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Novel 100 GHz Dual-Mode Stepped Impedance Resonator BPF Using micromachining Technology  

Baek, Tae-Jong (MINT, Millimeter-wave INovation Technology research center)
Lee, Sang-Jin (MINT, Millimeter-wave INovation Technology research center)
Han, Min (MINT, Millimeter-wave INovation Technology research center)
Lim, Byeong-Ok (MINT, Millimeter-wave INovation Technology research center)
Yoon, Jin-Seob (Department of computer aided system, Seoil College)
Rhee, Jin-Koo (MINT, Millimeter-wave INovation Technology research center)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.44, no.12, 2007 , pp. 7-11 More about this Journal
Abstract
In this paper, we proposed the dual-mode stepped impedance ring resonator bandpass filter for MMIC (Microwave Monolithic Integrated Circuit) applications using the dielectric-supported air-gapped microstrip line (DAML). The ring resonator fabricated by surface micromachining technology. This filter consists of a DAML resonator layer and a CPW feed line. The DAML ring resonator is elevated with $10{\mu}m$ height from GaAs substrate surface. This bandpass filter is $1-{\lambda}g$ type stepped impedance ring resonator including dual-mode resonance. From the measurements, we obtained attenuation of over 15 dB and insertion loss of 2.65 dB at the center frequency of 97 GHz. Relative bandwidth is about 12 % at 97 GHz. Furthermore, the proposed bandpass filter is useful to integrate with conventional MMICs.
Keywords
micromachining; dielectric-supported air-gapped microstripline (DAML); microwave monolithic integrated circuit(MMIC); bandpass filter(BPF); stepped impedance;
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