Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Hardware Design for the Control Signal Generation of Electron Optic by Focal Length

Focal length에 의한 전자 렌즈의 제어 신호 생성을 위한 하드웨어 설계

  • 임선종 (한국기계연구원, 지능기계연구센터) ;
  • 이찬홍 (한국기계연구원, 지능기계연구센터)
  • Published : 2007.10.15
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Abstract

Condenser lens and objective lens are used to demagnify the image of the crossover to the final spot size. In lens, electrons are focused by magnetic fields. This fields is fringing field. It is important in electron focusing. Electron focusing occurs the radial component field and axial component field. Radial component produces rotational force and axial component produces radial force. Radial force causes the electron's trajectory to curve toward the optic axis and corss it. Focal length decreases as the current of lens increases. In this paper, we use the focal length for desiging the hardware of lens current control and present the results.

Keywords

References

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