Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Nano-granular Co-Fe-Al-Q Soft Ferromagnetic Thin Films for RF Electromagnetic-noise Filters

  • Sohn, Jae-Cheon (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Byun, Dong-Jin (Department of Materials Science and Engineering, Korea University)
  • Published : 2006.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

Co-Fe-Al-O nano-granular thin films with high electrical resistivity, fabricated by radio frequency magnetron sputtering under an $Ar+O_2$ atmosphere, are found to show good soft magnetic properties in the GHz frequency range. The real part value of the relative permeability is 260 at low frequencies and this value is maintained up to the GHz frequency range. A non-integrated type noise filter on a coplanar waveguide transmission line is demonstrated by using the Co-Fe-Al-O nano-granular thin film with the dimensions of $4\;mm(l){\times}4\;mm(w){\times}0.1\;{\mu}m(t)$. The insertion loss is very low being less than 0.3 dB and this low value is maintained up to 2 GHz. At a ferromagnetic resonance frequency of 3.3 GHz, the degree of noise suppression is measured to be 3 dB. This level of noise attenuation is small for real applications, but there is much room for further improvement by increasing the magnetic volume and integrating the magnetic thin film into the CPW transmission line.

Keywords

References

  1. K. H. Kim, M. Yamaguchi, K. I. Arai, H. Nagura, and S. Ohnuma, 'Effect of radio-frequency noise suppression on the coplanar transmission line using soft magnetic thin films', J. Appl. Phys., Vol. 93, No. 10, p. 8002, 2003 https://doi.org/10.1063/1.1558084
  2. K. H. Kim, M. Yamaguchi, S. Ikeda, and K. I. Arai, 'Modeling for RF noise suppressor using a magnetic film on coplanar transmission line', IEEE Trans. Magn., Vol. 39, No.5, p. 3031,2003 https://doi.org/10.1109/TMAG.2003.815880
  3. M. Fujimoto, 'Inner stress induced by Cu metal precipitation at grain boundaries in lowtemperature-fired Ni-Zn-Cu ferrite', J. Am. Ceram. Soc., Vol. 77, No. 11, p. 2873, 1994 https://doi.org/10.1111/j.1151-2916.1994.tb04517.x
  4. M. Fujimoto, K. I. Hoshi, M. Nakazawa, and S. Sekiguchi, 'Cu multiply twinned particle precipitationin low-temperature fired Ni-Zn-Cu ferrite', Jpn. J. Appl. Phys., Vol. 32, p. 5532, 1993 https://doi.org/10.1143/JJAP.32.5532
  5. M. Fujimoto, T. Suzuki, Y. Nishi, K. Arai, and S. Sekiguchi, 'Coherent precipitation of copper metal in low-temperature-fired Ni-Zn-Cu ferrite', J. Am. Ceram. Soc., Vol. 81, p. 2477, 1998 https://doi.org/10.1111/j.1151-2916.1998.tb02647.x
  6. M. Yamaguchi, K. Suezawa, K. I. Arai, Y. Takahashi, S. Kikuchi, Y. Shimada, S. Tananbe, and K. Ito, 'Magnetic thin-film inductors for RFintegrated circuits', J. Magn. Magn. Mater., Vol. 215-216,p.807,2000 https://doi.org/10.1016/S0304-8853(00)00293-6
  7. M. Yamaguchi, K. Suezawa, K. I. Arai, Y. Takahasi S. Kikuchi, Y. Shimada, W. D. Li, S. Tanabe, and K Ito, 'Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region', J. Appl. Phys., Vol. 85, p. 7919, 1999 https://doi.org/10.1063/1.370608
  8. W. D. Li, K. Kato, O. Kitakami, and Y. Shimada, 'Anisotropy of highly resistive soft magnetic Fe-AI-O granular films', J. Magn. Soc. Jpn., Vol. 22, No. 4-2, p. 442, 1998
  9. H. J. Lee, S. Mitani, T. Shima, S. Nagata, and H. Fujimori, 'Permeability properties of highly resistive Fe-AI-O films', J. Magn. Soc. Jpn., Vol. 23, No. 1-2, p. 246, 1998 https://doi.org/10.3379/jmsjmag.23.246
  10. Y. Yosizawa, S. Oguma, and K. Yamaguchi, 'New Fe-based soft magnetic alloys composed of ultrafine grain structure', J. Appl. Phys., Vol. 64, No. 10, p. 6044,1988 https://doi.org/10.1063/1.342149
  11. S. Ohnuma, H. Fujimori, S. Mitani, and T. Masumoto, 'High-frequency magnetic properties in metal-nonmetal granular films', J. Appl. Phys., Vol. 79, No.8, p. 5130, 1996 https://doi.org/10.1063/1.361531
  12. S. Ohnuma, N. Kobayashi, T. Masumoto, S. Mitani, and H. Fujimori, 'Soft magnetic properties of CoFe-Al-O thin films with high Bs', J. Magn. Soc. Jpn.; Vol. 23, No. 1-2, p. 240, 1999 https://doi.org/10.3379/jmsjmag.23.240
  13. S. Ohnuma, N. Kobayashi, T. Masumoto, S. Mitani, and H. Fujimori, 'Magnetostriction and soft magnetic properties of ($Co_{1-x}Fe_{x}$)-Al-O granular films with high electrical resistivity', J. Appl. Phys., Vol. 85, No.8, p. 4574, 1999 https://doi.org/10.1063/1.370412
  14. B. C. Wadell, 'Transmission line design handbook', Norwood, MA: Artech House, 1991
  15. J. C. Sohn, D. J. Byun, and S. H. Lim, 'Nanogranular Co-Fe-Al-O sputtered thin films for magnetoelastic device applications in the GHz frequency range', J. Magn. Magn. Mater., Vol. 272-276,p.1500,2004 https://doi.org/10.1016/j.jmmm.2003.12.1009
  16. K. Ikeda, K. Kobayashi, and M. Fujimoto, 'Microstructure and magnetic properties of (CoFe)-AI-O thin films', J. Am. Ceram. Soc., Vol. 85, No.1, p. 163,2002
  17. M. Ohnuma, K. Hono, H. Onodera, S. Ohnuma, H. Fujimori, and J. S. Pedersen, 'Microstructure and magnetic properties of Co-Al-O granular thin films' J. App. Phys., Vol. 87, No.2, p. 817,2000 https://doi.org/10.1063/1.371948
  18. H. Fujimori, S. Mitani, T. Ikeda, and S. Ohnuma, 'High electrical resistivity and permeability of soft magnetic granular alloys', IEEE Trans. Magn., Vol. 30, p. 4779, 1994 https://doi.org/10.1109/20.334219
  19. G. Herzer, 'Grain size dependence of coercivity and permeability in nano-crystalline ferromagnets', IEEE Trans. Magn., Vol. 26, No.5, p. 1397, 1990 https://doi.org/10.1109/20.104389
  20. W. Barry, 'A broad-band, automated, stripline technique for the simultaneous measurement of complex permittivity and permeability', IEEE Trans. Microwave Theory Tech., Vol. MTT-34, No. 1, p. 80, 1986
  21. W. B. Weir, 'Automatic measurement of complex dielectric constant and permeability at microwave frequencies', Proc. IEEE, Vol. 62, p. 33, 1974 https://doi.org/10.1109/PROC.1974.9382
  22. A. M. Nicolson and G. F. Ross, 'Measurement of the intrinsic properties of materials by time-domain techniques', IEEE Trans. Instrum. Meas., Vol. IM-19, No.4, p. 377, 1970
  23. R. W. Ziolkowski, 'Design, fabrication, and testing of double negative metamaterials', IEEE Trans Antennas Propagat., Vol. 51, No.7, p. 1516, 2003 https://doi.org/10.1109/TAP.2003.813622