The Transactions of the Korean Institute of Power Electronics (전력전자학회논문지)

The Korean Institute of Power Electronics (전력전자학회)
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Current Source Type Pulse Generator with Improved Output Voltage Waveform for High Voltage Capacitively Coupled Plasma System

고전압 용량성 결합 플라즈마 시스템의 개선된 전압 파형 출력을 위한 펄스 전류 발생장치 회로

  • Chae, Beomseok (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University) ;
  • Min, Juhwa (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University) ;
  • Suh, Yongsug (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University) ;
  • Kim, Hyunbae (Manufacturing Technology Center, Samsung Electronics)
  • Received : 2018.10.31
  • Accepted : 2018.12.11
  • Published : 2019.06.20
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Abstract

This study proposes a current source-type pulse generator to improve output voltage and current waveforms under a capacitively coupled plasma (CCP) system. The proposed circuit comprises two parallel-connected current source-type converters. These converters can satisfy the required output waveforms of plasma processing. The parallel-connected converters operate without reverse current fault by applying a time-delay control technique. Conventional voltage source converters based on pulse power supply exhibit drawbacks in short-circuit current, and problems occur when they are applied to a CCP system. The proposed pulse power supply based on a current source converter fundamentally solves the short-circuit current problem. Therefore, this topology can improve the voltage and current accuracy of a CCP system.

Keywords

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Fig. 1. Capacitively Coupled Plasma load and equivalent circuit.

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Fig. 2. Load voltage(upper, Vload) and current(lower, Iload) waveforms of capacitively coupled plasma system.

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Fig. 3. Circuit diagram of marx generator.

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Fig. 4. Circuit diagram of half-bridge modular multi-level converter.

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Fig. 5. Circuit diagram of full-bridge modular multi-level converter.

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Fig. 6. Circuit diagram of proposed current source type pulse generator.

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Fig. 7. Waveforms of load voltage(Vload) and load current (Iload); Vload_bias_ref=-4500, Voffset_ref=3000, SCM_duty=0.7.

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Fig. 8. Switch(SBCM1) voltage and current waveforms of bias current modulator.

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Fig. 9. Switch(SSCM1) voltage and current waveforms of slope current modulator.

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Fig. 10. Experimental setup of current source type pulse generator system.

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Fig. 11. Waveforms of load voltage and load current; Vload=800Vpp, Ibias=8A, Islope=1A.

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Fig. 12. Waveforms of load voltage and load current; Vload=1kVpp, Ibias=9A, Islope=1A.

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Fig. 13. Waveform of load voltage only using bias stage; Vload=600Vpp.

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Fig. 14. Waveform of load current only using bias stage; Iload=5Apulse.

TABLE I SIMULATION PARAMETER OF CURRENT SOURCE TYPE PULSE GENERATOR SYSTEM

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