한국공작기계학회논문집 (Transactions of the Korean Society of Machine Tool Engineers)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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액시머 레이저를 이용한 마이크로 렌즈 가공 모델링 및 시뮬레이션

Micromachining Modelling and Simulation for Microlens Using Excimer Laser

  • 최경현 (제주대학교 기계공학부) ;
  • 배창현 (부산대학교 지능기계공학부)
  • 발행 : 2004.02.01
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초록

This paper addresses the method for figuring out the hole diameter on the mask containing the information about machining depth. With this mask e micro machining is carried out with a simple 2D movement of the mask. Based on e suggested method excimer laser ablation processes are modeled and determination of the optimal laser ablation conditions such as hole diameter, step size, mask movement velocity, etc. is completed. The excimer laser ablation simulation for creating 3D micro lens is carried out by employing determined ablation conditions to prove verification of the method. The results from simulation illustrated the average error of 140nm and e relative error of 2％.

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참고문헌

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