한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제30권12호
  • /
  • Pages.1273-1279
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  • 2013
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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2 배수 피치비를 갖는 이중 격자 측정법을 이용한 축방향 롤 회전 오차 측정

Double-Pitch Dual Grating Method for Detecting the Axial Offset in Roll System

  • 투고 : 2013.10.17
  • 심사 : 2013.11.18
  • 발행 : 2013.12.01
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초록

We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.

키워드

참고문헌

  1. Kim, C. H., Kim, M. S., You, H. I., Choi, B. O., Lee, S. H., and Kim, D. S., "Roll-to-Roll Contact Printer with Multiple Printing Methods," J. Korean Soc. Precis. Eng., Vol. 27, No. 9, pp. 7-10, 2010.
  2. Yun, D., Son, Y., Park, H., Kim, B., Lee, S., Yu, Y., and Lee, S., "Study on the 300mm width Roll-to-Roll Hot Embossing Process," Proc. of KSPE Autumn Conference, pp. 321-322, 2012.
  3. Park, J. H., Lee, D., Kang, H. K., Lee, J. S., Park, S. S., and et al., "Fabrication of RF Resonant Devices Using Roll-to-Roll Gravure Printing Process," Proc. of KSPE Autumn Conference, pp. 261-262, 2012.
  4. Jang, B., Kim, J. H., Choi, H. J., Kim, K. S., Park, H. S., and Lee, H. J., "Silicon Pattern Transfer Considering Tilt and Overlay Alignment," Proc. of KSPE Spring Conference, pp. 701-702, 2010.
  5. Une, A., Takeuchi, N., and Torii, Y., "A Highaccuracy Alignment Technique using Single- and Double-pitch Dual Gratings," J Vac. Sci. Technol. B, Vol. 8, No. 1, pp. 51-56, 1990. https://doi.org/10.1116/1.584865
  6. Patorski, K., "Position Monitoring Technique using Double Diffraction Phenomenon," Opt. Commun., Vol. 27, No. 3, pp. 303-306, 1978. https://doi.org/10.1016/0030-4018(78)90386-3
  7. Torii, Y. and Mizushima, Y., "Theory of Alignment Monitoring by Diffraction from Superimposed Dual Gratings," J. Opt. Soc. Am., Vol. 68, No. 12, pp. 1716-1731, 1978. https://doi.org/10.1364/JOSA.68.001716