Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Effects of Thermal Treatment on the Characteristics of Spiral Inductors on Bragg Reflectors

  • Mai, Linh (School of Information and Communications University (ICU)) ;
  • Lee, Jae-Young (School of Information and Communications University (ICU)) ;
  • Le, Minh-Tuan (School of Information and Communications University (ICU)) ;
  • Pham, Van-Su (School of Information and Communications University (ICU)) ;
  • Yoon, Gi-Wan (School of Information and Communications University (ICU))
  • Published : 2006.12.30
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Abstract

This paper presents the thermal technique to improve characteristic of planar spiral inductors. The spiral inductors were fabricated on silicon dioxide/silicon (SiO2/Si) wafer. The thermal treatment was done by annealing processes. The measure results showed a considerable improvement of return loss (Sl1). This thermal treatment seems very promising for enhancing spiral inductors based RF IC's.

Keywords

References

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