References
- Duley, W. W., 'UV Lasers - Effects and Applications in Materials Science,' Ch. 5., Cambridge University Press, 1996
- Yoon, K. K., Lee, S. K., Kim, J. G., Shin, B. S., Choi, D. S., Whang, K. H. and Park, J. Y., 'Laser Beam Application and Technology in Micro Machining,' J. of KSPE, Vol. 17, No.7, pp. 28-35, 2000
- Yoon, K. K., Kim, J. G., Lee, S. K., Choi, D. S., and Whang, K. H., 'Fabrication of Micro Cylindrical Lens Using UV Laser,' 2000 Proc. of 2nd Korean MEMS Conference, pp. 191-195, 2000
- Bang, S. Y. and Yoon, K. K., 'Modeling of Polymer Ablation with Excimer Lasers,' submitted to J. of KSPE
- Bang, S. Y., 'Effects of Beam Parameters on Excimer Laser Ablation,' J. of KSPE, Vol. 22, No. 7, 2005
- Srinivasan, V., Smrtic, M. A. and Babu, S. V., 'Excimer Laser Etching of Polymers,' J. Appl. Phys., Vol. 59, No. 11, pp. 3861-3867, 1986 https://doi.org/10.1063/1.336728
- Babu, S. V., D'Couto, G. C. and Egitto, F. D., 'Excimer Laser Induced Ablation of Polyetherether -ketone, Polyimide, and Polytetrafluoroethylene,' J. Appl. Phys., Vol. 72, No.2, pp. 692-698, 1992 https://doi.org/10.1063/1.351855
- D'Couto, G. C., Babu, S. V., Egitto, F. D. and Davis, C. R., 'Excimer Laser Ablation of Polyimide-Doped Poly(tetrafluoroethylene) at 248 and 308nm,' J. Appl. Phys., Vol. 74, No. 10, pp. 5972-5980, 1993 https://doi.org/10.1063/1.355210