Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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A new capacitive displacement sensor for high accuracy and long range

고정밀 및 긴 측정범위를 위한 전기용량형 변위 센서

  • Kim, Moo-Jin (Department of Mechanical Engineering, POSTECH) ;
  • Moon, Won-Kyu (Department of Mechanical Engineering, POSTECH)
  • 김무진 (포항공과대학교 기계공학과) ;
  • 문원규 (포항공과대학교 기계공학과)
  • Published : 2005.07.30
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Abstract

In this paper, a contact-type linear encoder-like capacitive displacement sensor (CLECDS) is proposed. It is based on the linear encoder capacitive displacement sensor that consists of two substrates with a series of conducting grating in identical size and it is used as a contact sensor of which the two substrates assembled faced to each other after coated with thin dielectric film. It was confirmed that the prototype of this sensor has resolution of about 126nm and measuring range of 20 mm in the test.

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References

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