• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.250-253
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• 2004

This study deals with the microvalve, which is composed of the multilayer bender type PZT actuator, actuator controller and microvalve body. The object of this study is to develope the microvalve with multilayer bender type PZT actuator. In order to achieve this object, prototype PZT actuator and microvalve were suggested and manufactured. Also, the performance of this model was evaluated through the experiments.

• 한국기계가공학회지
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• 제7권1호
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• pp.32-37
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• 2008

This paper presents a new precision stage by using the PZT actuator and stepping motor. The stage have the precision positioning mechanism that has been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulatneously. The stage is composed not of the mechanical elastic hinge but of the clamp, and only one PZT actuator. The displacement of stage is acquired by the control of the two clamp between the PZT actuator. The results of the FEM analysis in the contact part of the clamp and basic properties of the positioning system are also presented. Using the new stage proposed in this paper.

• 대한기계학회논문집A
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• 제28권12호
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• pp.1937-1941
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• 2004

We present lateral actuated piezoelectric actuator using U-shaped PZT strip and lever structure for the RF switch application. In the previous study of RF switch, they used horizontal contact switch fabricated by thin film metals. However, thin film metals could not generate large contact force due to low stiffness. In this work, we suggest lateral contact switch which makes large contact force by increasing stiffness. In addition, we use PZT actuator for the high force actuation. Generally actuator using thin film PZT moves to the vertical direction due to the neutral axis shift. Therefore we need lateral motion generation mechanism based on the thin film PZT actuator. In order to increase lateral motion of thin film PZT actuator, we use U-shaped PZT actuator using residual stress control. Also, thin film PZT actuator can generate very small lateral motion of 120${\times}$10$^{-6}$ ${\mu}{\textrm}{m}$/V for d$_{31}$ mode, thus we suggest lever structure to increase stroke amplification. From the experimental study, fabricated PZT actuator shows maximum lateral displacement of 1 ${\mu}{\textrm}{m}$, and break down voltage of the thin film PZT actuator is above 16V.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.450-453
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• 2004

A tactile stimulator array using stacked PZT is fabricated and evaluated in this paper. The purpose of this research is the development of a tactile stimulator to represent the obstacle information for the visually disabled. As a first step of this research, we investigate the physiological characteristics of tactile stimuli and design a tactile stimulator based on the investigated results. Also we evaluated a fabricated tactile stimulator. The prototype of tactile stimulator which has 2$\times$2 tactor elements with 3mm spacing is fabricated using stacked PZT actuator. In order to evaluate the characteristics of this tactile stimulator, physiological experiments are carried out. In the experiment, the threshold of tactile stimulus intensity within a frequency range of 5-500Hz at various stimulus amplitudes are investigated. According to the obtained experimental result, the input signal of tactile stimulator for the effective transfer of obstacle information is determined. Also physiological experiments of multi-stimuli recognition such as shift and rotation are carried out

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.979-984
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• 2007

This paper presents a new control mechanism for the proportional pressure control which is accomplished by electro-pneumatic regulator using two PZT actuators. The electro-pneumatic regulator of this study is 2-stage type and consists of two piezoelectric actuators, a controller and a main poppet valve. The piezoelectric actuators are multilayer bender type and are controlled by digital signal. Proportional pressure control technique is very important because that can derive improvement of product quality and driving ability in the pneumatic system. Solenoid actuator method for pressure control is widely used but this actuator has a high power consumption characteristics. So new actuator is required for the energy saving. In this study, PZT actuator for the pressure control was fabricated and experimented instead of the conventional type solenoid actuator. Experiments for the new control mechanism of the elector-pneumatic regulator were operated under the input condition of 0.4[MPa] and it was confirmed that this mechanism has a good control characteristics to the response sensitivity and hysteresis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.113-113
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• 2003

• 한국소음진동공학회논문집
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• 제14권5호
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• pp.385-393
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• 2004

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1463-1468
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• 2007

This paper presents the possibility of the electric energy harvesting using piezoelectric actuator which is operated by geared motor. The geared motor consisting of oval shape cam and speed controller was operated in the range of 40${\sim}$172rpm. The PZT actuator of $36L{\times}13W{\times}0.6H$ was used for energy harvesting and the results of the theoretical model were verified by comparing it with the measured response of a experimental setup. Experimental study for obtaining the optimal operating conditions, such as displacement variation of the PZT actuator and motor speed variation, was achieved. A power of 0.02mW at the geared motor speed of 172rpm and the PZT actuator maximum displacement of $500{\mu}m$ was measured. In this study, it was confirmed that the wind power can be used for MEMS based sensor operating and windmill health monitoring one.

• 동력기계공학회지
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• 제9권4호
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• pp.162-167
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that are cost less and faster than previous semiconductor processes have been developed for the production of electric paper and RFID(Radio Frequency IDentification). The system proposed in this study prints by spraying the molten metal. And this system consist of a nozzle, heating furnace, operating actuator and an XYZ 3-axis stage. As an operating system, the piezoelectric(PZT) actuator is a very useful tool for position control of the metal printing system. However, the PZT actuator has a hysteresis nonlinearity due to the ferroelectric characteristics of the PZT element. This hysteresis causes problem position control characteristics in the system and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. In order to reduce the hysteresis nonlinearity of the PZT actuator, this proposed a inverse hysteresis model and a mathematic modeling method that can express the geometric relationship between voltage and displacement. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good tracking performance.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.531-536
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that cost less and are faster than previous semiconductor processes have been developed for the production of electric paper and RFID. The system proposed in this study prints by spraying the molten metal, and consists of a nozzle, heating furnace, operating actuator, and an XYZ 3-axis stage, As an operating system, the piezoelectric(PZT) method has very valuable uses. However, the PZT actuator has a very big hysteresis characteristic due to the ferroelectric characteristics of the PZT element. This causes problems in the system position control characteristics and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. The study proposed a inverse hysteresis model, a mathematic modeling method that can express the geometric relationship between voltage and displacement, in order to reduce the hysteresis of the PZT actuator. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good precision position control performance.