대한전자공학회논문지SD (Journal of the Institute of Electronics Engineers of Korea SD)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

마이크로 머시닝 기술을 이용한 새로운 구조의 100 GHz DMR bandpass Filter의 설계 및 제작

Novel 100 GHz Dual-Mode Stepped Impedance Resonator BPF Using micromachining Technology

  • 백태종 (동국대학교 전자공학과 밀리미터파 신기술 연구센터) ;
  • 이상진 (동국대학교 전자공학과 밀리미터파 신기술 연구센터) ;
  • 한민 (동국대학교 전자공학과 밀리미터파 신기술 연구센터) ;
  • 임병옥 (동국대학교 전자공학과 밀리미터파 신기술 연구센터) ;
  • 윤진섭 (서일대학 컴퓨터전자과) ;
  • 이진구 (동국대학교 전자공학과 밀리미터파 신기술 연구센터)
  • Baek, Tae-Jong (MINT, Millimeter-wave INovation Technology research center) ;
  • Lee, Sang-Jin (MINT, Millimeter-wave INovation Technology research center) ;
  • Han, Min (MINT, Millimeter-wave INovation Technology research center) ;
  • Lim, Byeong-Ok (MINT, Millimeter-wave INovation Technology research center) ;
  • Yoon, Jin-Seob (Department of computer aided system, Seoil College) ;
  • Rhee, Jin-Koo (MINT, Millimeter-wave INovation Technology research center)
  • 발행 : 2007.12.25
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초록

본 논문에서는 MMIC 응용을 위한 dielectric-supported air-gapped microstrip line (DAML) 구조를 이용하여 dual-mode stepped impedance 링 공진기를 설계 제작하였다. 링 공진기는 표면 마이크로머시닝 기술을 이용하여 만들어졌다. DAML ring resonator는 다층구조로써 공기중에 위치한 신호선과 MMIC 응용에 적합하도록 CPW가 한 평면에 구성되 있으며 DAML-CPW 트랜지션이 자유로운게 특징이다. DAML 링 공진기는 $10{\mu}m$ 높이로 GaAs 기판 으로부터 띄어져 있다. 대역통과 여파기는 dual-mode 공진을 하며 stepped impedance 이용한 구조이다. 측정결과로 중심주파수 97 GHz에선 감쇠특성은 15 dB, 삽입손실은 2.65 dB를 보였으며, 상대 대역폭은 12 %를 나타냈다. 이같은 구조의 대역통과 여파기는 MMIC 와의 직접화에 유리하다.

In this paper, we proposed the dual-mode stepped impedance ring resonator bandpass filter for MMIC (Microwave Monolithic Integrated Circuit) applications using the dielectric-supported air-gapped microstrip line (DAML). The ring resonator fabricated by surface micromachining technology. This filter consists of a DAML resonator layer and a CPW feed line. The DAML ring resonator is elevated with $10{\mu}m$ height from GaAs substrate surface. This bandpass filter is $1-{\lambda}g$ type stepped impedance ring resonator including dual-mode resonance. From the measurements, we obtained attenuation of over 15 dB and insertion loss of 2.65 dB at the center frequency of 97 GHz. Relative bandwidth is about 12 % at 97 GHz. Furthermore, the proposed bandpass filter is useful to integrate with conventional MMICs.

키워드

참고문헌

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