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터널링 전계효과 트랜지스터 4종류 특성 비교

Comparative Investigation on 4 types of Tunnel Field Effect Transistors(TFETs)

  • Shim, Un-Seong (Department of Electronic Engineering, Hankyong National University) ;
  • Ahn, TaeJun (Department of Electrical, Electronic and Control Engineering and IITC, Hankyong National University) ;
  • Yu, YunSeop (Department of Electrical, Electronic and Control Engineering and IITC, Hankyong National University)
  • 투고 : 2016.12.08
  • 심사 : 2017.01.12
  • 발행 : 2017.05.31

초록

본 연구에서는 TCAD 시뮬레이션을 이용하여 4가지 터널링 전계효과 트랜지스터(Tunnel Field-Effect Transistors; TFETs) 구조에 따른 특성을 조사하였다. 단일게이트 TFET(SG-TFET), 이중게이트 TFET(DG-TFET), L-shaped TFET(L-TFET), Pocket-TFET(P-TFET)의 4가지 TFET를 유전율과 채널 길이를 변화함에 따라서 드레인 전류-게이트전압 특성을 시뮬레이션해서 문턱전압이하 스윙(Subthreshold Swing; SS)과 구동 전류(On-current)면에서 비교하였다. 고유전율을 가지며 라인 터널링을 이용하는 L-TFET 구조와 P-TFET 구조가 포인트 터널링을 이용하는 SG-TFET와 DG-TFET보다 구동전류면에서 10배 이상 증가하였고, SS면에서 20 mV/dec이상 감소하였다. 특히, 고유전율을 가진 P-TFET의 주 전류 메카니즘이 포인트 터널링에서 라인터널링으로 변화하는 험프현상이 사라지면서 SS가 매우 향상되는 것을 보였다. 4가지 TFET 구조의 분석을 통해 포인트터널링을 줄이고 라인터널링을 강조하는 새로운 TFET 구조의 가이드 라인을 제시한다.

Using TCAD simulation, performances of tunnel field-effect transistors (TFETs) was investigated. Drain current-gate voltage types of TFET structure such as single-gate TFET (SG-TFET), double-gate TFET (DG-TFET), L-shaped TFET (L-TFET), and Pocket-TFET (P-TFET) are simulated, and then as dielectric constant of gate oxide and channel length are varied their subthreshold swing (SS) and on-current ($I_{on}$) are compared. On-currents and subthreshold swings of the L-TFET and P-TFET structures with high electric constant and line tunneling were 10 times and 20 mV/dec more than those of the SG-TFET and DG-TFET using point tunneling, respectively. Especially, it is shown that hump effect which dominant current element changes from point tunneling to line tunneling, is disappeared in P-TFET with high-k gate oxide such as $HfO_2$. The analysis of 4 types of TFET structure provides guidelines for the design of new types of TFET structure which concentrate on line tunneling by minimizing point tunneling.

키워드

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