambient air, High Temperature Materials and Processes 37(2017)725-731. https://doi.org/10.1515/htmp-2017-0045
  9. Q.F. Zeng, O. Eryilmaz, A. Erdemir, Superlubricity of the DLC films-related friction system at elevated temperature, RSC Advances 5(2015)93147-93154. https://doi.org/10.1039/C5RA16084G
  10. M. Scendo, K. Staszewska-Samson, Effect of temperature on anti-corrosive properties of diamond-like carbon coating on S355 steel, Mater. 12(2019)1659. https://doi.org/10.3390/ma12101659
  11. M. Bai, L. Yang, J. Li, L. Luo, S. Sun, B. Inkson, Mechanical and tribological properties of Si and W doped diamond like carbon (DLC) under dry reciprocating sliding conditions, Wear 484-485(2021)204046. https://doi.org/10.1016/j.wear.2021.204046
  12. K. Bewilogua, Hard and superhard coatings for tribological applications, Third Mikkeli International Industrial Coating Seminar March 2006, Mikkeli, Finland
  13. C. Weigel, S. Sinzinger, M. Hoffmann, Deep etched and released microstructures in Zerodur in afluorine-basedplasma, Microelectronic Engineering, 198(2018)78-84 https://doi.org/10.1016/j.mee.2018.07.004
  14. F.Cemin, C.D.Boeira, C.A.Figueroa, On the understanding of the silicon-containing adhesion interlayer in DLC deposited on steel, Tribology International 94(2016)464-469 https://doi.org/10.1016/j.triboint.2015.09.044
  15. P. Merel, M. Tabbal, M. Chaker, S. Moisa, Direct evaluation of the sp3 content in diamond-like-carbon films by XPS, J. Margot, Applied Surface Science 136, 105(1998). https://doi.org/10.1016/S0169-4332(98)00319-5
  16. G.F. Huang, Zhou Lingping, Huang Weiqing, Zhao Lihua, Li Shaolu, Li Deyi, The mechanical performance and anti-corrosion behavior of diamond-like carbon film, Diamond and Related Materials 12,1406 (2003). https://doi.org/10.1016/S0925-9635(03)00168-7
  17. Xingbin Yan, Tao Xu, Gang Chen, Shengrong Yang, Huiwen Liu, Study of structure, tribological properties and growth mechanism of DLC and nitrogen-doped DLC films deposited by electrochemical technique, Applied Surface Science 236, 328 (2004). https://doi.org/10.1016/j.apsusc.2004.05.005
  18. H. Nakazawa, Y. Yamagata, M. Suemitsu, M. Mashita, Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition, Thin Solid Films 467(2004)98-103. https://doi.org/10.1016/j.tsf.2004.03.013
  19. P. Merel, M. Tabbal, M. Chaker, S. Moisa, and J. Margot, Direct evaluation of the sp3 content in diamond-like-carbon films by XPS, App. Surf. Sci. 136(1998)105-110. https://doi.org/10.1016/S0169-4332(98)00319-5
  20. G.F. Huang, Zhou Lingping, Huang Weiqing,Zhao Lihua, Li Shaolu, Li Deyi, The mechanical performance and anti-corrosion behavior of diamond-like carbon film, Diamond and Related Materials 12(2003)1406-1410. https://doi.org/10.1016/S0925-9635(03)00168-7
  21. S.J. Bull, Tribology of carbon coatings: DLC, diamond and beyond, Diamond and Related Materials 4(1995)827-836. https://doi.org/10.1016/0925-9635(94)05325-1
  22. Erdemir. A, Donnet C. Modern tribology handbook, Vol II, pp871-908, CRC Press, Boca. Raton, F.L, USA(2001)
  23. Y.J. Lifshitz, Diamond-like carbon - present status, Diamond and Related Materials 8(1999)1659-1676. https://doi.org/10.1016/S0925-9635(99)00087-4