Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Study on Formation of FePd Nano-dot Using Agglomeration of Fe/Au Bilayer

Fe/Au 이중층의 응집현상을 이용한 FePd 나노 점 형성에 관한 연구

  • Koo, J.K. (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Kim, J.M. (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Ryua, D.H. (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Choi, B.J. (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Kim, D.W. (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Lee, D.H. (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Kim, U.I. (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Mitani, S. (Magnetic Materials Center, National Institute for Materials Science) ;
  • J.G., M. Kamiko (Institute of Industrial Science, The University of Tokyo) ;
  • Ha, J.G. (Department of Electronic Materials Engineering, Kwangwoon University)
  • Received : 2010.10.21
  • Accepted : 2010.12.08
  • Published : 2011.01.30
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Abstract

[ $L1_0$ ]phase FePd nano-dot structures were successfully fabricated on self-organized Fe/Au bilayers. With atomic force microscopy, it is determined that surface morphologies of initially flat Fe/Au bilayer films were agglomerated and transformed their shape into nano-dots structures with increasing annealing temperature. With this bilayer as a template, FePd multilayers were deposited at various temperatures, i.e. $300^{\circ}C$, $350^{\circ}C$, $400^{\circ}C$, and $450^{\circ}C$. Surface morphologies of FePd superlattice had a near resemblance to self-organized bilayer. According to X-ray diffraction results, it is confirmed that $L1_0$ superlattice structures of FePd were obtained from samples which were annealed above $350^{\circ}C$. Results of X-ray photoelectron spectroscopy depth-profile analysis showed that chemical composition is identical to deposition sequence. As a result, without additional etching processes, fabrication of chemically ordered FePd superlattice nano-dots was achieved.

자기조립화된 Fe/Au 이중층 위에 $L1_0$형 구조를 갖는 FePd 나노 점을 성공적으로 제작하였다. AFM를 이용하여 초기에 편평한 Fe/Au 이중층 박막이 온도가 증가함에 따라서 응집되어 나노 점 구조로 변형되는 것을 확인하였다. 또한 형성된 이중층위에 FePd 다층막을 $300^{\circ}C$, $350^{\circ}C$, $400^{\circ}C$, $450^{\circ}C$에서 각각 증착하였다. 초격자 구조를 갖는 FePd 다층막의 표면형상은 응집현상에 의하여 자기조립화된 이중층의 형상과 유사하였다. XRD 측정결과, $350^{\circ}C$ 이상에서 열처리된 FePd 다층막은 $L1_0$형 구조를 갖는다는 것을 확인하였다. 그리고 박막두께에 따른 XPS 측정결과는 전체 박막의 화학적 조성이 증착순서와 일치하는 것을 보여주었다. 결과적으로 추가적인 식각공정 없이 화학적으로 규칙화된 FePd 초격자 나노 점의 제작에 성공하였다.

Keywords

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