대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

선택적 경사 노광과 후면 노광에 의한 3차원 구조물의 제작

Fabrication of 3-D Structures by Inclined and Rear-side Exposures

  • 발행 : 2004.01.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

3D microstructures with different side-wall angles and different scales are fabricated by both methods of inclined exposure and rear-side exposure at each of selected areas on a same substrate. Conventional methods of inclined exposure are used to make side-walls with a same inclined angle on one substrate and to get a scale error due to front-side exposure through thick photoresist layer, But, by using the proposed method, we are able to fabricate 3D microstructures on a same substrate with various side-wall angles and accurate dimensions as the original design. In the rear-side exposure, UV exposure light reflects from the chromium mask pattern after passing through the thick photoresist layer, resulting in fabrication of well-defined, inclined 3D structures inside the thick photoresist layer.

키워드

참고문헌

  1. O Tabata et al, 'Fabrication of 3-Dimensional Microstructures using Moving Mask Deep X -ray Lithography,' MEMS'01, pp 94-97, 2001 https://doi.org/10.1109/MEMSYS.2001.906487
  2. Jong-Yeon Park, et al., 'Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining,' ICEE '02 pp 1444-1448, 2002
  3. Hironobu Sato, et al, 'A Novel fabrication of in-channel 3-D micromesh structure using maskless multi -angle exposure and its microfilter application,' IEEE Proc. MEMS 2003 pp. 223-226, 2003 https://doi.org/10.1109/MEMSYS.2003.1189726
  4. Yong- Kyu Yoon, et al, 'Integrated vertical screen microfilter system using inclined SU-8 structures,' IEEE Proc. MEMS 2003 pp. 227-230, 2003 https://doi.org/10.1109/MEMSYS.2003.1189727
  5. 김종오, 최연익, '실리콘의 비등방성 부식에 있어서 하부부식에 대한 실험적 고찰,' 아주대학교 논문집 제10권 pp. 21-31, Feb. 1988
  6. Ehrfeld, W. Gotz, F. Munchmeyer, D. Schelb, W. Schmidt, D., 'LIGA process: sensor construction techniques via X -ray lithography,' Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE, pp 1-4, Iun 1988 https://doi.org/10.1109/SOLSEN.1988.26418
  7. Eugene hecht, 'Optics,' Addison-Wesley, pp 420-421, 1998