• Proceedings of the KIPE Conference
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• 2003.07b
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• pp.942-948
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• 2003

This paper about the small electron beam irradiator for solar cell's efficiency. Many things are studied by method to increase conversion efficiency of solar cell. We selected electron beam by method for conversion efficiency of solar cell. Energy bands of this electron beam irradiator is 80keV(max.). And, solar cells that apply in this paper are crystal Si. Average efficiency of solar cell that applies in this experiment is 10$\%$. This system manufactured low energy electron beam irradiator. And, electron beam irradiation to solar cell in vacuum chamber of this irradiator. Irradiation area is 20*20 [mm2] by 40[keV].

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.96-100
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• 2007

Condenser lens and objective lens are used to demagnify the image of the crossover to the final spot size. In lens, electrons are focused by magnetic fields. This fields is fringing field. It is important in electron focusing. Electron focusing occurs the radial component field and axial component field. Radial component produces rotational force and axial component produces radial force. Radial force causes the electron's trajectory to curve toward the optic axis and corss it. Focal length decreases as the current of lens increases. In this paper, we use the focal length for desiging the hardware of lens current control and present the results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1862-1865
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• 2005

We have a plan to design a controller for electron beam manufacturing system. At first, we designed a controller for SEM. The controller consists of five parts (power source, beam controller, scanning controller, optic controller and main controller). Beam controller supplies pulse wave for generating high voltage and can monitor the status of high voltage instrument through emission current. Optic controller controls focus, spot size and image shift. Main controller transmits variables from operating program to each part and monitors the status of peripheral device.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.163-167
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• 2007

A field emission electron gun including 3 electrodes including one cathode and two anodes is very important for high resolution electron microscope. To have functions to control the initially-emitted electron beam, two anodes act as an electrostatic lens according to equipotential lines by adjusting the spot size, intensity, and working distance. To verify the action of the electron beam by the electrostatic lens by changing several parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated and then their performances were analyzed with angular beam intensity(distribution), electrical optic axis variation and their stability.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.15-22
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• 2008

• Journal of Sensor Science and Technology
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• v.15 no.3
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• pp.186-191
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• 2006

In general, Cerenkov light is produced by a charged particle that passes through a medium with a velocity greater than that of visible light. Although the wavelength of Cerenkov light is very broad, the peak is in the almost visible range from 400 to 480 nm. Therefore, it always causes a problem to detect a real light signal that is generated in the scintillator on the fiber-optic sensor tip for dose measurements of high-energy electron beam. The objectives of this study are to measure, characterize and remove Cerenkov light generated in a fiber-optic radiation sensor tip to detect a real light signal from the scintillator. In this study, the intensity of Cerenkov light is measured and characterized as a function of incident angle of electron beam from a LINAC, and as a function of the energy of electron beam. As a measuring device, a photodiode-amplifier system is used, and a subtraction method using a background optical fiber is investigated to remove Cerenkov light.

• Journal of the Semiconductor & Display Technology
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• v.8 no.4
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• pp.43-48
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• 2009

The aim of this paper is to describe the development of the electron-beam optic analysis algorithm for simulating the e-beam behavior concerned with electrostatic lenses and their focal properties in the micro-column of the multi-beam lithography system. The electrostatic lens consists of an array of electrodes held at different potentials. The electrostatic lens, the so-called einzel lens, which is composed of three electrodes, is used to focus the electron beam by adjusting the voltages of the electrodes. The optics of an electron beam penetrating a region of an electric field is similar to the situation in light optics. The electron is accelerated or decelerated, and the trajectory depends on the angle of incidence with respect to the equi-potential surfaces of the field. The performance parameters, such as the working distances and the beam diameters are obtained by the computational simulations as a function of the focusing voltages of the einzel lens electrodes. Based on the developed simulation algorithm, the high performance of the micro-column can be achieved through optimized control of the einzel lens.

• Biomolecules & Therapeutics
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• v.17 no.4
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• pp.362-369
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• 2009

We have investigated the effect of glucosamine on the retinal cells after continuous infusion into cerebroventricle by using osmotic minipump to avoid peripheral effect. Continuous intracerebroventricular (i.c.v) infusion of glucosamine with the rate of 0.1 ${\mu}mol$/10 ${\mu}l$/hr for 7 days resulted in morphological changes of the optic nerve in electron microscopic level as well as morphological changes of the retina in light microscopic level. Retinal sections were immunostained for the detection of morphological changes of astrocytes. GFAP immunoreactivity appeared not only in the Muller cells but also many of the radial processes of Muller cells. The optic nerve showed deformed axon and slight lamellar separation of myelin sheath after continuous infusion of glucosamine in observing with electron microscope. Interestingly, vacuoles were observed in deformed axons and retinal layers were folded and detached. These results suggested that glucosamine plays a role in induction of morphological dysfunction in retina and optic nerves.

• Journal of Biomedical Engineering Research
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• v.27 no.6
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• pp.332-336
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• 2006

In this study, we have fabricated a fiber-optic radiation sensor using an organic scintillator for high energy electron beam therapy. The intensities of scintillating light from a fiber-optic radiation sensor are measured with different field size, electron beam energy and monitor unit of a clinical linear accelerator. To obtain percent depth dose(PDD), the amount of scintillating light is measured at different depth of polymethylmethacrylate(PMMA) phantom. Also the intensity of Cerenkov light is measured and characterized as a function of incident angle of electron beam and a subtraction method is investigated using a background optical fiber to remove a Cerenkov light.

• Progress in Medical Physics
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• v.19 no.4
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• pp.285-290
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• 2008

In this study, we have fabricated a one-dimensional fiber-optic dosimeter for electron beam therapy dosimetry. Each fiber-optic dosimeter has an organic scintillator with a plastic optical fiber and it is embedded and arrayed in the plastic phantom to measure one-dimensional high energy electron beam profile of clinical linear accelerator. The scintillating lights generated from each sensor probe are guided by plastic optical fibers to the multi-channel photodiode amplifier system. We have measured one-dimensional electron beam profiles in a PMMA phantom according to different field sizes and energies of electron beam. Also, the isodose and three-dimensional percent depth dose curves in a PMMA phantom are obtained using a one-dimensional fiber-optic dosimeter with different electron beam energies.