Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Characteristics of Plasma Plume with a Cylindrical Syringe Plasma Jet Device

원통형 바늘 구조의 플라즈마 제트 방출 특성

  • Lim, H.K. (Department of Electrophysics /LCD-BLU Laboratory, Kwangwoon University) ;
  • Jin, D.J. (Department of Electrophysics /LCD-BLU Laboratory, Kwangwoon University) ;
  • Kim, J.H. (Department of Electrophysics /LCD-BLU Laboratory, Kwangwoon University) ;
  • Han, S.H. (Department of Electrophysics /LCD-BLU Laboratory, Kwangwoon University) ;
  • Cho, G.S. (Department of Electrophysics /LCD-BLU Laboratory, Kwangwoon University)
  • 임현교 (광운대학교 전자물리학과) ;
  • 김동준 (광운대학교 전자물리학과) ;
  • 김정현 (광운대학교 전자물리학과) ;
  • 한상호 (광운대학교 전자물리학과) ;
  • 조광섭 (광운대학교 전자물리학과)
  • Received : 2010.12.09
  • Accepted : 2011.01.20
  • Published : 2011.01.30
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Abstract

The plasma emission characteristics are investigated in cylindrical syringe plasma jet device. Cylindrical syringe electrode is applied AC power using inverter. In the center of syringe is injected into a inert gas and plasma jet occurs. If there is no ground electrode, firing voltage is 3 kV and plasma column length is 10 mm. According to high firing voltage and large current, the plasma column length control is difficult. The case of an internal ground electrode, firing voltage is 1 kV. Because of the losing current from internal ground, even if a higher input voltage, plasma emission does not occur. The case of an external ground electrode, the plasma column can be controlled between 0~10 mm with change the applied voltage from 1 to 2 kV, and the discharging current changed from 1 to 4 mA.

유리관에 삽입된 주사기 바늘을 이용한 플라즈마 제트 장치의 특성을 조사하였다. 원통형 주사기 바늘 전극에 교류 고전압을 인가하고, 유리관 끝에 설치된 접지전극의 형태에 따른 플라즈마의 방출 특성을 조사하였다. 접지전극이 없는 경우 방전 개시 전압이 약 3 kV이며, 플라즈마 방사 길이는 약 10 mm이다. 또한 높은 방전 개시 전압으로 인하여 플라즈마 방사 길이 및 전류 최소량의 제어가 어렵다. 내부접지 전극의 경우는 방전 개시 전압이 약 1 kV로 낮다. 그러나 플라즈마 전류가 내부에 위치한 접지 전극으로 흐르기 때문에 유리관 끝으로부터 플라즈마가 방출되지 않는다. 외부접지 전극의 경우는 인가전압 1~2 kV에서, 방전 전류 1~4 mA이며 플라즈마 방사 길이를 0~10 mm의 범위에서 용이하게 제어된다.

Keywords

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