Browse > Article
http://dx.doi.org/10.6113/TKPE.2019.24.3.153

Current Source Type Pulse Generator with Improved Output Voltage Waveform for High Voltage Capacitively Coupled Plasma System  

Chae, Beomseok (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University)
Min, Juhwa (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University)
Suh, Yongsug (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University)
Kim, Hyunbae (Manufacturing Technology Center, Samsung Electronics)
Publication Information
The Transactions of the Korean Institute of Power Electronics / v.24, no.3, 2019 , pp. 153-160 More about this Journal
Abstract
This study proposes a current source-type pulse generator to improve output voltage and current waveforms under a capacitively coupled plasma (CCP) system. The proposed circuit comprises two parallel-connected current source-type converters. These converters can satisfy the required output waveforms of plasma processing. The parallel-connected converters operate without reverse current fault by applying a time-delay control technique. Conventional voltage source converters based on pulse power supply exhibit drawbacks in short-circuit current, and problems occur when they are applied to a CCP system. The proposed pulse power supply based on a current source converter fundamentally solves the short-circuit current problem. Therefore, this topology can improve the voltage and current accuracy of a CCP system.
Keywords
Capacitively coupled plasma; Current source converter; Pulse power generator; Plasma power supply;
Citations & Related Records
연도 인용수 순위
  • Reference
1 B. W. Koo, Z. Fang, L. Godet, S. B. Radovanov, C. Cardinaud, G. Cartry, A. Grouillet, and D. Lenoble, “Plasma diagnostics in pulsed plasma doping(P2LAD) system,” IEEE Transactions on Plasma Science., Vol. 32, No. 2, pp. 456-463, Apr. 2004.   DOI
2 D. Wang, M. Matsuda, T. Matsumoto, T. Namihira, and H. Akiyama, “Energy transfer efficiency of nanoseconds pulsed power generator for nonthermal plasma processing technique,” IEEE Transactions on Dielectrics and Electrical Insulation., Vol. 18, No. 4, pp. 1091-1096, Aug. 2011.   DOI
3 I. V. Grekhov, “Pulse power generation in nano- and subnanosecond range by means of ionizing fronts in semiconductors: The state of the art and future prospects,” IEEE Transactions on Plasma Science., Vol. 38, No. 5, pp. 1118-1123, May 2010.   DOI
4 W. Shin, J. Choi, and T. Kim, "Bidirectional pulse plasma power supply for treatment of air pollution," 2006 37th IEEE Power Electronics Specialists Conference., pp. 1-6, Jun. 2006.
5 X. Bonnin, J. Brandelero, N. Videau, H. Piquet, and T. Meynard, “A high voltage high frequency resonant inverter for supplying DBD devices with short discharge current pulses,” IEEE Transactions on Plasma Science., Vol. 29, No. 8, pp. 4261-4269, Aug. 2014.
6 M. D. G. Evans, P. Versailles, F. P. Sainct, J. Bergthorson, and S. Coulombe, “Increased flame reactivity of a lean premixed flame through the use of a custom-built high-voltage pulsed plasma source,” IEEE Transactions on Plasma Science., Vol. 42, No. 10, pp. 2844-2845, Oct. 2014.   DOI
7 P. Diomede, D. J. Economou, and V. M. Donnelly, “Instabilities in capacitively coupled plasmas driven by asymmetric trapezoidal voltage pulses,” IEEE Transactions on Plasma Science., Vol. 42, No. 10, pp. 2822-2823, Oct. 2014.   DOI
8 D. Akbar, “Investigation of single and dual RF capacitively coupled nitrogen plasma discharges using optical emission spectroscopy,” IEEE Transactions on Plasma Science., Vol. 42, No. 8, pp. 2058-2064, Aug. 2014.   DOI
9 T. Heeren, T. Ueno, D. Wang, T. Namihira, S. Katsuki, and H. Akiyama, “Novel dual marx generator for microplasma applications,” IEEE Transactions on Plasma Science., Vol. 33, No. 4, pp. 1205-1209, Aug. 2005.   DOI
10 M. A. Elgenedy, A. Darwish, S. Ahmed, and B. W. Williams, “A modular multilevel generic pulse-waveform generator for pulsed electric field applications,” IEEE Transactions on Plasma Science., Vol. 45, No. 9, pp. 2527-2535, Sep. 2017.   DOI
11 I. Abdelsalam, M. A. Elgenedy, S. Ahmed, and B. W. Williams, “Full-bridge modular multilevel submodulebased high-voltage bipolar pulse generator with lowvoltage DC, input for pulsed electric field applications,” IEEE Transactions on Plasma Science., Vol. 45, No. 10, pp. 2857-2864, Oct. 2017.   DOI