설비공학논문집 (Korean Journal of Air-Conditioning and Refrigeration Engineering)

  • 제22권10호
  • /
  • Pages.697-703
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  • 2010
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  • 1229-6422(pISSN)
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  • 2465-7611(eISSN)
대한설비공학회 (The Society of Air-Conditioning and Refrigerating Engineers of Korea)
권호 표지

반도체 클린룸용 배기 열회수식 에어와셔 시스템의 에너지절감에 관한 수치해석

Numerical Analysis on Energy Reduction of an Exhaust-Air-Heat-Recovery Type Air Washer System for Semiconductor Manufacturing Clean Rooms

  • 송근수 (한국생산기술연구원 나노오염제어연구실) ;
  • 김형태 (한국생산기술연구원 나노오염제어연구실) ;
  • 유경훈 (한국생산기술연구원 나노오염제어연구실) ;
  • 손승우 ((주)성림피에스) ;
  • 신대건 ((주)대한피엔씨) ;
  • 김영일 (서울산업대학교 건축학부)
  • Song, Gen-Soo (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Kim, Hyung-Tae (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Yoo, Kyung-Hoon (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Son, Seung-Woo (Sunglim PS Co.) ;
  • Shin, Dae-Kun (Daehan PNC Co.) ;
  • Kim, Young-Il (School of Architecture, Seoul National University of Technology)
  • 투고 : 2010.05.12
  • 발행 : 2010.10.10
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초록

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

키워드

참고문헌

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