Development of precision-stage for the millimeter dynamic range by using the PZT actuato

PZT 액추에이터를 이용한 mm범위의 위치결정용 정밀스테이지의 개발

This paper presents a new precision stage by using the PZT actuator and stepping motor. The stage have the precision positioning mechanism that has been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulatneously. The stage is composed not of the mechanical elastic hinge but of the clamp, and only one PZT actuator. The displacement of stage is acquired by the control of the two clamp between the PZT actuator. The results of the FEM analysis in the contact part of the clamp and basic properties of the positioning system are also presented. Using the new stage proposed in this paper.