Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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A Magnetic Microsensor based on the Hall Effect in an AC Microplasma

극미세 교류 플라즈마 내에서의 홀 효과를 이용한 마이크로 자기센서

  • 서영호 (한국과학기술원 디지털나노구동연구단) ;
  • 한기호 (한국과학기술원 디지털나노구동연구단) ;
  • 조영호 (한국과학기술원 디지털나노구동연구단)
  • Published : 2003.08.01
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Abstract

This paper presents a new class of magnetic microsensors based on the Hall effect in AC microplasma. In the theoretical study, we develop a simple model of the plasma Hall sensor and express the plasma Hall voltage as a function of magnetic field, plasma discharge field, pressure, and electrode geometry. On this basis, we have designed and fabricated magnetic microsensors using AC neon plasma. In the experiment, we have measured the Hall voltage output of the plasma microsensors for varying five different conditions, including the frequency and the magnitude of magnetic field, the frequency and the magnitude of plasma discharge voltage, and the neon pressure. The fabricated magnetic microsensors show a magnetic field sensitivity of 8.87${\pm}$0.18㎷/G with 4.48% nonlinearity.

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References

  1. Lenz, J.E., 1990, 'A Review of Magnetic Sensors,' Proc. of IEEE, Vol. 78, No. 6, pp. 973-989 https://doi.org/10.1109/5.56910
  2. Sugiyama, Y., Itoii, J. and Kanemaru, S., 1993, 'Vacuum Magnetic Sensor with Comb- Shaped Field Emitter Arrays,' Tech, Digest of Transducers'93, pp. 884-887
  3. Franklin, R.N., 1976, Plasma Phenomena in Gas Discharge, Oxford University Press
  4. Meek, J.M., Graggs, J.D., 1953, Electrical Breakdown of Gases, Clarendon Press, Oxford
  5. Lichtenberg, L.A. and Allan, J., Principles of plasma discharges and materials processing, Wiley, 1994
  6. Shim, D.S., 1998, Discharge Mechanism in a Micro Capacitive Discharge Cell, Master Thesis, KAIST