Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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An Experimental Study on Energy Reduction of an Exhaust Air Heat Recovery Type Outdoor Air Conditioning System for Semiconductor Manufacturing Clean Rooms

반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지절감에 관한 실험적 연구

  • Song, Gen-Soo (Aerosol and Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Yoo, Kyung-Hoon (Aerosol and Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Kang, Shin-Young (Daehan PNC Co.) ;
  • Son, Seung-Woo (Sunglim PS Co.)
  • 송근수 (한국생산기술연구원 에어로졸.오염제어 연구실) ;
  • 유경훈 (한국생산기술연구원 에어로졸.오염제어 연구실) ;
  • 강신영 ((주)대한피엔씨) ;
  • 손승우 ((주)성림피에스)
  • Published : 2009.05.10
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Abstract

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

Keywords

References

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