• 한국정밀공학회지
• /
• 제30권12호
• /
• pp.1273-1279
• /
• 2013

We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.