Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Methodologies and Verifications for Enhancing Resolution of a Scanning Electron Microscopy

주사 전자현미경의 이미지 해상도 향상을 위한 방안 및 실험적 검증

  • 김동환 (서울산업대학교 기계설계자동화공학부) ;
  • 김영대 (서울산업대 나노생산기술연구소) ;
  • 박만진 (서울대학교 기계항공공학부) ;
  • 장동영 (서울산업대학교 산업정보시스템공학과) ;
  • 박근 (서울산업대학교 기계설계자동화공학부)
  • Published : 2007.10.15
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Abstract

The electric part of thermal SEM(Scanning Electron Microscopy) consists of high voltage generation, lens control, and image processing. Several methodologies for enhancing SEM image are addressed and those results are verified through analyses and experiments. The controller employes a DSP(Digital Signal Processing), making the system more flexible and convenient than the classical analogue based controller. In some parts based the analog circuit, there are inevitable sources of noise and image distortion. The experimental investigation is provided along with analytical proof to enhance the SEM image.

Keywords

References

  1. Orloff, J., 2004, Handbook of Charged Particle Optics, CRC Press
  2. Lee, R. E, 1993, Scanning Electron Microscopy and X-Ray Microanalysis, PTR Prentice Hall
  3. Reimer, L., 1998, Scanning Electron Microscopy - Physics of Image Formation and Microanalysis, Springer, Berlin
  4. Millman, J. and Grabel, A, 'Microelectronics, second edition,' Large-Signal Electronics Power Circuits and Systems, Vol. 17, pp. 773-812
  5. Kang, H. B. and Lee, J. A, 'Electromagnetic Theory,' Electromagnetic Induction, Vol. 12, pp. 287-299
  6. Park, K. Park, M. J., Kim, D. H. and Jang, D. Y., 2006, 'Numerical analysis for electron optical system of a field emission SEM,' Trans. Kor. Soc. Mech. Engr. (A), Vol. 30, pp. 1577-1583