Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Comparison of Resonance Characteristics in FBAR Devices by Thermal Treatments

  • Mai Linh (School of Engineering, Information and Communications University (ICU)) ;
  • Song Hae-il (School of Engineering, Information and Communications University (ICU)) ;
  • Yoon Giwan (Information and Communications University (ICU))
  • Published : 2005.11.01
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Abstract

The paper presents some methods to improve characteristics of film bulk acoustic resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done by sintering and/or annealing processes. The measurement showed a considerable improvement of return loss $(S_{11})$ and quality factor $(Q_{s/p}).$ These thermal treatment techniques seem very promising for enhancing FBAR resonance performance.

Keywords

References

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