한국수소및신에너지학회논문집 (Transactions of the Korean hydrogen and new energy society)

  • 제31권5호
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  • Pages.480-488
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  • 2020
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  • 1738-7264(pISSN)
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  • 2288-7407(eISSN)
한국수소및신에너지학회 (The Korean Hydrogen and New Energy Society)
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반도체 칩 테스트용 챔버 형상에 따른 유동 균일성에 대한 수치적 연구

A Numerical Study on the Flow Uniformity according to Chamber Shapes Used for Test of the Semi-Conductor Chip

  • 이대규 (전북대학교 대학원 기계공학과) ;
  • 마상범 (한국생산기술연구원 청정에너지시스템연구부문) ;
  • 김성 (한국생산기술연구원 청정에너지시스템연구부문) ;
  • 김정열 (한국생산기술연구원 청정에너지시스템연구부문) ;
  • 강채동 (전북대학교 기계공학과) ;
  • 김진혁 (한국생산기술연구원 청정에너지시스템연구부문)
  • LEE, DAEGYU (Mechanical Engineering, Graduate School of Jeonbuk National University) ;
  • MA, SANG-BUM (Clean Energy R&D Department, Korea Institute of Industrial Technology) ;
  • KIM, SUNG (Clean Energy R&D Department, Korea Institute of Industrial Technology) ;
  • KIM, JEONG-YEOL (Clean Energy R&D Department, Korea Institute of Industrial Technology) ;
  • KANG, CHAEDONG (Mechanical Engineering, Jeonbuk National University) ;
  • KIM, JIN-HYUK (Clean Energy R&D Department, Korea Institute of Industrial Technology)
  • 투고 : 2020.09.07
  • 심사 : 2020.10.30
  • 발행 : 2020.10.30
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초록

This study was conducted to improve the flow uniformity inside the chip tester through changing the flow path formation according to the inlet and outlet position of chamber. The internal flow and velocity distributions of the modified chamber models (Cases 1-3) were compared with the reference chamber model through three-dimensional Reynolds-averaged Navier-Stokes equations with k-ε turbulence model. The modified chamber models showed the superior flow uniformity characteristics compared to the reference chamber model. To investigate the flow uniformity in the chip tester, the standard deviation of the velocity was defined and compared. Through the internal flow analysis and assesment of the standard deviation, Case 2 among the test cases including the reference model showed the best flow uniformity generally.

키워드

참고문헌

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