DOI QR코드

DOI QR Code

반도체 생산설비 루츠형 진공펌프 계통에 대한 유동-구조 연성해석

Coupled flow-structure Analyses on the Roots Type Vacuum Pumps in Semiconductor Fabrication Facility

  • 투고 : 2012.10.22
  • 심사 : 2013.02.27
  • 발행 : 2013.04.01

초록

The present study conducts CFD analyses on the internal flow fields of roots type vacuum pumps of semiconductor fabrication facility, and the computed CFD results for internal pressure and temperature distributions are applied to structural analyses of the pumps. The coupled analysis results between flow and structure show that the deformation of pump structure is mainly resulted from the thermal expansion of gas in pump, and the deformed impeller and housing produce their severe contact and impact phenomena causing mechanical damage and fracture.

키워드

참고문헌

  1. 황태성, 2008, "기초진공기술," 보문당.
  2. 노명근, 황태경, 박제우, 2008, "스크류형 건식 진공펌프 기술 현황 및 응용," 학국진공학회지, 제17권 제4호, pp. 291-301.
  3. 이상윤, 노명근, 김병옥, 이안성, 2010, "반도체/디스플레이 공정급 건식진공펌프 개발 개요," 한국진공학회지, 제19권 제4호, pp. 265-274. https://doi.org/10.5757/JKVS.2010.19.4.265
  4. 이찬, 2012, "반도체 공정용 진공펌프계통해석 및 WH4400, WS1001의 유동/구조 해석," 엘오티베큠 최종보고서.
  5. TEMAZ, www.fmclithium.com.
  6. Monnier,d.m Nuta, I., chatillon, C., Gros-Jean, M. and Blanquet, E., 2009, "Gaseous Phase Study of the Zrorgano-Metallic ALD Precursor TEMAZ by Mass Spectrometry," Journal of Electochemical Society, Vol. 156, no. 1, pp. 71-75.
  7. Fluent User's Guide, 1998.
  8. 최봉수, 2009, "FLUENT Dynamic Mesh Method를 이용한 유압식 쇼크 업소버 해석," 유체기계저널, 제12권 제3호, pp. 75-78 https://doi.org/10.5293/KFMA.2009.12.3.075
  9. Kapil, S. and Jayesh, M., "Remeshing Stratege for the dynamic Mesh model in FLUENT," Fluent Inc.
  10. Ashish, M. J., David I. B., James, D. F., John, A. L. and Joseph, C. M., 2006, "Clearance Analysis and Leakage Flow CFD Model of a Two-Lobe Multi-Recompression Heater," Internationl Journal of Rotating Machinert, Vol. 2006, Article ID 79084, pp. 1-10.
  11. 이찬, 길현권, 노명근 2011, "루츠식 진공 펌프의 유동 및 부산물 입자 궤적에 대한 해석," 유체기계저널, 제14권 제5호, pp. 18-23. https://doi.org/10.5293/kfma..2011.14.5.018